Wave plate having consistent birefringence properties across the visible spectrum and manufacturing method for same

Patent metadata

Field	Value
Publication number	US-9989687-B2
Application number	US-201013699830-A
Country	US
Kind code	B2
Filing date	May 25, 2010
Priority date	May 25, 2010
Publication date	Jun 5, 2018
Grant date	Jun 5, 2018

Abstract

A wave plate capable of increasing a birefringence quantity and being made into a thin film, and a method of manufacturing the wave plate. The wave plate includes a substrate, whereon convex portions and concave portions are formed with a period less than or equal to the wavelength of light that is used therewith, columnar portions, wherein fine grains of a dielectric material are layered by oblique vapor deposition of a dielectric material from two directions, in a columnar shape on the convex portions in the vertical direction relative to the surface of the substrate, and interstices that are located on the concave portions and disposed between the columnar portions. Using birefringence from the fine grains of the dielectric material and birefringence from the concave/convex portions of the substrate allows increasing the birefringence quantity and making a thin film.

First claim

The invention claimed is:

1. A wave plate composed of:
a substrate on which periodic convex and concave portions are formed in a lattice shape, each of the periodic convex and concave portions having a period less than or equal to a wavelength of light;
columnar portions that are formed only on each of the convex portions in a columnar shape by oblique vapor depositing a dielectric material carried out alternately in two directions different from each other by 180°, with fine grains of the dielectric material being stacked in a vertical direction relative to a surface of the substrate, the wave plate having a birefringence quantity of 0.13 or more within a visible light area, the dielectric material containing Ta 2 O 5 , each layer of the dielectric material of the columnar portions having a thickness of 10 nm or less, wherein the number of layers of the dielectric material is substantially greater than 10 such that birefringence quantities of the wave plate between two arbitrary wavelengths within the visible light area have a difference of 0.02 or less;
an interstice in the dielectric material that is positioned on each of the concave portions, the interstice being formed between the columnar portions such that the dielectric material is only disposed on the columnar portions formed on the convex portions.

2. A method of manufacturing a wave plate composed of the steps of:
obliquely vapor depositing a dielectric material alternately in two directions different from each other by 180° onto a substrate on which periodic convex and concave portions are formed in a lattice shape, each of the periodic convex and concave portions having a period less than or equal to a wavelength of light;
forming a birefringence film that has columnar portions formed only on each of the convex portions in a columnar shape by stacking fine grains of the dielectric material in a vertical direction relative to a surface of the substrate, the wave plate having a birefringence quantity of 0.13 or more within a visible light area, the dielectric material containing Ta 2 O 5 , each layer of the dielectric material of the columnar portions having a thickness of 10 nm or less, wherein the number of layers of the dielectric material is substantially greater than 10 such that birefringence quantities of the wave plate between two arbitrary wavelengths within the visible light area have a difference of 0.02 or less;
forming an interstice in the dielectric material that is positioned on each of the concave portions, the interstice being formed between the columnar portions such that the dielectric material is only disposed on the columnar portions formed on the convex portions.

3. The method of manufacturing a wave plate according to claim 2 , wherein the obliquely vapor depositing step in two directions is carried out in a direction perpendicular to lines of the lattice shape of the periodic convex and concave portions, as well as in a direction with a vapor deposition angle relative to a normal direction to the surface of the substrate in a range from 60° to 80°.

Assignees

• Takada Akio
• Yamada Takatoshi
• Koike Nobuyuki
• Sasaki Masatoshi
• Shibuya Kazuyuki
• Dexerials Corp

Inventors

• Takada Akio
• Yamada Takatoshi
• Koike Nobuyuki
• Sasaki Masatoshi
• Shibuya Kazuyuki

Classifications

• G02B5/3083 Primary

  Birefringent or phase retarding elements (G02B5/3008, G02B5/3016 take precedence; systems for polarisation control G02B27/286; manufacturing phase modulating patterns by lithographic processes G03F7/001) · CPC title

• G02B5/30

  Polarising elements (light-modulating devices with active elements G02F1/00) · CPC title

• C23C16/40

  Oxides · CPC title

• G02B5/3025

  Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state (G02B5/3008, G02B5/3016 take precedence) · CPC title