Substrate processing apparatus and method for manufacturing semiconductor device using the same
US-10640865-B2 · May 5, 2020 · US
Lee Joon Myoung was listed as an assignee on 1 patent publication in 2020.
| Metric | Value |
|---|---|
| Company | Lee Joon Myoung |
| Year | 2020 |
| Patents | 1 |
Representative publications for Lee Joon Myoung in 2020.
Most common classification codes for Lee Joon Myoung in 2020.
| CPC | Patents |
|---|---|
| C23C14/0036 | 1 |
| C23C14/0063 | 1 |
| C23C14/0068 | 1 |
| C23C14/08 | 1 |
| C23C14/34 | 1 |
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