Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
US-9541843-B2 · Jan 10, 2017 · US
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Lof Joeri patents in 2017
Lof Joeri was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Lof Joeri |
| Year | 2017 |
| Patents | 1 |
Patents
Representative publications for Lof Joeri in 2017.
Top CPC classifications
Most common classification codes for Lof Joeri in 2017.
| CPC | Patents |
|---|---|
| G03F7/20 | 1 |
| G03F7/70141 | 1 |
| G03F7/70341 | 1 |
| G03F7/7085 | 1 |
| G03F7/70883 | 1 |
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