Method and apparatus for surface treatment using inorganic acid and ozone

Patent metadata

Field	Value
Publication number	US-9653328-B2
Application number	US-201414242601-A
Country	US
Kind code	B2
Filing date	Apr 1, 2014
Priority date	Dec 3, 2010
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

An apparatus for treating a surface of an article includes a chamber for receiving an article to be treated. A dispenser dispenses a treatment liquid including inorganic acid onto the article. A tank stores the treatment liquid. An ozone generator communicates with a supply line entering or exiting the tank to mix ozone with the treatment liquid. A cooler cools the treatment liquid to a subambient temperature in a range of 3° C. to less than 20° C. A heater heats a surface of an article to be treated to a temperature at least 30° C. greater than a temperature of the treatment liquid when applied to the article.

First claim

What is claimed is:

1. An apparatus for treating a surface of an article, comprising:
a chamber for receiving an article to be treated;
a dispenser for dispensing a treatment liquid including inorganic acid onto the article;
a tank for storing the treatment liquid;
an ozone generator in communication with a supply line entering or exiting the tank to mix ozone with the treatment liquid;
a cooler to cool the treatment liquid to a subambient temperature in a range of 3° C. to less than 20° C.; and
a heater for heating a surface of an article to be treated to a temperature at least 30° C. greater than a temperature of the treatment liquid when applied to the article.

2. The apparatus according to claim 1 , wherein the heater is an infrared heater disposed inside the chamber and adapted to heat a surface of an article disposed within the chamber to a temperature in excess of 50° C.

3. The apparatus according to claim 1 , wherein the apparatus is a single wafer wet processing station comprising a spin chuck adapted to hold a semiconductor wafer, and the dispenser is positioned relative to the spin chuck so as to dispense the treatment liquid downwardly onto an upwardly facing surface of the semiconductor wafer.

4. The apparatus according to claim 1 , wherein the heater is an infrared heater disposed adjacent the chamber and separated from an interior of the chamber by a sheet of transparent material.

5. The apparatus according to claim 1 , wherein the heater is an infrared heater comprising a plurality of concentric IR heating elements, the heating elements being individually tunable so as to ensure uniform heating of the surface of the article.

6. The apparatus according to claim 4 , wherein the apparatus includes a spin chuck adapted to hold a semiconductor wafer, and wherein the sheet of transparent material is recessed within the spin chuck and is separated from the article to be treated by a gap of less than 10 mm.

7. The apparatus of claim 1 , wherein the cooler cools the treatment liquid to a temperature in a range of 5° C. to 18° C.

8. The apparatus of claim 1 , wherein the cooler cools the treatment liquid to a temperature in a range of 10° C. to 15° C.

9. The apparatus of claim 1 , wherein a concentration of inorganic acid in the treatment liquid is at least 80 mass %.

10. The apparatus of claim 1 , wherein a concentration of inorganic acid in the treatment liquid is at least 90 mass %.

11. The apparatus of claim 1 , wherein the treatment liquid comprises an aqueous sulfuric acid solution having a sulfuric acid concentration of at least 98.3 mass %.

12. The apparatus of claim 1 , wherein the inorganic acid is supplied at a flow rate of 0.5 to 5 liters per minute from the dispenser.

13. The apparatus of claim 1 , wherein the inorganic acid is supplied at a flow rate of 0.7 to 2 liters per minute from the dispenser.

14. The apparatus of claim 1 , wherein the heater begins heating the surface of the article after the dispenser starts dispensing the treatment liquid.

Assignees

• Okorn-Schmidt Harald
• Kumning Franz
• Obweger Rainer
• Wirnsberger Thomas
• Lam Res Ag

Inventors

• Okorn-Schmidt Harald
• Kumning Franz
• Obweger Rainer
• Wirnsberger Thomas

Classifications

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P50/287

  by chemical means · CPC title

• H10P72/0424 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• G03F7/423 Primary

  containing mineral acids or salts thereof, containing mineral oxidizing substances, e.g. peroxy compounds · CPC title