Detection of foreign material on a substrate chuck
US-2016327462-A1 · Nov 10, 2016 · US
US9995671B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-9995671-B1 |
| Application number | US-201715498275-A |
| Country | US |
| Kind code | B1 |
| Filing date | Apr 26, 2017 |
| Priority date | Aug 24, 2015 |
| Publication date | Jun 12, 2018 |
| Grant date | Jun 12, 2018 |
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In a computer-implemented method and system for capturing the condition of a structure, the structure is scanned with a three-dimensional (3D) scanner. The 3D contact scanner includes a tactile sensor system having at least one tactile sensor for generating 3D data points based on tactile feedback resulting from physical contact with at least part of the structure. A 3D model is constructed from the 3D data and is then analyzed to determine the condition of the structure.
Opening claim text (preview).
We claim: 1. A computer-implemented method of inspecting a structure, the method comprising: deploying one or more three-dimensional (3D) contact scanners to scan a structure; and detecting 3D information about the structure by implementing a tactile sensor system of the one or more 3D contact scanners across a surface of at least part of the structure, the tactile sensor system including at least one tactile sensor, the at least one tactile sensor including a pinscreen stamp, wherein implementing the tactile sensor system includes measuring one or more of: (1) resistance to pressure being applied to at least one point of a plurality of points on the surface of at least part of the structure via the at least one tactile sensor; or (2) a depth of at least one point of the plurality of points on the surface of the at least part of the structure via the at least one tactile sensor. 2. The method of claim 1 , further comprising generating, at the one or more 3D contact scanners, a plurality of 3D data points, wherein at least one point of the plurality of 3D data points corresponds to at least one point of the plurality of points on the surface of the structure detected by the at least one tactile sensor. 3. A computer-implemented method of inspecting a structure, the method comprising: deploying one or more three-dimensional (3D) contact scanners to scan a structure; and detecting 3D information about the structure by implementing a tactile sensor system of the one or more 3D contact scanners across a surface of at least part of the structure, the tactile sensor system including at least one tactile sensor, the at least one tactile sensor including a roller device having a plurality of disks, wherein implementing the tactile sensor system includes measuring one or more of: (1) resistance to pressure being applied to at least one point of a plurality of points on the surface of at least part of the structure via the at least one tactile sensor; or (2) a depth of at least one point of the plurality of points on the surface of the at least part of the structure via the at least one tactile sensor. 4. The method of claim 3 , further comprising generating, at the one or more 3D contact scanners, a plurality of 3D data points, wherein at least one point of the plurality of 3D data points corresponds to at least one point of the plurality of points on the surface of the structure detected by the at least one tactile sensor. 5. A computer-implemented method of inspecting a structure, the method comprising: deploying one or more three-dimensional (3D) contact scanners to scan a structure; and detecting 3D information about the structure by implementing a tactile sensor system of the one or more 3D contact scanners across a surface of at least part of the structure, the tactile sensor system including at least one tactile sensor, the at least one tactile sensor including a whisker device, wherein implementing the tactile sensor system includes measuring one or more of: (1) resistance to pressure being applied to at least one point of a plurality of points on the surface of at least part of the structure via the at least one tactile sensor; or (2) a depth of at least one point of the plurality of points on the surface of the at least part of the structure via the at least one tactile sensor. 6. The method of claim 5 , further comprising generating, at the one or more 3D contact scanners, a plurality of 3D data points, wherein at least one point of the plurality of 3D data points corresponds to at least one point of the plurality of points on the surface of the structure detected by the at least one tactile sensor.
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