Capacitively-coupled plasma processing system having a plasma processing chamber for processing a substrate
US-9251999-B2 · Feb 2, 2016 · US
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Dhindsa Rajinder — Physics
Dhindsa Rajinder holds 2 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Dhindsa Rajinder |
| Technology | Physics |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2016 |
Representative patents
Notable publications linking Dhindsa Rajinder to Physics.
Recent filings
Latest patents from Dhindsa Rajinder in Physics.
Capacitively-coupled plasma processing system having a plasma processing chamber for processing a substrate
US-9251999-B2 · Feb 2, 2016 · US
Methods and apparatus for detecting azimuthal non-uniformity in a plasma processing system
US-9245720-B2 · Jan 26, 2016 · US
Methods and apparatus for detecting azimuthal non-uniformity in a plasma processing system
US-9245720-B2 · Jan 26, 2016 · US
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