Method and system for providing a quality metric for improved process control
US-11372340-B2 · Jun 28, 2022 · US
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Kandel Daniel patents
Kandel Daniel holds 6 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 6 |
| Recent patents | 0 |
| First publication | Jul 28, 2015 |
| Latest publication | Jun 28, 2022 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
US-9927718-B2 · Mar 27, 2018 · US
Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation
US-9620426-B2 · Apr 11, 2017 · US
Optics symmetrization for metrology
US-9164397-B2 · Oct 20, 2015 · US
Structured illumination for contrast enhancement in overlay metrology
US-9104120-B2 · Aug 11, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and system for providing a quality metric for improved process control
US-11372340-B2 · Jun 28, 2022 · US
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
US-9927718-B2 · Mar 27, 2018 · US
Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation
US-9620426-B2 · Apr 11, 2017 · US
Optics symmetrization for metrology
US-9164397-B2 · Oct 20, 2015 · US
Structured illumination for contrast enhancement in overlay metrology
US-9104120-B2 · Aug 11, 2015 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 5 |
| Electricity | 4 |