Nanoporous structures by reactive ion etching

Patent metadata

Field	Value
Publication number	US-9977002-B2
Application number	US-201514734018-A
Country	US
Kind code	B2
Filing date	Jun 9, 2015
Priority date	Jun 18, 2013
Publication date	May 22, 2018
Grant date	May 22, 2018

Abstract

A metal structure including a first metal end region, a second metal end region, and an intermediate region between the first metal end region and the second metal end region, wherein the intermediate region comprises a metal nanostructure having a plurality of pores.

First claim

What is claimed is:

1. A metal structure comprising:
a first non-porous metal end region;
a second non-porous metal end region; and
an intermediate region between the first non-porous metal end region and the second non-porous metal end region, wherein the first non-porous metal end region, the second non-porous metal end region and the intermediate region have co-planar top surfaces and comprise the same metal, and the intermediate region comprises a metal nanostructure having a plurality of pores having an average diameter of less than approximately 10 nm.

2. The structure of claim 1 , wherein the plurality of pores fully penetrate the metal nanostructure.

3. The structure of claim 1 , wherein the plurality of pores have an average diameter of approximately 5 nm.

4. The structure of claim 1 , wherein the first metal end region, the second metal end region, and the intermediate region comprises palladium, gold, titanium, or platinum.

5. The structure of claim 1 , wherein the first metal end region, the second metal end region, and the intermediate region comprises palladium-nickel or palladium-cerium.

6. A sensor structure comprising:
a nanowire and two non-porous metal pads above a substrate, wherein the nanowire and the non-porous metal pads comprise the same metal, the nanowire is in direct contact with and extends between the two non-porous metal pads, the nanowire comprises a metal nanostructure having a plurality of pores, and a top surface of the nanowire is co-planar with a top surface of each of the two non-porous metal pads.

7. The structure of claim 6 , wherein at least some of the plurality of pores extend fully through an entire thickness of the nanowire.

8. The structure of claim 6 , wherein the plurality of pores are non-uniform in size and randomly distributed throughout the metal nanostructure.

9. The structure of claim 6 , wherein the plurality of pores have an average diameter of less than approximately 10 nm.

10. The structure of claim 6 , wherein nanowire and the two metal pads comprise palladium, gold, titanium, or platinum.

11. The structure of claim 6 , wherein nanowire and the two metal pads comprise palladium-nickel or palladium-cerium.

12. A structure comprising:
a metal layer above a semiconductor substrate, the metal layer comprising a non-porous first region, a non-porous second region, and an intermediate region separating the first region from the second region, wherein the first region, the second region and the intermediate region comprise the same metal and have mutually-co-planar top surfaces, and the intermediate region comprises a metal nanowire having a plurality of pores.

13. The structure of claim 12 , wherein at least some of the plurality of pores extend fully through an entire thickness of the metal layer in the intermediate region.

14. The structure of claim 12 , wherein the plurality of pores have an average diameter of less than approximately 10 nm.

15. The structure of claim 12 , wherein the first region, the second region, and the intermediate region comprises palladium, gold, titanium, or platinum.

16. The structure of claim 12 , wherein the first region, the second region, and the intermediate region comprise palladium-nickel or palladium-cerium.

17. The structure of claim 12 , wherein the intermediate region comprises a nanowire having end portions wider than a middle portion.

18. The structure of claim 12 , wherein the intermediate region comprises multiple nanowires extending between the first region and the second region.

Assignees

• IBM
• Globalfoundries Inc

Inventors

• Astier Yann
• Bai Jingwei
• Bruce Robert L
• Franklin Aaron D
• Smith Joshua T

Classifications

• C22C28/00

  Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00 · CPC title

• C22C14/00

  Alloys based on titanium · CPC title

• C22C5/04

  Alloys based on a platinum group metal · CPC title

• C22C5/02

  Alloys based on gold · CPC title

• C22C1/08

  Alloys with open or closed pores · CPC title