Projection objective for microlithography with stray light compensation and related methods
US-9063439-B2 · Jun 23, 2015 · US
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Kraehmer Daniel patents in 2015
Kraehmer Daniel was listed as an assignee on 1 patent publication in 2015.
| Metric | Value |
|---|---|
| Company | Kraehmer Daniel |
| Year | 2015 |
| Patents | 1 |
Patents
Representative publications for Kraehmer Daniel in 2015.
Top CPC classifications
Most common classification codes for Kraehmer Daniel in 2015.
| CPC | Patents |
|---|---|
| G03F7/70275 | 1 |
| G03F7/70308 | 1 |
| G03F7/70341 | 1 |
| G03F7/70591 | 1 |
| G03F7/70941 | 1 |
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