Piezoelectric and electromagnetic type two-dimensional optical deflector and its manufacturing method
US-9632309-B2 · Apr 25, 2017 · US
US9997984B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9997984-B2 |
| Application number | US-201315105811-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 19, 2013 |
| Priority date | Dec 19, 2013 |
| Publication date | Jun 12, 2018 |
| Grant date | Jun 12, 2018 |
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A driving apparatus ( 101 ) is provided with: a first base part ( 110 ); a second base part ( 120 ); an elastic part ( 210 ) configured to couple the first base part with the second base part; a coil ( 300 ) disposed on the first base part; a first magnet ( 710 ) disposed on one side of the coil; a second magnet ( 720 ) disposed on an opposite side of the first magnet as viewed from the coil; a first middle yoke ( 810 ) provided on a surface of the first magnet opposed to the coil; and a second middle yoke ( 820 ) provided on a surface of the second magnet opposed to the coil. In particular, the first magnet is smaller than the second magnet. The first middle yoke is located closer to the coil than the second middle yoke is.
Opening claim text (preview).
The invention claimed is: 1. A driving apparatus comprising: a first base part which is coupled to the driven part; a coil disposed on the first base part; a first magnet disposed on one side of the coil; a second magnet disposed on an opposite side of the first magnet as viewed from the coil; a first middle yoke provided on a surface of the first magnet opposed to the coil; and a second middle yoke provided on a surface of the second magnet opposed to the coil, wherein the first magnet is smaller than the second magnet, and the first middle yoke is located closer to the coil than the second middle yoke is. 2. The driving apparatus according to claim 1 , wherein the second magnet is disposed on the driven part side as viewed from the coil. 3. The driving apparatus according to claim 2 , wherein the first magnet has a first part and a second part, the first part being provided along a first side of the first base part that is not opposed to the driven part, the second part being provided along a second side adjacent to the first side, the second magnet has a third part and a fourth part, the third part being provided along a third side of the first base part that is opposed to the driven part, the fourth part being provided along a fourth side adjacent to the third side, the first part is smaller than the third part, and a part of the first middle yoke provided on a surface of the first part is located closer to the coil than a part of the second middle yoke provided on a surface of the third part is. 4. The driving apparatus according to claim 1 , wherein the first middle yoke and the second middle yoke are arranged not to planarly overlap the first base part and the driven part. 5. The driving apparatus according to claim 1 , further comprising a yoke inserted through an opening of the first base part. 6. The driving apparatus according to claim 1 , wherein the driven part is coupled to the first base part via a second base part which rotatably supports the driven part. 7. The driving apparatus according to claim 2 , wherein the first middle yoke and the second middle yoke are arranged not to planarly overlap the first base part and the driven part. 8. The driving apparatus according to claim 3 , wherein the first middle yoke and the second middle yoke are arranged not to planarly overlap the first base part and the driven part. 9. The driving apparatus according to claim 2 , further comprising a yoke inserted through an opening of the first base part. 10. The driving apparatus according to claim 3 , further comprising a yoke inserted through an opening of the first base part. 11. The driving apparatus according to claim 4 , further comprising a yoke inserted through an opening of the first base part.
the reflecting means being moved or deformed by electromagnetic means · CPC title
with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets · CPC title
Increasing angular deflection · CPC title
Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title
Rotation out of a plane parallel to the substrate · CPC title
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