Shared gas panels in plasma processing chambers employing multi-zone gas feeds
US-9091397-B2 · Jul 28, 2015 · US
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Agarwal Piyush patents in 2015
Agarwal Piyush was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Agarwal Piyush |
| Year | 2015 |
| Patents | 2 |
Patents
Representative publications for Agarwal Piyush in 2015.
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US-8949952-B2 · Feb 3, 2015 · US
Top CPC classifications
Most common classification codes for Agarwal Piyush in 2015.
| CPC | Patents |
|---|---|
| C23C16/455 | 1 |
| C23F1/08 | 1 |
| F17D1/00 | 1 |
| G05D11/00 | 1 |
| G05D11/13 | 1 |
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