Photoacoustic chemical detector

US9995674B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9995674-B2
Application numberUS-201414584004-A
CountryUS
Kind codeB2
Filing dateDec 29, 2014
Priority dateDec 26, 2013
Publication dateJun 12, 2018
Grant dateJun 12, 2018

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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Abstract

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A laser vibrometer for measurement of ambient chemical species includes a laser that produces a beam that is split into a reference readout beam and a signal readout beam. A probe laser beam is tuned to an absorption feature of a molecular transition, and generates acoustic signals when incident on a gaseous species via the photo acoustic effect. The scattered acoustic signals are incident on a thin membrane that vibrates. The readout laser beam reflected from the vibrating membrane is mixed with the reference beam at the surface of a photo-EMF detector. Interferrometric fringes are generated at the surface of the photo-EMF detector. Electric current is generated in the photo-EMF detector when the fringes are in motion due to undulations in the signal readout beam imparted by the vibrating membrane. A highly sensitive photo-EMF detector is capable of detecting picoJoules or less laser energy generated by vibrating processes.

First claim

Opening claim text (preview).

What is claimed is: 1. A laser vibrometer capable of detecting chemical species, comprising: a light source configured to produce beams of monochromatic light including: an external probe beam, having a wavelength corresponding to an absorption feature of the chemical species to be detected; a reference beam; and a sensing beam; a pressure-sensing diaphragm which when impacted by the pressure waves resulting from the external probe beam interacting with a chemical species that is located away from the sensing beam responsively vibrates; a photo-electromotive force (photo-EMF) sensor; wherein the sensing beam is directed against the second side of the pressure sensing diaphragm; and wherein the sensing beam is directed to the photo-EMF sensor from the pressure-sensing diaphragm which photo-EMF sensor outputs a signal corresponding to the displacement of the diaphragm caused by the incident pressure wave. 2. The laser vibrometer of claim 1 , wherein the light source includes: a laser configured to produce a beam of monochromatic light having a wavelength corresponding to an absorption feature of the chemical species to be detected; a first beam splitter configured to split the beam of monochromatic light into the external probe beam and an internal beam; and a second beam splitter configured to split the internal beam into the reference beam and the sensing beam, the reference beam being directed to a photosensor. 3. The laser vibrometer of claim 2 , including: an external mirror configured to reflect the external probe beam. 4. The laser vibrometer of claim 3 , including: a lens configured to direct the external probe beam after the external probe beam reflects from the external mirror. 5. The laser vibrometer of claim 1 , wherein the laser produces a beam of light having a wavelength of about 2.3 microns to detect carbon monoxide. 6. The laser vibrometer of claim 1 , wherein: the laser produces a beam of light having a wavelength of 1.6 or 3.3 microns to detect methane. 7. The laser vibrometer of claim 1 , wherein: the laser comprises a nonlinear device configured to generate tunable laser wavelengths. 8. The laser vibrometer of claim 1 , including: a housing defining an interior space, and wherein the light source, the pressure-sensing diaphragm, and the photo-EMF sensor are disposed in the interior space. 9. The laser vibrometer of claim 8 , wherein: the external probe beam travels outside of the housing. 10. The laser vibrometer of claim 1 , wherein: the pressure-sensing diaphragm comprises ZnO that is nanolayered onto a silicon-based layer of material. 11. The laser vibrometer of claim 10 , wherein: the silicon-based layer of material comprises a silicon carbide. 12. The laser vibrometer of claim 1 , wherein: the photo-EMF sensor comprises detector material defining a bandgap that is tuned based on the absorption features of a chemical species that is to be detected. 13. The laser vibrometer of claim 12 , wherein: the detector material comprises CdSe having multiple doping of transition elements into the CdSe. 14. The laser vibrometer of claim 12 , wherein: the photo-EMF sensor comprises a nanotechnology based bandgap tuned device. 15. The laser vibrometer of claim 12 , wherein: Wherein the reference beam is shifted to a different frequency than that of the sensing beam. 16. A chemical species detector, comprising: a light source configured to produce beams of monochromatic light including: a first beam, having a wavelength corresponding to an absorption feature of the chemical species to be detected; a second beam; and a third beam; a pressure-sensing diaphragm which when impacted by the pressure waves resulting from the first beam interacting with a chemical species that is located away from the third beam responsively vibrates; a photo-electromotive force (photo-EMF) sensor, configured and arranged to detect displacements of the pressure sensing diaphragm as little as 10 femtometers; a housing defining an interior space, and wherein the light source the pressure-sensing diaphragm, the photo-EMF sensor, the second beam and the third beam are contained within the interior space; wherein the chemical species is located outside of the interior space and the first beam is directed outside of the interior space; wherein the third beam is directed against the second side of the pressure sensing diaphragm; and wherein the third beam is directed to the photo-EMF sensor from the pressure-sensing diaphragm which photo-EMF sensor outputs a signal corresponding to the displacement of the diaphragm caused by the incident pressure wave; and wherein the second beam is frequency shifted from that of the third beam and the sensor is configured to perform phase measurements by heterodyning a frequency shifted second beam and the third beam.

Assignees

Inventors

Classifications

  • in gases · CPC title

  • by spectral analysis, e.g. Fourier analysis {or wavelet analysis (spectral signal processing per se G06F17/14)} · CPC title

  • using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics (photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046) · CPC title

  • the vibrations causing a variation in the relative position of the end of a fibre and another element · CPC title

  • with opto-acoustic detection, e.g. for gases or analysing solids · CPC title

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What does patent US9995674B2 cover?
A laser vibrometer for measurement of ambient chemical species includes a laser that produces a beam that is split into a reference readout beam and a signal readout beam. A probe laser beam is tuned to an absorption feature of a molecular transition, and generates acoustic signals when incident on a gaseous species via the photo acoustic effect. The scattered acoustic signals are incident on a…
Who is the assignee on this patent?
Nasa, Nasa
What technology area does this patent fall under?
Primary CPC classification G01N21/1702. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Jun 12 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).