Transducer, method for manufacturing transducer, and object information acquiring apparatus

Patent metadata

Field	Value
Publication number	US-9986342-B2
Application number	US-201414254270-A
Country	US
Kind code	B2
Filing date	Apr 16, 2014
Priority date	Apr 18, 2013
Publication date	May 29, 2018
Grant date	May 29, 2018

Abstract

A transducer includes at least one element including a plurality of cells. Each of the cells includes a pair of electrodes disposed with a gap therebetween and a vibrating membrane including one of the electrodes, and the vibrating membrane is vibratably supported. First and second cells of the plurality of cells in the element have the gaps that communicate with each other, and the first cell and a third cell in the element have the gaps that do not communicate with each other.

First claim

What is claimed is:

1. A transducer comprising:
at least one element including a plurality of cells,
wherein the cell includes a pair of electrodes disposed with a gap therebetween and a vibrating membrane including one of the electrodes, and the vibrating membrane is vibratably supported,
wherein the element includes a first cell group configured by n (n is an integer greater than or equal to 3) cells and having channels communicating with each other and a second cell group configured by n cells and having channels communicating with each other,
wherein the first cell group and the second cell group do not communicate with each other,
wherein etching holes are provided for forming cavities at equidistant positions from centers of the cells configuring the first cell group, and
wherein a channel that communicates a cavity in the first cell group with a cavity in the second cell group is not provided.

2. The transducer according to claim 1 , wherein the element includes a plurality of cell groups including the first cell groups and the second cell groups.

3. The transducer according to claim 1 , wherein the gaps of the cells in each of the first and second cell groups communicate with one another through an etching channel formed during an etching process for forming the gaps.

4. The transducer according to claim 3 , wherein the element includes a plurality of cell groups including the first and second cell groups, and
wherein in each of the cell groups, the number of sealing units that seal etching holes is less than the number of the cells.

5. The transducer according to claim 4 , wherein in each of the plurality of cell groups, the sealing unit is disposed inside an envelope curve of the cell group.

6. The transducer according to claim 5 , wherein the sealing unit is disposed at a position that is the same distance from the centers of the cells in the cell group that communicate with the sealing unit.

7. The transducer according to claim 4 , wherein each of the cell groups in the element includes three cells, and the number of the sealing units is one, and
wherein the three cells are disposed so that the centers of the three cells in the cell group form a regular triangle, and the sealing unit in each of the cell groups is located at the center of the regular triangle.

8. The transducer according to claim 3 , wherein the element is formed on a substrate, and
wherein when the etching channel is orthogonally projected onto the substrate, a size of a projected portion of the etching channel in a region having the etching hole formed therein is larger than a size of the etching hole orthogonally projected onto the substrate.

9. The transducer according to claim 8 , wherein a portion of the etching channel that communicates with the gap is narrower than a portion of the etching channel having the etching hole formed therein.

10. A transducer comprising:
at least one element including a plurality of cell groups each including n (n is an integer greater than or equal to 3) cells,
wherein each of the cells includes a pair of electrodes disposed with a gap therebetween and a vibrating membrane including one of the electrodes, and the vibrating membrane is vibratably supported, and
wherein the gaps of the cells in each of the cell groups communicate with a sealing unit that seals a common etching hole used to form the gaps of the cells, and
the gaps of one of the cell groups do not communicate with the gaps of another cell group.

11. The transducer according to claim 10 , wherein in each of the plurality of cell groups, the sealing unit is disposed inside an envelope curve of the cell group.

12. The transducer according to claim 11 , wherein the sealing unit is disposed at a position that is the same distance from the centers of the cells in the cell group that communicate with the sealing unit.

13. The transducer according to claim 10 , wherein each of the cell groups includes three cells, and the number of the sealing units is one.

14. The transducer according to claim 13 , wherein the three cells in the cell group are disposed so that the centers of the three cells form a regular triangle, and the sealing unit in each of the cell groups is located at the center of the regular triangle.

15. The transducer according to claim 10 , wherein the element is formed on a substrate, and
wherein when the etching channel is orthogonally projected onto the substrate, a size of a projected portion of the etching channel in a region having the etching hole formed therein is larger than a size of the etching hole orthogonally projected onto the substrate.

16. The transducer according to claim 15 , wherein a portion of the etching channel that communicates with the gap is narrower than a portion of the etching channel having the etching hole formed therein.

17. A transducer comprising at least one element,
wherein the at least one element includes a plurality of cells, each of the cells having a structure in which a vibration membrane including one of a pair of electrodes disposed with a gap therebetween is vibratably supported,
wherein the at least one element includes a first cell group comprised of n (n is an integer greater than or equal to 3) cells whose gaps communicating with each other and a second cell group comprised of n cells whose gaps communicating with each other, and
wherein the gaps in the first cell group and the gaps in the second cell group do not communicate with each other, each of the first cell group and the second cell group has a sealing unit that seals an etching hole used to form the gaps by etching at equidistant positions from centers of the cells in each of the cell groups, and an etching hole for individually etching is not provided in each of the cells.

Assignees

• Canon Kk

Inventors

• Torashima Kazutoshi
• Kato Ayako
• Akiyama Takahiro

Classifications

• B06B1/0292 Primary

  Electrostatic transducers, e.g. electret-type · CPC title

• H04R19/00 Primary

  Electrostatic transducers · CPC title

• B06B2201/20

  Application to multi-element transducer · CPC title

• H04R31/00

  Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor {(manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182)} · CPC title

• H04R7/04

  Plane diaphragms · CPC title