Fiber-optic temperature and flow sensor system and methods

Patent metadata

Field	Value
Publication number	US-9995628-B1
Application number	US-201615155773-A
Country	US
Kind code	B1
Filing date	May 16, 2016
Priority date	May 14, 2015
Publication date	Jun 12, 2018
Grant date	Jun 12, 2018

Abstract

A fiber optic sensor, a process for utilizing a fiber optic sensor, and a process for fabricating a fiber optic sensor are described, where a double-side-polished silicon pillar is attached to an optical fiber tip and forms a Fabry-Pérot cavity. In an implementation, a fiber optic sensor in accordance with an exemplary embodiment includes an optical fiber configured to be coupled to a light source and a spectrometer; and a single silicon layer or multiple silicon layers disposed on an end face of the optical fiber, where each of the silicon layer(s) defines a Fabry-Pérot interferometer, and where the sensor head reflects light from the light source to the spectrometer. In some implementations, the fiber optic sensor may include the light source coupled to the optical fiber; a spectrometer coupled to the optical fiber; and a controller coupled to the high speed spectrometer.

First claim

What is claimed is:

1. A fiber optic sensor, comprising:
an optical fiber configured to be coupled to a light source and a spectrometer; and
a first silicon layer disposed on an end face of the optical fiber, where the first silicon layer defines a Fabry-Pérot interferometer and a sensor head, where the sensor head reflects light from the light source to the spectrometer, and where the first layer includes a double sided-polished silicon pillar less than approximately 200 μm in length.

2. The fiber optic sensor of claim 1 , wherein the optical fiber includes a fused silica single mode fiber.

3. The fiber optic sensor of claim 1 , wherein the optical fiber includes a circulator.

4. The fiber optic sensor of claim 1 , wherein the first silicon layer has a diameter approximately the same as a diameter of the optical fiber.

5. The fiber optic sensor of claim 1 , further comprising:
the light source coupled to the optical fiber;
the spectrometer coupled to the optical fiber; and
a controller coupled to the spectrometer.

6. The fiber optic sensor of claim 5 , wherein the spectrometer is based on a transmission grating and a diode array operating in the 1550 nm wavelength window.

7. The fiber optic sensor of claim 1 , further comprising:
a heating light source coupled to the optical fiber.

8. The fiber optic sensor of claim 7 , wherein the heating light source includes a short wavelength diode laser.

9. A process for fabricating a fiber optic sensor, comprising:
forming at least one silicon pillar on a silicon substrate;
forming a thin film adhesive on a glass substrate;
pressing an end face of an optical fiber onto the thin film adhesive and releasing;
placing the thin film adhesive on the end face onto the at least one silicon pillar; and
curing the thin film adhesive to form the fiber optic sensor.

10. The process for fabricating the fiber optic sensor in claim 9 , wherein the at least one silicon pillar is approximately 80 μm in diameter and approximately 200 μm in length.

11. The process for fabricating the fiber optic sensor in claim 9 , wherein the at least one silicon pillar includes a metal coating disposed on an end face of the at least one silicon pillar that is distal from the optical fiber.

12. The process for fabricating the fiber optic sensor in claim 9 , wherein the thin film adhesive includes at least one of a UV-curable glue, an epoxy-based adhesive, or a gel-based adhesive.

13. A fiber optic sensor, comprising:
an optical fiber configured to be coupled to a light source and a spectrometer; and
a first silicon layer disposed on an end face of the optical fiber, where the first silicon layer defines a Fabry-Pérot interferometer and a sensor head, where the sensor head reflects light from the light source to the spectrometer,
wherein the first silicon layer includes a double sided-polished silicon pillar with a diameter less than approximately 100 μm.

14. A fiber optic sensor, comprising:
an optical fiber configured to be coupled to a light source and a spectrometer;
a first silicon layer disposed on an end face of the optical fiber, where the first silicon layer defines a Fabry-Pérot interferometer and a sensor head, where the sensor head reflects light from the light source to the spectrometer; and
a second silicon layer disposed on the first silicon layer, where a first silicon layer length is different from a second silicon layer length.

Assignees

• Univ Nebraska
• Nutech Ventures

Inventors

• Han Ming
• Liu Guigen
• Hou Weilin

Classifications

• G01J3/26

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title

• G01F1/661

  using light · CPC title

• G01J3/45 Primary

  Interferometric spectrometry · CPC title

• G02B6/29359

  Cavity formed by light guide ends, e.g. fibre Fabry Pérot [FFP] · CPC title

• G02B6/2766

  Manipulating the plane of polarisation from one input polarisation to another output polarisation, e.g. polarisation rotators, linear to circular polarisation converters · CPC title