Command data generation method, positioning apparatus, lithography apparatus, and article manufacturing method
US-2015378342-A1 · Dec 31, 2015 · US
US9989956B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9989956-B2 |
| Application number | US-201615152350-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 11, 2016 |
| Priority date | May 11, 2016 |
| Publication date | Jun 5, 2018 |
| Grant date | Jun 5, 2018 |
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Example computer-implemented methods, apparatuses, and systems are described for implementing split range control using Proportional-Integral (PI) control on a process. In some aspects, a feedback signal from the process is received. A proportional control is performed on the feedback signal to generate a first control output while an integral control is performed on the feedback signal to generate a second control output. A first valve of the process is controlled based on the first control output while a second valve of the process is controlled based on the second control output. The second valve has a valve diameter larger than a valve diameter of the first valve.
Opening claim text (preview).
The invention claimed is: 1. A method comprising: receiving a feedback signal in response to executing fluid flow control on a fluid flow process through a pipe system; performing a proportional control on the feedback signal to generate a first control output, wherein the proportional control generates the first control output substantially proportional to a magnitude of the feedback signal; performing an integral control on the feedback signal to generate a second control output, wherein the integral control generates the second control output substantially proportional to the magnitude of the feedback signal and a duration of the feedback signal; controlling a first valve of the pipe system based on the first control output; and controlling a second valve of the pipe system based on the second control output, wherein the second valve has a valve diameter larger than a valve diameter of the first valve. 2. The method of claim 1 , wherein the proportional control on the feedback signal is performed substantially simultaneously with the integral control on the feedback signal. 3. The method of claim 1 , wherein the first valve of the pipe system is controlled based on the first control output substantially simultaneously with the second valve of the pipe system based on the second control output. 4. The method of claim 1 , wherein receiving the feedback signal, performing the proportional control, performing the integral control, controlling the first valve, and controlling the second valve are performed automatically by a single-input two-output (SITO) Proportional-Integral (PI) controller, wherein the SITO PI controller is configured to control the first valve and the second valve substantially simultaneously to execute the fluid flow control on the fluid flow process through the pipe system. 5. The method of claim 1 , wherein performing the proportional control and controlling the first valve are performed automatically by a first single-input single-output (SISO) PI controller, and wherein performing the integral control and controlling the second valve are performed automatically by a second SISO PI controller different than the first SISO PI controller. 6. The method of claim 4 , wherein the fluid flow process is a gas oil separation process (GOSP), wherein executing fluid flow control on the GOSP controls an interface level between oil and water in a dehydrator drum of the GOSP, and wherein the first valve and the second valve are air-to-close type valves controlling a water flow rate of the GOSP. 7. The method of claim 6 , wherein the feedback signal is an input of the SITO PI controller representing a difference between a predetermined set point and the interface level between oil and water in the dehydrator drum of the GOSP, wherein the predetermined set point is a target value for the interface level between oil and water in the dehydrator drum of the GOSP. 8. A controller comprising: a memory; and a hardware processor interoperably coupled with the memory and configured to: receive a feedback signal from a fluid flow process through a pipe system; perform a proportional control on the feedback signal to generate a first control output, wherein the proportional control generates the first control output substantially proportional to a magnitude of the feedback signal; perform an integral control on the feedback signal to generate a second control output, wherein the integral control generates the second control output substantially proportional to the magnitude of the feedback signal and a duration of the feedback signal; control a first actuator of the pipe system based on the first control output; and control a second actuator of the pipe system based on the second control output. 9. The controller of claim 8 , wherein the controller is a single-input two-output (SITO) Proportional-Integral (PI) controller. 10. The controller of claim 8 , wherein the controller includes a first and a second single-input single-output (SISO) PI controllers, wherein the first SISO PI controller has a first set of parameters, and the second SISO PI controller has a second set of parameters different than the first set of parameters, and wherein each set of parameters includes at least two of a proportional gain, an integral gain, or integral time. 11. The controller of claim 10 , wherein the first SISO PI controller has an integral component that is disabled or has a parameter associated with integral time of the integral component that is set to a maximum allowed value in the first SISO PI controller. 12. The controller of claim 8 , wherein the first actuator and the second actuator are air-to-close type valves, and wherein the second actuator has a valve diameter larger than a valve diameter of the first actuator. 13. The controller of claim 8 , wherein the fluid flow process is a gas oil separation process (GOSP), the controller controls an interface level between oil and water in a dehydrator drum of the GOSP, and the first actuator and the second actuator control a water flow rate of the GOSP. 14. The controller of claim 13 , wherein the feedback signal is an input of the controller representing a difference between a predetermined set point and the interface level between oil and water in the dehydrator drum of the GOSP, wherein the predetermined set point is a target value for the interface level between oil and water in the dehydrator drum of the GOSP. 15. A system comprising: a first actuator; a second actuator, wherein each of the first actuator and the second actuator controls an output of a fluid flow process through a pipe system; and a controller comprising a memory and a hardware processor, the hardware processor interoperably coupled with the memory and configured to: receive, from the fluid flow process, a feedback signal associated with the output of the fluid flow process; perform a proportional control on the feedback signal to generate a first control output, wherein the proportional control generates the first control output substantially proportional to a magnitude of the feedback signal; perform an integral control on the feedback signal to generate a second control output, wherein the integral control generates the second control output substantially proportional to the magnitude of the feedback signal and a duration of the feedback signal; control the first actuator based on the first control output; and control the second actuator based on the second control output. 16. The system of claim 15 , the proportional control on the feedback signal is performed substantially simultaneously with the integral control on the feedback signal. 17. The system of claim 15 , wherein the controller is a single-input two-output (SITO) Proportional-Integral (PI) controller. 18. The system of claim 15 , wherein the controller includes a first single-input single-output (SISO) PI controller having a first set of parameters performing the proportional control on the feedback signal and a second SISO PI controller having a second set of parameters different than the first set of parameters performing the integral control on the feedback signal, and wherein each set of parameters includes at least two of a proportional gain, an integral gain, or integral time. 19. The system of claim 15 , wherein the first actuator and the second actuator are air-to-close type valves, and wherein the second actuator has a valve diameter larger than a valve diameter of the first actuator. 20. The system of claim 15 , wher
characterised by control of velocity, acceleration or deceleration (G05B19/19 takes precedence) · CPC title
for a two-phase gas-liquid flow · CPC title
for eliminating water (separation of liquids B01D, e.g. B01D17/00; separation of gases or vapours B01D53/00) · CPC title
for controlling, signalling, or supervising the conveyance of a product · CPC title
Flow · CPC title
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