Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage

Patent metadata

Field	Value
Publication number	US-9995569-B2
Application number	US-201615568118-A
Country	US
Kind code	B2
Filing date	Mar 15, 2016
Priority date	Apr 23, 2015
Publication date	Jun 12, 2018
Grant date	Jun 12, 2018

Abstract

A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.

First claim

What is claimed is:

1. A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, wherein the exposure region ( 10 ) is a region formed by projecting an exposure light beam ( 2 ) onto a movable platform ( 3 ), wherein the method comprises following steps:
fixing a planar grating ( 9 ) below a permanent magnet array ( 8 ) of the movable platform such that a measurement surface of the planar grating faces a coil array ( 4 ), and fixing a reading head ( 5 ) in a gap of the coil array such that a central line of the reading head coincides with a central line of a lens ( 1 );
forming a measurement region ( 11 ) on the planar grating by irradiating a measurement light beam ( 6 ) of the reading head onto the planar grating, wherein a center B of the measurement region and a center A of the exposure region ( 10 ) are located at a same vertical line;
obtaining a six-degree-of-freedom pose (p x , p y , p z , θ x , θ y , θ z ) of the measurement region at a moment by measurement with the reading head and the planar grating, wherein (p x , p y , p z ) is a coordinate of the center B of the measurement region, and θ x , θ y , θ z are included angles formed between a normal line of a plane, in which the measurement region is located, along a positive Z direction and coordinate axes X, Y and Z, respectively;
calculating and obtaining a six-degree-of-freedom pose of the exposure region by substituting the six-degree-of-freedom pose of the measurement region into (p x ′, p y ′, p z ′, θ x ′, θ y ′, θ z ′)=(p x +L cos θ x , p y +L cos θ y , p z +L cos θ z , θ y , θ z ), wherein a part of the movable platform covered by the exposure region is taken as a rigid body approximately, wherein p x ′, p y ′, p z ′ represent a position of the center A of the exposure region, θ x ′, θ y ′, θ z ′ represent included angles formed between a normal line of a plane, in which the exposure region is located, along the positive Z direction and the coordinate axes X, Y and Z, respectively, and L is a distance between the center A and the center B; and
obtaining a six-degree-of-freedom displacement of the exposure region from a previous moment to a next moment by subtracting the six-degree-of-freedom pose of the exposure region at the previous moment from the six-degree-of-freedom pose of the exposure region at the next moment when the movable platform moves to the next moment.

Assignees

• Univ Tsinghua
• Beijing U Prec Tech Co Ltd

Inventors

• Zhu Yu
• Zhang Ming
• Chen Anlin
• Cheng Rong
• Yang Kaiming
• Liu Feng
• Song Yujing
• Zhi Fan
• Hu Jinchun
• Xu Dengfeng
• Mu Haihua
• Hu chuxiong

Classifications

• G03F9/7046

  Strategy, e.g. mark, sensor or wavelength selection · CPC title

• G01B11/14 Primary

  for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00) · CPC title

• G01B11/272 Primary

  using photoelectric detection means · CPC title

• G01D5/38

  by diffraction gratings · CPC title

• G03F7/70775

  Position control, e.g. interferometers or encoders for determining the stage position · CPC title