Laser light source device and inspection device

Patent metadata

Field	Value
Publication number	US-9991670-B2
Application number	US-201514626005-A
Country	US
Kind code	B2
Filing date	Feb 19, 2015
Priority date	Feb 24, 2014
Publication date	Jun 5, 2018
Grant date	Jun 5, 2018

Abstract

A laser light source device having a simple configuration and an inspection device are provided. A laser light source device 200 according to an exemplary embodiment in accordance with the present invention has a repetition frequency of 1 MHz or higher, and includes fundamental wave generation means 201 for oscillating laser light including a fundamental wave with its center wavelength being included in one of first to fourth wavelength bands, and means 205 for generating a sixth harmonic of pulsed laser light extracted from the fundamental wave generation means 201 . The first wavelength band is 1064.326 nm to 1064.511 nm. The second wavelength band is 1064.757 nm to 1064.852 nm. The third wavelength band is 1063.805 nm to 1063.878 nm. Further, the fourth wavelength band is 1063.962 nm to 1064.031 nm.

First claim

What is claimed is:

1. A laser light source device comprising:
a Quasi Continuous Wave (QCW) solid-state laser device that oscillates laser light including a fundamental wave with its center wavelength being included in a range between 1063.805 nm and 1063.878 nm, the QCW solid-state laser device having a repetition frequency of 1 MHz or higher; and
means for generating a sixth harmonic of pulsed laser light extracted from the solid-state laser device, wherein the sixth harmonic has a wavelength of approximately 177 nm, and
the means includes:
a first optical crystal that generates a second harmonic of the fundamental wave, and is an LiB 3 O 5 crystal,
a second optical crystal that generates a third harmonic of the fundamental wave, and is a β-BaB 2 O 4 crystal, the third harmonic having a sum of a frequency of the fundamental wave and a frequency of the second harmonic, and
a third optical crystal that generates the sixth harmonic of the fundamental wave, and is an RbBe 2 BO 3 F 2 crystal or KBe 2 BO 3 F 2 crystal, the sixth harmonic being a second harmonic of the third harmonic.

2. A laser light source device comprising:
a Quasi Continuous Wave (QCW) solid-state laser device that oscillates laser light including a fundamental wave with its center wavelength being included in a range between 1063.962 nm and 1064.031 nm, the QCW solid-state laser device having a repetition frequency of 1 MHz or higher; and
means for generating a sixth harmonic of pulsed laser light extracted from the solid-state laser device, wherein the sixth harmonic has a wavelength of approximately 177 nm, and
the means includes:
a first optical crystal that generates a second harmonic of the fundamental wave, and is an LiB 3 O 5 crystal,
a second optical crystal that generates a third harmonic of the fundamental wave, and is a β-BaB 2 O 4 crystal, the third harmonic having a sum of a frequency of the fundamental wave and a frequency of the second harmonic, and
a third optical crystal that generates the sixth harmonic of the fundamental wave, and is an RbBe 2 BO 3 F 2 crystal or KBe 2 BO 3 F 2 crystal, the sixth harmonic being a second harmonic of the third harmonic.

3. A laser light source device comprising:
a Quasi Continuous Wave (QCW) solid-state laser device that oscillates laser light including a fundamental wave with its center wavelength being included in a range between 1064.757 nm and 1064.852 nm, the QCW solid-state laser device having a repetition frequency of 1 MHz or higher; and
means for generating a sixth harmonic of pulsed laser light extracted from the solid-state laser device, wherein the sixth harmonic has a wavelength of approximately 177 nm, and
the means includes:
a first optical crystal that generates a second harmonic of the fundamental wave, and is an LiB 3 O 5 crystal,
a second optical crystal that generates a third harmonic of the fundamental wave, and is a β-BaB 2 O 4 crystal, the third harmonic having a sum of a frequency of the fundamental wave and a frequency of the second harmonic, and
a third optical crystal that generates the sixth harmonic of the fundamental wave, and is an RbBe 2 BO 3 F 2 crystal or KBe 2 BO 3 F 2 crystal, the sixth harmonic being a second harmonic of the third harmonic.

4. The laser light source device according to claim 1 , wherein a pulse width of the pulsed laser light is equal to or greater than 2 picoseconds.

5. The laser light source device according to claim 1 , wherein an Yb-doped fiber laser device, a mode-locked solid-state laser device using an Nd:YVO4 crystal, or a mode-locked solid-state laser device using an Nd:YAG crystal is used as the solid-state laser device.

6. An inspection device comprising:
a light source device according to claim 1 ; and
a photodetector that takes an image of a sample illuminated by the sixth harmonic generated by the laser light source device.

7. The inspection device according to claim 6 , wherein the photodetector is a Time Delay Integration camera.

Assignees

• Lasertec Corp

Inventors

• Takehisa Kiwamu
• Sakuma Jun

Classifications

• G03F7/7065

  Defects, e.g. optical inspection of patterned layer for defects · CPC title

• G03F1/84

  Inspecting · CPC title

• H01S3/1611

  neodymium · CPC title

• G01N21/956

  Inspecting patterns on the surface of objects {(contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)} · CPC title

• G01N21/8806

  Specially adapted optical and illumination features · CPC title