Method and apparatus for surface treatment using inorganic acid and ozone
US-9653328-B2 · May 16, 2017 · US
Kumning Franz was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Kumning Franz |
| Year | 2017 |
| Patents | 1 |
Representative publications for Kumning Franz in 2017.
Most common classification codes for Kumning Franz in 2017.
| CPC | Patents |
|---|---|
| B08B3/10 | 1 |
| G03F7/42 | 1 |
| G03F7/423 | 1 |
| H01L21/31133 | 1 |
| H01L21/6708 | 1 |
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