Apparatus for graphene wet transfer

Patent metadata

Field	Value
Publication number	US-9994007-B2
Application number	US-201615044586-A
Country	US
Kind code	B2
Filing date	Feb 16, 2016
Priority date	Jul 30, 2015
Publication date	Jun 12, 2018
Grant date	Jun 12, 2018

Abstract

Disclosed is an apparatus for graphene wet transfer, which includes: a reservoir body having at least two reservoirs; a barrier structure located on the reservoir and having at least one separated space formed by barriers; and a substrate frame located below the barrier structure and having at least one substrate accommodation groove for accommodating a target substrate to which graphene is transferred. Here, each reservoir may be filled with a solution for a wet transfer process, and the graphene may be separately located in each separated space in a floating state in the solution.

First claim

What is claimed is:

1. An apparatus for graphene wet transfer, comprising:
a reservoir body having at least two reservoirs;
a barrier structure located on any one of the at least two reservoirs and having at least one separated space formed; and
a substrate frame located between the barrier structure and the reservoir body, and having at least one substrate accommodation groove for accommodating a target substrate to which graphene are transferred,
wherein each reservoir of the at least two reservoirs is filled with a solution for a wet transfer process, and the graphenes are separately located in each separated space in a floating state in the solution.

2. The apparatus for graphene wet transfer according to claim 1 , further comprising a moving mechanism configured to allow the barrier structure to move in a horizontal direction between upper portions of the reservoirs.

3. The apparatus for graphene wet transfer according to claim 1 ,
wherein lower surfaces of the graphenes are bonded to a catalyst metal at which the graphenes are grown, and upper surfaces of the graphenes are bonded to a graphene support layer which supports the graphenes.

4. The apparatus for graphene wet transfer according to claim 1 ,
wherein each horizontal surface of the separated space has the same vertical axis as each horizontal surface of the substrate accommodation groove corresponding thereto.

5. The apparatus for graphene wet transfer according to claim 4 ,
wherein an outline of each horizontal surface of the separated space matches with an outline of each horizontal surface of the substrate accommodation groove corresponding thereto.

6. The apparatus for graphene wet transfer according to claim 4 ,
wherein an area of each horizontal surface of the separated space is equal to or smaller than an area of each horizontal surface of the substrate accommodation groove corresponding thereto.

7. The apparatus for graphene wet transfer according to claim 1 ,
wherein the substrate accommodation groove has a bottom surface with a predetermined slope.

8. The apparatus for graphene wet transfer according to claim 1 ,
wherein the substrate accommodation groove has a plurality of holes for draining the solution.

9. The apparatus for graphene wet transfer according to claim 1 ,
wherein the substrate frame is detachable.

10. The apparatus for graphene wet transfer according to claim 1 ,
wherein the at least two reservoirs are separated by at least one dividing wall from each other, and
wherein an upper portion of the dividing wall is made of a shielding material in order to minimize movement of the solution while the barrier structure is moving between upper portions of the reservoirs.

11. The apparatus for graphene wet transfer according to claim 1 ,
wherein each of the at least two reservoirs further includes at least one valve for introducing the solution into the reservoir or discharging the solution out of the reservoir.

12. The apparatus for graphene wet transfer according to claim 1 , further comprising a level control pipe connected to each of the at least two reservoirs to adjust a level of a solution filled in each reservoir.

Assignees

• Korea Inst Sci & Tech

Inventors

• Kim Chulki
• Lee Seok
• Kim Jae Hun
• Lee Taikjin
• Seo Minah
• CHOI Jaebin
• Jhon Young Min
• Woo Deok Ha
• Lim Chaehyun

Classifications

• C01B32/184

  Preparation · CPC title

• B32B2264/108

  Carbon, e.g. graphite particles · CPC title

• B32B37/0046

  characterised by constructional aspects of the apparatus · CPC title

• B32B37/025 Primary

  Transfer laminating · CPC title

• B05D1/206

  LB troughs · CPC title