Synthetic diamond optical elements

Patent metadata

Field	Value
Publication number	US-9977149-B2
Application number	US-201414770574-A
Country	US
Kind code	B2
Filing date	Mar 4, 2014
Priority date	Mar 6, 2013
Publication date	May 22, 2018
Grant date	May 22, 2018

Abstract

An optical element comprising: synthetic diamond material; and a flattened lens surface structure in the form of a zone plate, Fresnel lens, or a spherical lens formed directly in at least one surface of the synthetic diamond material, wherein the synthetic diamond material has an absorption coefficient measured at room temperature of ≤0.5 cm −1 at a wavelength of 10.6 μm, and wherein the synthetic diamond material has a laser induced damage threshold meeting one or both of the following characteristics: the laser induced damage threshold is at least 30 Jcm −2 measured using a pulsed laser at a wavelength of 10.6 μm with a pulse duration of 100 ns and a pulse repetition frequency in a range 1 to 10 Hz; and the laser induced damage threshold is at least 1 MW/cm 2 measured using a continuous wave laser at a wavelength of 10.6 μm.

First claim

The invention claimed is:

1. An optical element comprising:
synthetic diamond material; and
a flattened lens surface structure in the form of a zone plate, Fresnel lens, or aspherical lens formed directly in at least one surface of the synthetic diamond material,
wherein the synthetic diamond material has an absorption coefficient measured at room temperature of ≤0.5 cm −1 at a wavelength of 10.6 μm, and
wherein the synthetic diamond material has a laser induced damage threshold meeting one or both of the following characteristics:
the laser induced damage threshold is at least 30 Jcm −2 measured using a pulsed laser at a wavelength of 10.6 μm with a pulse duration of 100 ns and a pulse repetition frequency in a range 1 to 10 Hz; and
the laser induced damage threshold is at least 1 MW/cm 2 measured using a continuous wave laser at a wavelength of 10.6 μm.

2. An optical element according to claim 1 ,
wherein the laser induced damage threshold is at least 50 Jcm −2 , 75 Jcm −2 , 100 Jcm −2 , 150 Jcm −2 , or 200 Jcm −2 measured using said pulsed laser.

3. An optical element according to claim 1 ,
wherein the laser induced damage threshold is at least 5 MW/cm 2 , 10 MW/cm 2 , 20 MW/cm 2 , or 50 MW/cm 2 measured using said continuous wave laser.

4. An optical element according to claim 1 , wherein the synthetic diamond material has an absorption coefficient measured at room temperature of ≤0.4 cm −1 , ≤0.3 cm −1 , ≤0.2 cm −1 , ≤0.1 cm −1 , ≤0.07 cm −1 or ≤0.05 cm −1 at 10.6 μm.

5. An optical element according to claim 1 , wherein the synthetic diamond material has a dielectric loss coefficient tan δ measured at room temperature at 145 GHz of ≤2×10 −4 , ≤10 −4 , ≤5×10 −5 , ≤10 −5 , ≤5×10 −6 , or ≤10 −6 .

6. An optical element according to claim 1 , wherein the synthetic diamond material has one or more of the following characteristics:
an average black spot density no greater than 5 mm −2 , 3 mm −2 , 1 mm −2 , 0.5 mm −2 , or 0.1 mm −2 ;
a black spot distribution such that there are no more than 5, 4, 3, 2, or 1 black spots within any 3 mm 2 area;
an integrated absorbance per unit thickness of no more than 0.20 cm −2 , 0.15 cm −2 , 0.10 cm −2 , or 0.05 cm −2 , when measured with a corrected linear background in a range 2760 cm −1 to 3030 cm −1 ;
a thermal conductivity of no less than 1800 Wm −1 K −1 , 1900 Wm −1 K −1 , 2000 Wm −1 K −1 , 2100 Wm −1 K −1 , or 2200 Wm −1 K −1 ; and
a silicon concentration as measured by secondary ion mass spectrometry of no more than 10 17 cm −3 , 5×10 16 cm −3 , 10 16 cm −3 , 5×10 15 cm −3 , or 10 15 cm −3 .

7. An optical element according to claim 1 , wherein the flattened lens surface structure is configured to focus light at an operating wavelength in the infrared, visible, or ultraviolet region of the electromagnetic spectrum.

8. An optical element according to claim 7 , wherein the optical element has a reflectance of no more than 3%, 2%, 1.5%, 1% or 0.5% at the operating wavelength of the optical element.

9. An optical element according to claim 7 , wherein the optical element has a transmittance of at least 97%, 98% or 99% at the operating wavelength of the optical element.

10. An optical element according to claim 7 , wherein the optical element has a total integrated scatter in a forward hemisphere no more than 2%, 1%, 0.5%, or 0.1% at the operating wavelength of the optical element.

11. An optical element according to claim 1 , wherein the flattened lens surface structure is formed in at least one surface of the synthetic diamond material over an area of at least 50 mm 2 , 100 mm 2 , 200 mm 2 , 300 mm 2 , 500 mm 2 , 700 mm 2 , 1000 mm 2 , 1500 mm 2 , 2000 mm 2 , 3000 mm 2 , 5000 mm 2 , 7000 mm 2 , 10000 mm 2 , 15000 mm 2 , or 20000 mm 2 .

12. An optical element according to claim 11 , wherein the optical element meets the requirements defined in claim 1 over at least 50%, 60%, 70%, 80%, 90%, or 100% of said area.

13. An optical element according to claim 1 , wherein the flattened lens surface structure comprises zone structures filled with a solid material which is selected to enhance diffraction and/or refraction efficiency of the flattened lens surface structure.

14. An optical system comprising:
an optical element according to claim 1 ; and
a light source configured to generate light at a power of at least 20 kW and transmit said light through the optical element at an operating wavelength in the infrared, visible, or ultraviolet region of the electromagnetic spectrum.

15. An optical system according to claim 14 , wherein the light source is configured to generate light at a power of at least 25 kW, 30 kW, 35 kW, 40 kW, 45 kW, or 50 kW.

Assignees

• Element Six N V
• Element Six Tech Ltd

Inventors

• Twitchen Daniel
• Bennett Andrew Michael
• Anoikin Yevgeny Vasilievich
• Dewit Hendrikus Gerardus Maria

Classifications

• C30B25/02

  Epitaxial-layer growth · CPC title

• G02B5/1876

  Diffractive Fresnel lenses; Zone plates; Kinoforms (G02B5/1842, G02B5/1847 take precedence; optical systems having diffractive correction means G02B27/0037; Fresnel lenses operating by refraction G02B3/08) · CPC title

• G02B3/08

  with discontinuous faces, e.g. Fresnel lens {(diffractive Fresnel lenses G02B5/1876)} · CPC title

• G02B1/02 Primary

  made of crystals, e.g. rock-salt, semi-conductors (G02B1/08 takes precedence) · CPC title

• G02B3/04

  with continuous faces that are rotationally symmetrical but deviate from a true sphere {, e.g. so called "aspheric" lenses} · CPC title