Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner

Patent metadata

Field	Value
Publication number	US-9977228-B2
Application number	US-201414289749-A
Country	US
Kind code	B2
Filing date	May 29, 2014
Priority date	May 24, 2004
Publication date	May 22, 2018
Grant date	May 22, 2018

Abstract

An optical module is configured to be used in a microlithography objective. The optical module includes a first holding device with a circumference extending in a first circumferential direction and a first supporting device configured to support a first optical element. The first supporting device is fixed at the circumference of the first holding device. The optical module also includes a plurality of second supporting devices configured to support a second optical element, the second supporting devices being fixed at the circumference of the first holding device. The first supporting device does not contact the second supporting devices. The first optical element is separate from the second optical element. Along the first circumferential direction, the first supporting device is located in a non-equidistant manner between two neighboring second supporting devices.

First claim

The invention claimed is:

1. An optical module comprising:
a first holding device with a circumference extending in a first circumferential direction,
a first supporting device configured to support a first optical element, the first supporting device being fixed at the circumference of the first holding device; and
a plurality of second supporting devices configured to support a second optical element, the second supporting devices being fixed at the circumference of the first holding device,
wherein:
the first supporting device does not contact the second supporting devices,
the first optical element is separate from the second optical element;
along the first circumferential direction, the first supporting device is located in a non-equidistant manner between two neighboring second supporting devices;
the first circumferential direction lies in a first plane;
in a direction perpendicular to the first plane, the first supporting device is not disposed directly above either of the two neighboring second supporting devices;
in the direction perpendicular to the first plane, the first supporting device is not disposed directly below either of the two neighboring second supporting devices;
in a view in the direction perpendicular to the first plane, an outer contour of the first supporting device neither intersects nor coincides with an outer contour of the two neighboring second supporting devices; and
the optical module is configured to be used in a microlithography objective.

2. The optical module according to claim 1 , wherein at least one supporting device selected from the group consisting of the first supporting device and a second supporting device extends in a direction which runs perpendicular to the first plane.

3. The optical module according to claim 1 , wherein:
the optical module has a total number S of the first and second supporting devices fixed at the circumference of the first holding device;
the total number S includes the first supporting device and the second supporting devices;
one of the S supporting devices is displaced with respect to a neighboring one of the S supporting devices by an angle which is one of 40° and not equal to

α
=

360
⁢
°

S

with respect to a central axis of the first holding device in the first circumferential direction; and
the central axis runs perpendicular to the first plane.

4. The optical module according to claim 1 , wherein at least one supporting device is fixed detachably to the first holding device, and the at least one supporting device is selected from the group consisting of the first supporting device, one of the second supporting devices, and a combination thereof.

5. The optical module according to claim 4 , wherein the at least one supporting device comprises a connection element configured to connect the at least one supporting device to the first holding device.

6. The optical module according to claim 1 , wherein:
the first supporting device is connected to a first contact element of the first holding device;
at least one of the second supporting devices is connected to a second contact element of the first holding device; and
the first and second contact elements are arranged substantially in a common second plane running parallel to the first plane.

7. The optical module according to claim 1 , wherein:
at least one supporting device is fixed to the first holding device so that the at least one supporting device is adjustable; and
the at least one supporting device is selected from the group consisting of the first supporting device, at least one of the second supporting devices, and a combination thereof.

8. The optical module according to claim 1 , wherein:
at least one supporting device is configured to adjust a position of the optical element supported by the at least one supporting device; and
the at least one supporting device is selected from the group consisting of the first supporting device, at least one of the second supporting devices, and a combination thereof.

9. The optical module according to claim 1 , wherein, for at least one optical element, a plurality of the first and second supporting devices are fixed to the first holding device and are configured to statically support the at least one optical element.

10. The optical module according to claim 1 , wherein at least one supporting device is a bipod, and the at least one supporting device is selected from the group consisting of the first supporting device, at least one of the second supporting devices, and a combination thereof.

11. The optical module according to claim 1 , wherein:
for at least one optical element selected from the group consisting of the first optical element and the second optical element, a mounting device is provided which is detachably connected to an end of at least one supporting device for the at least one optical element facing away from the first holding device; and
the at least one supporting device is selected from the group consisting of the at least one first supporting device, at least one of the second supporting devices, and a combination thereof.

12. The optical module according to claim 1 , wherein:
at least one optical element is supported by at least one supporting device on the holding device;
the at least one supporting device is selected from the group consisting of the at least one first supporting device, at least one of the second supporting devices, and a combination thereof; and
the at least one optical element is selected from the group consisting of the first optical element and the second optical element.

13. The optical module according to claim 12 , wherein the at least one optical element is connected directly to the end of the at least one supporting device for the at least one optical element facing away from the first holding device.

14. The optical module according to claim 12 , wherein the at least one optical element is a reflecting element.

15. The optical module according to claim 12 , wherein the at least one optical element has a projection which is connected to the end of the at least one supporting device for the at least one optical element facing away from the first holding device.

16. The optical module according to claim 1 , wherein the first optical element comprises a first reflecting optical element, and the second optical element comprises a second reflecting optical element.

17. The optical module according to claim 16 , wherein:
the first optical element comprises a first reflecting face;
the second optical element comprises a second reflecting face;
the first optical and second optical elements are directly adjacent to one another; and
the first reflecting face is facing the second reflecting face.

18. The optical module according to claim 16 , wherein the first optical element comprises an optical surface which reflects light directly onto an optical surface of the second optical element.

19. The optical module according to claim 1 , wherein the first supporting device is a first bipod.

20. The optical module according to claim 19 , wherein the second supporting device is a second bipod.

21. The optical module of claim 20 , wherein the first optical element comprises a fi

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Kugler Jens
• Sorg Franz
• Kwan Yim-Bun Patrick

Classifications

• G02B7/021

  for more than one lens · CPC title

• G02B7/023

  permitting adjustment · CPC title

• G02B17/0605

  using two curved mirrors (G02B17/0668, G02B17/0694 take precedence) · CPC title

• G02B19/0023 Primary

  at least one surface having optical power · CPC title

• G02B7/182

  for mirrors · CPC title