Laser noise detection and mitigation in particle counting instruments

Patent metadata

Field	Value
Publication number	US-9989462-B2
Application number	US-201615088679-A
Country	US
Kind code	B2
Filing date	Apr 1, 2016
Priority date	Apr 2, 2015
Publication date	Jun 5, 2018
Grant date	Jun 5, 2018

Abstract

This invention relates to optical particle counters and methods capable of effectively distinguishing signals generated from particle light scattering from sources of noise. Embodiments of the invention, for example, use multisensory detector configurations for identifying and distinguishing signals corresponding to fluctuations in laser intensity from signals corresponding to particle light scattering for the detection and characterization of submicron particles. In an embodiment, for example, methods and systems of the invention compare signals from different detector elements of a detector array to identify and characterize noise events, such as noise generated from laser intensity instability, thereby allow for the detection and characterization of smaller particles. The system and methods of the present invention, thus, provide an effective means of reducing false positives caused by noise or interference while allowing for very sensitive particle detection.

First claim

We claim:

1. A method for detecting particles in a fluid flow, said method comprising the steps of:
providing said fluid flow having said particles;
exposing said fluid flow to a beam of electromagnetic radiation from a laser, thereby generating scattered or emitted electromagnetic radiation;
collecting and directing said scattered or emitted electromagnetic radiation from a viewing region onto a plurality of detector elements; wherein each detector element is positioned to receive said scattered or emitted electromagnetic radiation from a different portion of said viewing region;
detecting said electromagnetic radiation directed onto said plurality of detector elements, wherein each of said detector elements generates independent output signals;
comparing output signals from at least two different detector elements to discriminate output signals corresponding to a particle detection event from output signals corresponding to a laser noise event;
analyzing output signals corresponding to said detection event; and
identifying said laser noise event, wherein said laser noise event is identified when the output signals of each of at least two non-adjacent detector elements is independently equal to or greater than a threshold value; thereby detecting said particles in said fluid flow.

2. The method of claim 1 , wherein an increase in the magnitude of said output signals of only a single detector element or a subset of adjacent detector elements is indicative of said particle detection event.

3. The method of claim 1 , wherein said step of collecting and directing said scattered or emitted electromagnetic radiation from said viewing region is provided using a system of optics for focusing said scattered or emitted electromagnetic radiation from said viewing region on to said plurality of detector elements.

4. The method of claim 3 , wherein the system of optics and/or the physical dimensions, positions or both of detector elements are such that only a subset of detector elements of the plurality receives said scattered or emitted electromagnetic radiation corresponding to said particle detection event.

5. The method of claim 3 , wherein the system of optics and/or the physical dimensions, positions or both of detector elements are such that all the detector elements of the plurality receive said scattered or emitted electromagnetic radiation corresponding to said laser noise event.

6. The method of claim 3 , wherein said plurality of detectors comprise a detector array positioned in optical communication with said system of optics such that each element of the array receives scattered or emitted electromagnetic radiation from a different portion of said viewing region.

7. The method of claim 6 , wherein said detector array is a one dimensional array comprising 2 to 20 detector elements.

8. The method of claim 7 , wherein each of said detector elements of said one dimensional array independently has an active area characterized by lateral dimensions selected from the range of 410 μm to 440 μm.

9. The method of claim 7 , wherein adjacent detector elements of said one dimensional array are separated from each other by a distance selected from the range of 60 μm to 90 μm.

10. The method of claim 1 , wherein said laser is a solid state laser or diode laser.

11. The method of claim 1 , wherein said laser noise event corresponds to a change in the radiative output of said laser, thereby generating said scattered or emitted electromagnetic radiation from said viewing region having a substantially uniform spatial distribution of intensities.

12. The method of claim 1 , wherein said particle detection event corresponds to a particle passing through a beam of electromagnetic radiation, thereby generating said scattered or emitted electromagnetic radiation from said viewing region having a nonuniform spatial distribution of intensities.

13. The method of claim 12 , wherein said step of comparing output signals from at least two different detector elements comprises characterizing the spatial distribution of intensities of said scattered or emitted electromagnetic radiation to discriminate output signals corresponding to a particle detection event from output signals corresponding to a laser noise event.

14. The method of claim 1 , further comprising identifying said particle detection event, wherein said particle detection event is identified when the output signals of only a single detector element or subset of adjacent detector elements is independently equal to or greater than a threshold value.

15. The method of claim 14 , wherein said threshold value for a given detector element is equal to 1.5:1 to 2.0:1 times the standard deviation of the noise of the given detector element of said array.

16. The method of claim 1 , wherein said laser noise event is identified when the output values of each of all detector elements is independently equal to or greater than a threshold value.

17. The method of claim 1 , wherein said threshold value is independently set for each detector element.

18. The method of claim 17 , wherein said threshold value for a given detector element is equal to 1.5:1 to 2.0:1 times the standard deviation of the noise of the given detector element of said array.

19. The method of claim 1 , further comprising, upon identification of a laser noise event, monitoring the output signals for all detector elements to identify a change in output values for at least two detector elements independently greater than or equal to a factor of 1.5:1 to 2.0:1 times the standard deviation of the noise of the given detector element of said array.

20. The method of claim 1 , further comprising the steps of:
storing said output signals for all detector elements for a preselected time period; and
analyzing said stored output signals in the event that no laser noise event is identified or discarding said stored output signals in the event that said laser noise event is identified.

21. The method of claim 1 , further comprising, upon identification of a laser noise event, waiting for a preselected time period prior to identifying a particle detection event.

22. The method of claim 1 , wherein said fluid is ultrapure water, Sulfuric Acid (H 2 SO 4 ), Hydrofluoric Acid (HF), Hydrochloric Acid (HCI), Ammonium Hydroxide (NH 4 OH), Hydrogen Peroxide (H 2 O 2 ) or Isopropyl Alcohol (C 3 H 7 OH).

23. The method of claim 1 , further comprising a step of counting said particles, wherein said step of comparing output signals from at least two different detector elements to discriminate output signals corresponding to said particle detection event from output values corresponding to said laser noise event enables a decrease in the occurrence of false counts.

24. The method of claim 1 , further comprising controlling a temperature of said laser to reduce laser noise, wherein said controlling is performed with a thermoelectric cooler (TEC).

25. An optical particle analyzer comprising:
a laser for generating a beam of electromagnetic radiation;
a flow chamber for flowing a fluid containing particles along a flow direction and through the beam of electromagnetic radiation, thereby generating scattered or emitted electromagnetic radiation;
an optical collection system for collecting and directing said scattered or emitted electromagnetic radiation from a viewing region onto a plurality of detector elements;
said detector elements for detecting said

Assignees

• Particle Measuring Syst

Inventors

• Lumpkin James
• Melton Matthew

Classifications

• G01N15/1429

  Signal processing · CPC title

• G01N21/4785

  Standardising light scatter apparatus; Standards therefor · CPC title

• G01N15/1459

  the analysis being performed on a sample stream · CPC title

• G01N2015/1488

  Methods for deciding · CPC title

• G01N21/53 Primary

  within a flowing fluid, e.g. smoke · CPC title