Plasmonics nanostructures for multiplexing implantable sensors

Patent metadata

Field	Value
Publication number	US-9993185-B2
Application number	US-201514621265-A
Country	US
Kind code	B2
Filing date	Feb 12, 2015
Priority date	Feb 12, 2014
Publication date	Jun 12, 2018
Grant date	Jun 12, 2018

Abstract

Methods and systems for nanopillar sensors are described. Nanopillars can be defined on a substrate, and metal deposited on the nanopillars. A thermal treatment can reflow the metal on the nanopillars forming metallic bulbs on the top end of the nanopillars. These structures can have enhanced optical detection when functionalized with biological agents, or can detect gases, particles and liquids through interaction with the metal layer on the nanopillars.

First claim

What is claimed is:

1. A sensor comprising:
a substrate;
at least one first recessed region on the substrate;
nanopillars defined in the at least one first recessed region;
at least one second recessed region on the substrate, the at least one second recessed region comprising a non-continuous metallic layer and being devoid of nanopillars;
at least one mesa between first or second recessed regions, the at least one mesa having a mesa height higher than the first or second recessed regions;
metallic bulbs on a top end of the nanopillars, a nanopillar height of the nanopillars being equal or less than the mesa height; and
a functionalizing agent on the metallic bulbs on the top end of the nanopillars.

2. The sensor of claim 1 , wherein a distance between the metallic bulbs is between 5 and 50 nanometers.

3. The sensor of claim 1 , further comprising an imaging device attached to the substrate on a surface opposite to a surface with the nanopillars.

4. The sensor of claim 3 , wherein the imaging device is a wirelessly-powered complementary metal-oxide semiconductor (CMOS) device, configured to transmit images wirelessly to a receiver.

5. A system for detecting biological quantities, the system comprising:
the sensor of claim 4 ; and
a receiver configured to receive information from the imaging device.

6. The sensor of claim 1 , wherein the sensor is configured to be implantable in human tissue.

7. The sensor of claim 1 , wherein a distance between the metallic bulbs allows electrical insulation between the metallic bulbs.

8. The sensor of claim 1 , wherein the substrate is silicon, the nanopillars are silicon dioxide and the metallic bulbs are gold.

9. The sensor of claim 1 , further comprising an optical fiber attached to one end of the at least one recessed region, wherein an opposite wall of the at least one recessed region comprises a metallic layer, thereby acting as a reflector for the optical fiber, the optical fiber being configured to shine a laser light on the metallic bulbs and collect a signal reflected from the metallic bulbs.

10. The sensor of claim 1 , wherein a middle portion of the nanopillars is void of a metallic layer.

11. The sensor of claim 1 , further comprising a polymer layer on a top surface of the at least one recessed region in between the nanopillars.

12. The sensor of claim 1 , wherein the nanopillars are tapered with a narrower width at the top end.

13. The sensor of claim 1 , further comprising a microfluidic chamber around the at least one recessed region.

14. A multiplexing sensor comprising:
a substrate;
an array of first recessed regions on the substrate;
nanopillars defined in the array of first recessed regions;
at least one second recessed region on the substrate, the at least one second recessed region comprising a non-continuous metallic layer and being devoid of nanopillars;
at least one mesa between first or second recessed regions, the at least one mesa having a mesa height higher than the first or second recessed regions;
metallic bulbs on a top end of the nanopillars, a nanopillar height of the nanopillars being equal or less than the mesa height; and
at least one functionalizing agent on the metallic bulbs on the top end of the nanopillars.

15. The multiplexing sensor of claim 14 , wherein a distance between the metallic bulbs is between 5 and 50 nanometers.

16. The multiplexing sensor of claim 14 , further comprising an imaging device attached to the substrate on a surface opposite to a surface with the nanopillars.

17. The multiplexing sensor of claim 16 , wherein the imaging device is a wirelessly-powered complementary metal-oxide semiconductor (CMOS) device, configured to transmit images wirelessly to a receiver.

18. A system for detecting biological quantities, the system comprising:
the multiplexing sensor of claim 17 ; and
a receiver configured to receive information from the imaging device.

19. The multiplexing sensor of claim 14 , wherein at least two regions of the array of recessed regions have a different functionalizing agent.

20. The multiplexing sensor of claim 19 , wherein the array of recessed regions is a square array and each corner region of the square array of recessed regions is functionalized with thiol groups.

21. The multiplexing sensor of claim 14 , wherein the multiplexing sensor is configured to be implantable in human tissue.

22. The multiplexing sensor of claim 14 , wherein a distance between the metallic bulbs allows electrical insulation between the metallic bulbs.

23. The multiplexing sensor of claim 14 , wherein the substrate is silicon, the nanopillars are silicon dioxide and the metallic bulbs are gold.

24. The multiplexing sensor of claim 14 , wherein at least a first region of the array of recessed regions has nanopillars of a different shape than nanopillars of a second region of the array of recessed regions.

Assignees

• California Inst Of Techn

Inventors

• Walavalkar Sameer
• Chang Chieh-Feng
• Scherer Axel

Classifications

• A61B2562/066

  in a matrix array · CPC title

• G01N21/658

  enhancement Raman, e.g. surface plasmons · CPC title

• A61B5/686

  Permanently implanted devices, e.g. pacemakers, other stimulators, biochips (A61B5/6861 takes precedence) · CPC title

• A61B5/14735

  comprising an immobilised reagent · CPC title

• A61B2562/223

  Optical cables therefor · CPC title