Cleanability assessment of sublimate from lithography materials
US-2015369789-A1 · Dec 24, 2015 · US
US9989041B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9989041-B2 |
| Application number | US-201514693482-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 22, 2015 |
| Priority date | Oct 18, 2012 |
| Publication date | Jun 5, 2018 |
| Grant date | Jun 5, 2018 |
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Thruster grid clear circuits and methods to clear thruster grids are disclosed. An example apparatus includes a low voltage grid clear circuit to apply first energy to a grid at a first voltage, and a high voltage grid clear circuit to detect a failure of the applied energy to clear a short circuit condition of the grid and to apply second energy to the grid at a second voltage higher than the first voltage.
Opening claim text (preview).
What is claimed is: 1. An apparatus, comprising: a low voltage grid clear circuit to apply first energy to an electric thruster grid at a first voltage; and a high voltage grid clear circuit to apply second energy to the electric thruster grid at a second voltage higher than the first voltage, wherein the high voltage grid clear circuit is to detect a short circuit condition in the electric thruster grid by: measuring a first node voltage in the low voltage grid clear circuit; and comparing the first node voltage to a threshold. 2. An apparatus as defined in claim 1 , wherein the electric thruster grid comprises an ion propulsion system thruster grid. 3. An apparatus as defined in claim 1 , wherein the high voltage grid clear circuit is to detect a failure of the first energy to clear the short circuit condition of the electric thruster grid by: measuring a second node voltage in the low voltage grid clear circuit at a different node than the first node voltage; and comparing a difference between the second node voltage and the first node voltage to another threshold, the high voltage grid clear circuit to apply the second energy in response to detecting the failure. 4. An apparatus, comprising: a low voltage grid clear circuit to apply first energy to an electric thruster grid at a first voltage; and a high voltage grid clear circuit to apply second energy to the electric thruster grid at a second voltage higher than the first voltage, wherein the high voltage grid clear circuit is to: detect that the low voltage grid clear circuit is applying the first energy to the electric thruster grid; and stop applying the second energy in response to detecting that the low voltage grid clear circuit is applying the first energy. 5. An apparatus as defined in claim 4 , wherein the high voltage grid clear circuit is to detect that the low voltage grid clear circuit is applying the first energy by detecting a voltage drop in the low voltage grid clear circuit. 6. An apparatus as defined in claim 1 , wherein the second voltage is to cause arcing between the electric thruster grid and a second electric thruster grid. 7. An apparatus as defined in claim 6 , wherein the first energy at the first voltage is not sufficient to cause arcing between the electric thruster grid and the second electric thruster grid. 8. A method, comprising: detecting a first grid clear process comprising application of a first voltage to an electric thruster grid wherein detecting the first grid clear process comprises measuring a first node voltage at a first node; and applying a second grid clear process having a second voltage higher than the first voltage to the electric thruster grid; measuring a second node voltage at a second node; comparing a difference between the second node voltage and the first node voltage to a threshold; and detecting a failure of the first grid clear process to clear a condition in the electric thruster grid based on the comparison, wherein applying the second grid clear process is in response to detecting the failure. 9. A method as defined in claim 8 , wherein the second grid clear process comprises applying energy at the second voltage to the electric thruster grid to cause an electrical arc between the electric thruster grid and another grid. 10. A method as defined in claim 8 , wherein the electric thruster grid comprises an ion propulsion system thruster grid. 11. A method, comprising: detecting a first grid clear process comprising application of a first voltage to an electric thruster grid; and applying a second grid clear process having a second voltage higher than the first voltage to the electric thruster grid; while applying the second grid clear process, detecting a current being applied via the first grid clear process; and stopping the second grid clear process in response to detecting the current. 12. A method as defined in claim 11 , further comprising: detecting that the current has stopped when the second grid clear process is stopped; and reapplying the second grid clear process. 13. A method, comprising: detecting a first grid clear process comprising application of a first voltage to an electric thruster grid; and applying a second grid clear process having a second voltage higher than the first voltage to the electric thruster grid, wherein applying the second grid clear process is performed while applying the first grid clear process. 14. An ion propulsion system, comprising: a first thruster grid; a second thruster grid coupled to a reference voltage; a low voltage grid clear circuit to clear a short circuit condition between the first thruster grid and the second thruster grid by applying first energy at a first voltage; and a high voltage grid clear circuit to detect a failure of the first energy to clear the short circuit condition and to apply second energy to the grid at a second voltage higher than the first voltage in response to detection of the failure. 15. An ion propulsion system as defined in claim 14 , wherein the high voltage grid clear circuit is to measure a first node voltage of the low voltage grid clear circuit to detect the short circuit condition. 16. An ion propulsion system as defined in claim 15 , wherein the high voltage grid clear circuit is to measure a second node voltage of the low voltage grid clear circuit and compare the second node voltage to the first node voltage to detect the failure. 17. An ion propulsion system as defined in claim 16 , wherein the high voltage grid clear circuit is to apply the second voltage to cause an arc between the first thruster grid and second thruster grid.
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