Inner layer measurement method and inner layer measurement device

Patent metadata

Field	Value
Publication number	US-9977229-B2
Application number	US-201514859208-A
Country	US
Kind code	B2
Filing date	Sep 18, 2015
Priority date	Oct 1, 2014
Publication date	May 22, 2018
Grant date	May 22, 2018

Abstract

In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.

First claim

What is claimed is:

1. An inner layer measurement method of measuring XY sectional surfaces of a semitransparent body in which light is reflected on a surface and an inner layer thereof, the method comprising:
emitting light having both wavelength bands of first irradiation light and second irradiation light which has a peak wavelength longer than that of the first irradiation light;
forming the first irradiation light and the second irradiation light by transmitting the emitted light through a short pass filter and a long pass filter and changing at least one of a position at which the light is transmitted through a short pass filter and a position at which the light is transmitted through a long pass filter;
measuring a first XY sectional surface of the semitransparent body by irradiating the first XY sectional surface with the first irradiation light;
moving the measurement position of the semitransparent body in a Z axis direction to change a depth of the measurement position from the surface of the semitransparent body, and
measuring a second XY sectional surface positioned on a layer deeper in the Z axis direction than the first XY sectional surface by irradiating the second XY sectional surface with the second irradiation light,
wherein the short pass filter is capable of transmitting the light and has properties of changing a cutoff wavelength in response to the position at which the light is transmitted,
the long pass filter is capable of transmitting the light and has properties of changing a cutoff wavelength in response to the position at which the light is transmitted, and
the wavelength band of first irradiation light is determined according to a depth of the measurement position for the first XY sectional surface and the wavelength band of second irradiation light is determined according to a depth of the measurement position for the second XY sectional surface.

2. The inner layer measurement method according to claim 1 ,
wherein the second irradiation light is formed by eliminating a wavelength band shorter than that of the first irradiation light by using the long pass filter.

3. The inner layer measurement method according to claim 1 , further comprising:
adjusting light intensities of the first irradiation light and the second irradiation light by changing intensity of the light.

4. The inner layer measurement method according to claim 1 ,
wherein the short pass filter and the long pass filter include dielectric body surfaces facing each other.

5. The inner layer measurement method according to claim 1 ,
wherein the semitransparent body is a body tissue, and
the second irradiation light is formed by changing only a position of the long pass filter.

6. The inner layer measurement method according to claim 1 ,
wherein the second XY sectional surface is measured before the first XY sectional surface is measured.

7. The inner layer measurement method according to claim 1 , further comprising:
preparing and storing a wavelength scanning table in advance, the wavelength scanning table containing a relationship between the cutoff wavelength of each of filters and the depth of the measurement position; and
determining the wavelength bands of first irradiation light and second irradiation light using the wavelength scanning table.

8. An inner layer measurement device measuring XY sectional surfaces of a semitransparent body in which light is reflected on a surface and an inner layer, the device comprising:
a light interferometer including
a lamp configured to emit light having both wavelength bands of first irradiation light for measuring a first XY sectional surface of the semitransparent body and second irradiation light for measuring a second XY sectional surface positioned on a layer deeper in a Z axis direction than the first XY sectional surface, the second irradiation light having a peak wavelength longer than that of the first irradiation light,
a short pass filter capable of transmitting the light from the lamp and having a cutoff wavelength which is changed in response to a position at which the light is transmitted, and
a long pass filter capable of transmitting the light from the lamp and having a cutoff wavelength which is changed in response to a position at which the light is transmitted;

a driving mechanism configured to changing at least one of the position at which the light from the lamp is transmitted through the short pass filter and the position at which the light from the lamp is transmitted through the long pass filter, the emitted light being transmitted through the short pass filter and the long pass filter, so as to form the first irradiation light and the second irradiation light,
a sample positioning mechanism configured to move the measurement position of the semitransparent body in the Z axis direction to change a depth of the measurement position from the surface of the semitransparent body, the wavelength band of first irradiation light being determined according to a depth of the measurement position for the first XY sectional surface and the wavelength band of second irradiation light being determined according to a depth of the measurement position for the second XY sectional surface; and
a controller configured to controlling the driving mechanism and the sample positioning mechanism.

9. The inner layer measurement device according to claim 8 ,
wherein the long pass filter forms the second irradiation light by eliminating a wavelength band shorter than that of the first irradiation light.

10. The inner layer measurement device according to claim 8 ,
wherein the light interferometer further includes a light intensity adjusting device configured to adjusting light intensities of the first irradiation light and the second irradiation light by changing intensity of the light from the lamp, and
the controller is configured to also controlling the light intensity adjusting machine.

11. The inner layer measurement device according to claim 8 ,
wherein the short pass filter and the long pass filter include dielectric body surfaces facing each other.

12. The inner layer measurement device according to claim 8 ,
wherein the driving mechanism forms the second irradiation light by changing only a position of the long pass filter.

13. The inner layer measurement device according to claim 8 , further comprising:
a storage configured to store a wavelength scanning table containing a relationship between the cutoff wavelength of each of filters and the depth of the measurement position, the wavelength scanning table being used to determine the wavelength bands of first irradiation light and second irradiation light.

Assignees

• Panasonic Ip Man Co Ltd

Inventors

• Oikaze Hirotoshi
• Kabetani Yasuhiro
• Takechi Yohei
• Furuta Tomotaka

Classifications

• G02B26/007

  the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light · CPC title

• G01B9/04

  Measuring microscopes · CPC title

• G01B9/02002

  using two or more frequencies · CPC title

• G01B9/02048

  Rough and fine measurement · CPC title

• G02B21/26

  Stages; Adjusting means therefor · CPC title