Substrate processing apparatus, etching method of metal film, and manufacturing method of magnetoresistive effect element
US-9685299-B2 · Jun 20, 2017 · US
US9986310B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9986310-B2 |
| Application number | US-201615255364-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 2, 2016 |
| Priority date | Feb 28, 2014 |
| Publication date | May 29, 2018 |
| Grant date | May 29, 2018 |
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Sensing/control/identification devices for machines are provided. The devices include a first stage having a rectification and power conditioning module configured to receive electromagnetic (EM) transmissions via waveguide confinement and convert said EM transmissions to electrical power, a communication interface module configured to receive power from the rectification and conditioning module and at least one of receive or transmit EM transmissions/communications via waveguide confinement, and a control module configured to receive EM transmission data from the communication interface for processing and/or preparing EM communications for transmission. The devices further include a second stage having a tunable control module configured to process and convert instructions or commands from the control module of the first stage into analog or digital signals and generate and transmit an output signal. At least one connection is between the first stage and the second stage to enable communication between the first and second stages.
Opening claim text (preview).
The invention claimed is: 1. A sensing/control/identification device of a machine, the device comprising: a first stage including: a rectification and power conditioning module configured to receive electromagnetic (EM) transmissions from an EM transmitting source via waveguide confinement and convert said EM transmissions to electrical power; a communication interface module configured to receive power from the rectification and power conditioning module and at least one of receive the EM transmissions or transmit EM communications via waveguide confinement; and a control module configured to receive EM transmission data from the communication interface for processing or preparing the EM communications for transmission from the communication interface module; a second stage including: a tunable control module configured to process and convert instructions or commands from the control module of the first stage into analog or digital signals and generate and transmit an output signal; and at least one connection between the first stage and the second stage to enable communication between the first stage and the second stage. 2. The device as recited in claim 1 , the first stage further comprising a storage module, wherein the control module is configured to at least one of read from or write to the storage module. 3. The device as recited in claim 2 , wherein the storage module includes at least one of (i) one or more of programs and applications to be executed by the control module, (ii) identification data associated with the device, (iii) historical data associated with the device, (iv) characterization curves associated with the machine, (v) an engine installation, (vi) flight profiles, (vii) environmental data, or (viii) baseline fluid characteristics. 4. The device as recited in claim 1 , the second stage further comprising a sensor circuit module configured to interface between a hardware device and the second stage. 5. The device as recited in claim 4 , the second stage further comprising a conversion module configured to convert a signal from the hardware device to a signal to be processed by the control module of the first stage. 6. The device as recited in claim 1 , wherein the rectification and power conditioning module, the communication interface module, the control module, a conversion module, and a sensor circuit module are all configured on a single printed circuit board or a highly integrated circuit such as a system in a package (SiP). 7. The device as recited in claim 1 , wherein the first stage and the second stage are contained within a network of shielded components to mitigate unwanted electromagnetic energy from exiting or entering the network, said shielded components in waveguide communication. 8. A system for a gas turbine engine, the system comprising: a component; a hardware device operably connected to the component and configured to measure a characteristic of the component; an electromagnetic (EM) transmitting source located remote from the component; and a sensing/control/identification device configured on or proximate to the component, wherein the sensing/control/identification device includes: a first stage including: a rectification and power conditioning module configured to receive electromagnetic (EM) transmissions from an EM transmitting source via waveguide confinement and convert said EM transmissions to electrical power; a communication interface module configured to receive power from the rectification and power conditioning module and at least one of receive the EM transmissions or transmit EM communications via waveguide confinement; and a control module configured to receive EM transmission data from the communication interface for processing or preparing the EM communications for transmission from the communication interface module; a second stage including: a tunable control module configured to process and convert instructions or commands from the control module of the first stage into analog or digital signals and generate and transmit an output signal; and at least one connection between the first stage and the second stage to enable communication between the first stage and the second stage. 9. The system as recited in claim 8 , the first stage further comprising a storage module, wherein the control module is configured to at least one of read from or write to the storage module. 10. The system as recited in claim 9 , wherein the storage module includes at least one of (i) one or more of programs and applications to be executed by the control module, (ii) identification data associated with the device, (iii) historical data associated with the device, (iv) characterization curves associated with the machine, (v) an engine installation, (vi) flight profiles, (vii) environmental data, or (viii) baseline fluid characteristics. 11. The system as recited in claim 8 , the second stage further comprising a sensor circuit module configured to interface between the hardware device and the second stage. 12. The system as recited in claim 11 , the second stage further comprising a conversion module configured to convert a signal from the hardware device to a signal to be processed by the control module of the first stage. 13. The system as recited in claim 8 , wherein the rectification and power conditioning module, the communication interface module, the control module, a conversion module, and a sensor circuit module are all configured on a single printed circuit board or a highly integrated circuit such as a system in a package (SiP). 14. The system as recited in claim 8 , wherein the hardware device includes a measurement cavity and wherein the tunable control module is configured to output a signal tuned to the measurement cavity. 15. The system as recited in claim 8 , wherein the hardware device is a sensing element communicably attached to a flow path, the sensing element configured to measure a characteristic of a fluid within the flow path. 16. The system as recited in claim 15 , wherein the tunable control module is configured to output a signal tuned to the fluid within the flow path. 17. The system as recited in claim 8 , further comprising a plurality of hardware elements, wherein the tunable control module is configured to communicate with each of the plurality of hardware elements. 18. The system as recited in claim 8 , wherein the component is at least one of a compressor vane segment or a component in the gas turbine engine that requires control or monitoring functions. 19. The system as recited in claim 8 , wherein the first stage and the second stage are contained within a network of shielded components to mitigate unwanted electromagnetic energy from exiting or entering the network, said shielded components in waveguide communication. 20. The system as recited in claim 8 , wherein the control/sensing/identification device is contained within a network of shielded components in waveguide communication to mitigate unwanted electromagnetic energy from exiting or entering the network.
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