Copper film with large grains, copper clad laminate having the same and manufacturing method of copper clad laminate

Patent metadata

Field	Value
Publication number	US-9994967-B2
Application number	US-201514948708-A
Country	US
Kind code	B2
Filing date	Nov 23, 2015
Priority date	Dec 11, 2014
Publication date	Jun 12, 2018
Grant date	Jun 12, 2018

Abstract

The present invention provides a copper film with large grains, where, at least one surface, more than 50% area of the copper film is [100]-oriented grains, and the average size of [100]-oriented grains is more than 150 μm. The grains on the copper film have large grain sizes and high preferred orientation, so that the copper film is provided with excellent properties such as flexibility, stability and electro-migration resistance. A copper foil laminate with the above-mentioned copper film is also herein provided.

First claim

What is claimed is:

1. A copper film with large grains, wherein a plurality of grains of more than 50% area of at least one surface of the copper film are grown along a crystal axis direction [100], and an average size of the plurality of grains is more than 150 μm.

2. The copper film with large grains according to claim 1 , wherein the plurality of grains of more than 80% area of the at least one surface of the copper film are grown along the crystal axis direction [100].

3. The copper film with large grains according to claim 1 , wherein a thickness of the copper film is 0.1-200 μm.

4. The copper film with large grains according to claim 1 , wherein a thickness of the copper film is 2-50 μm.

5. The copper film with large grains according to claim 1 , wherein the average size of the plurality of grains is 400-700 μm.

6. The copper film with large grains according to claim 1 , wherein the plurality of grains are grown at upper and lower surfaces of the copper film.

7. A copper clad laminate, comprising:
a laminate; and
a copper film with large grains disposed on the laminate, wherein a plurality of grains of more than 50% area of at least one surface of the copper film are grown along a crystal axis direction [100], and an average size of the plurality of grains is more than 150 μm.

8. The copper foil laminate according to claim 7 , wherein the plurality of grains of more than 80% area of the at least one surface of the copper film are grown along the crystal axis direction [100].

9. The copper foil laminate according to claim 7 , wherein a thickness of the copper film is 0.1-200 μm.

10. The copper foil laminate according to claim 7 , wherein a thickness of the copper film is 2-50 μm.

11. The copper foil laminate according to claim 7 , wherein the average size of the plurality of grains is 400-700 μm.

12. The copper foil laminate according to claim 7 , wherein the plurality of grains are grown at upper and lower surfaces of the copper film.

13. The copper clad laminate according to claim 7 , further comprising:
an adhesive layer disposed between the copper film and the laminate.

14. The copper clad laminate according to claim 13 , wherein a material of the adhesive layer is titanium tungsten (TiW).

15. The copper clad laminate according to claim 7 , further comprising a copper seed layer disposed between the copper film and the laminate.

16. A manufacturing method of the copper clad laminate, comprising:
growing copper grains on one surface of a laminate by electroplating to obtain a [111]-oriented nanotwinned copper film; and
annealing the [111]-oriented nanotwinned copper film under a temperature of 200-500° C. to obtain a copper film with a plurality of grains where an average size of the plurality of grains is more than 150 μm, wherein more than 50% of a plurality of grains of the copper film are grown along a crystal axis direction [100].

Assignees

• National Chaio Tung Univ
• Univ National Chiao Tung

Inventors

• Chen Chih
• Lu Chia-Ling

Classifications

• C25D3/38

  of copper · CPC title

• C23C28/42

  characterized by the composition of the alternating layers · CPC title

• Y10T428/12903

  Cu-base component · CPC title

• C23C28/023

  only coatings of metal elements only · CPC title

• Y10T428/12431

  Foil or filament smaller than 6 mils · CPC title