Adjustable Ventilation Openings in MEMS Structures
US-2015078587-A1 · Mar 19, 2015 · US
MEMS sensor
US9986319B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9986319-B2 |
| Application number | US-201715417184-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 26, 2017 |
| Priority date | Oct 25, 2016 |
| Publication date | May 29, 2018 |
| Grant date | May 29, 2018 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
A MEMS sensor is disclosed. The MEMS sensor includes a housing having an acoustic port, a base plate forming an accommodation cavity together with the housing, a MEMS chip accommodated in the accommodation cavity, and a control mechanism having a first working position and a second working position. At the first working position, the acoustic port communicates the accommodation cavity with an external space of the housing, while at the second working position, the control mechanism isolates the accommodation cavity from the external space of the housing.
First claim
Opening claim text (preview).
What is claimed is: 1. A MEMS sensor, comprising: a housing having an acoustic port; a base plate forming an accommodation cavity together with the housing; a MEMS chip accommodated in the accommodation cavity; a control mechanism having a first working position and a second working position; wherein at the first working position, the acoustic port communicates the accommodation cavity with an external space of the housing, while at the second working position, the control mechanism isolates the accommodation cavity from the external space of the housing; the control mechanism comprising a first control mechanism disposed on an external surface of the housing and a second control mechanism disposed on an internal surface of the housing; the first control mechanism comprising a first control panel, and the second control mechanism comprising a second control panel, both the first control panel and the second control panel rotatably connected to the housing, and both a position where the first control panel is connected to the housing and a position where the second control panel is connected to the housing being at the same side of the acoustic port. 2. The MEMS sensor as described in claim 1 , wherein both a position where the first control panel is connected to the housing and a position where the second control panel is connected to the housing are at the same side of the acoustic port near the MEMS chip. 3. The MEMS sensor as described in claim 1 , wherein at least one of the first control panel and the second control panel is a rigid elastic piece. 4. The MEMS sensor as described in claim 1 , wherein the MEMS chip is a pressure sensor.
Assignees
Inventors
Classifications
Microphones (H04R19/01 takes precedence) · CPC title
for microphones (H04R1/24, H04R1/26 take precedence) · CPC title
- H04R1/02Primary
Casings; Cabinets {; Supports therefor;} Mountings therein (H04R1/28 takes precedence {; attachments for microphones H04R1/08; mounting of transducers in earpieces H04R1/1075}) · CPC title
using semiconductor materials · CPC title
Mems transducers or their use · CPC title
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Frequently asked questions
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- What does patent US9986319B2 cover?
- A MEMS sensor is disclosed. The MEMS sensor includes a housing having an acoustic port, a base plate forming an accommodation cavity together with the housing, a MEMS chip accommodated in the accommodation cavity, and a control mechanism having a first working position and a second working position. At the first working position, the acoustic port communicates the accommodation cavity with an e…
- Who is the assignee on this patent?
- Zhang Rui, Kang Ting, Aac Acoustic Tech Shenzhen Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H04R1/02. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 29 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).