Method and apparatus for shaping a gas profile near bevel edge
US-9721782-B2 · Aug 1, 2017 · US
Shareef Iqbal was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Shareef Iqbal |
| Year | 2017 |
| Patents | 1 |
Representative publications for Shareef Iqbal in 2017.
US-9721782-B2 · Aug 1, 2017 · US
Most common classification codes for Shareef Iqbal in 2017.
| CPC | Patents |
|---|---|
| C23C16/455 | 1 |
| H01L21/02087 | 1 |
| H01L21/31116 | 1 |
| H01L21/31138 | 1 |
| H01L21/32136 | 1 |
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