Method for forming bond between different elements

Patent metadata

Field	Value
Publication number	US-9994684-B2
Application number	US-201514691214-A
Country	US
Kind code	B2
Filing date	Apr 20, 2015
Priority date	Dec 24, 2009
Publication date	Jun 12, 2018
Grant date	Jun 12, 2018

Abstract

Described is a doping technique that forms a stable amorphous silicon film and a stable polycrystalline silicon film at a low temperature and simultaneously that imparts conductivity in an atmospheric pressure environment. A method for producing a compound containing a bond between different elements belonging to Group 4 to Group 15 of the periodic table, the method including: applying, at a low frequency and atmospheric pressure, high voltage to an inside of an electric discharge tube obtained by attaching high-voltage electrodes to a metal tube or an insulator tube or between flat plate electrodes while passing an introduction gas, so as to convert molecules present in the electric discharge tube or between the flat plate electrodes into a plasma; and applying the plasma to substances to be irradiated, the substances to be irradiated being two or more elementary substances or compounds.

First claim

The invention claimed is:

1. A method for producing a compound containing a bond between different elements belonging to Group 4 to Group 15 of the periodic table, the method comprising:
applying, at a frequency and atmospheric pressure, voltage to an inside of an electric discharge tube obtained by attaching electrodes to a metal tube or an insulator tube or between two flat plate electrodes formed of an insulator provided with electrodes while passing an introduction gas, so as to convert molecules present in the electric discharge tube or between the flat plate electrodes into a plasma; and
applying the plasma to substances to be irradiated at a pressure of about atmospheric pressure, wherein
the substances to be irradiated being two or more elementary substances belonging to Group 4 to Group 15 of the periodic table, two or more compounds containing the element belonging to Group 4 to Group 15, or a combination of the elementary substance belonging to Group 4 to Group 15 and the compound,
wherein one of the substances to be irradiated is a compound containing a Group 14 element and another is a gas of an elementary substance belonging to Group 4 to Group 15 or a gas of a compound containing the element belonging to Group 4 to Group 15, or
one of the substances to be irradiated is a compound containing a Group 14 element, another is an elementary substance belonging to Group 13, a compound containing the element belonging to Group 13, an elementary substance belonging to Group 15, or a compound containing the element belonging to Group 15, and the elementary substance belonging to Group 13, the compound containing the element belonging to Group 13, the elementary substance belonging to Group 15, or the compound containing the element belonging to Group 15 is included in a ratio of 0.2 to 10 mol with respect to 1 mol of the compound containing a Group 14 element, and
the compound containing the Group 14 element is at least one silane compound selected from the group consisting of:
a chain silane compound of Formula (1):
Si n H 2n+2   Formula (1)

 wherein in Formula (1), n is an integer of 2 to 40,
a cyclic silane compound of Formula (2):
Si h H 2h   Formula (2)

 wherein in Formula (2), h is an integer of 3 to 10,
a cyclic silane compound of Formula (3):
Si h H 2h-2   Formula (3)

 wherein in Formula (3), h is an integer of 3 to 10, and
a cage silane compound of Formula (4):
Si m H m   Formula (4)

 wherein in Formula (4), m is an integer of 6, 8, or 10, and

wherein in a case where the voltage is applied to the inside of the electric discharge tube obtained by the attaching electrodes to the insulator tube, then the insulator tube is formed of a synthetic polymer, a natural polymer, glass, or ceramic, and in a case where the voltage is applied between the two flat plate electrodes formed of an insulator provided with electrodes, then the insulator is formed of a synthetic polymer, a natural polymer, glass, or ceramic, and
wherein the compound containing the bond between different elements is obtained as a coating on a substrate.

2. The production method according to claim 1 , wherein the compound containing the bond between different elements is a compound containing a bond between different elements belonging to Group 13 to Group 15 of the periodic table.

3. The production method according to claim 1 , wherein the plasma or a radical of a surrounding gas excited by the plasma is applied to the substances to be irradiated and ultraviolet light is also applied to the substances to be irradiated.

4. The production method according to claim 1 , wherein the compound containing the bond between different elements contains a Si—Si bond and a Si—B bond or a Si—P bond.

5. The production method according to claim 1 , wherein the elementary substance belonging to Group 13 or the compound containing the element is an elemental boron or a boron-containing compound of Formula (5):
B i H j   Formula (5)

wherein i is an integer of 1 to 10, and
j is an integer of 0 to 12.

6. The production method according to claim 1 , wherein the elementary substance belonging to Group 15 or the compound containing the element is an elemental phosphorus or a phosphorus-containing compound of Formula (6):
P w X u   Formula (6)

wherein w is an integer of 1 to 10,
u is an integer of 0 to 12, and
X is a hydrogen atom or a monovalent organic group, an elemental arsenic, an arsenic-containing compound, a nitrogen molecule, or a nitrogen-containing compound.

7. The production method according to claim 1 , wherein the introduction is at least one type of gas selected from the group consisting of helium, neon, argon, krypton, xenon, nitrogen molecules, oxygen molecules, hydrogen molecules, carbon dioxide, nitric oxide, nitrogen dioxide, ammonia, halogen molecules, hydrogen halides, sulfur dioxide, hydrogen sulfide, and water vapor.

8. The production method according to claim 1 , wherein the introduction gas is helium gas alone or a mixed gas of helium with at least one type of gas selected from the group consisting of hydrogen molecules, oxygen molecules, nitrogen molecules, carbon dioxide, carbon monoxide, fluorine molecules, and chlorine molecules.

9. The production method according to claim 1 , wherein the two flat plate electrodes are disposed facing each other, one of the electrodes is connected to a power supply, the other is not connected to an earth lead for air discharge or is connected to a grounding electrode, and a gas is passed through between the electrodes so as to convert molecules present between the electrodes into a plasma.

10. The production method according to claim 1 , wherein the two flat plate electrodes are in a container in which the pressure is less than atmospheric pressure, the introduction gas is passed after the pressure is less than atmospheric pressure, and a voltage is applied at atmospheric pressure and a frequency so as to convert molecules present between the electrodes into a plasma.

11. The production method according to claim 1 , wherein the electric discharge tube is formed of the metal tube and is formed of an elementary substance belonging to Group 4 to Group 14 or a mixture containing the elementary substance.

12. The production method according to claim 1 , wherein a power supply used for plasma generation has a frequency of 10 Hz to 100 MHz and an output voltage of 1,000 V to 30,000 V and the plasma is applied at a temperature.

Assignees

• Nissan Chemical Ind Ltd

Inventors

• Furusho Hitoshi
• Nohara Yuki
• Watanabe Hisayuki
• Goto Yuichi

Classifications

• H10P32/1408

  from or through or into an external applied layer, e.g. photoresist or nitride layers · CPC title

• H10P32/171

  being group IV material · CPC title

• H10P14/3454

  Amorphous · CPC title

• H10P14/3444

  P-type · CPC title

• H10P14/3442

  N-type · CPC title