Systems and methods for X-ray diffraction

Patent metadata

Field	Value
Publication number	US-9976971-B2
Application number	US-201514639460-A
Country	US
Kind code	B2
Filing date	Mar 5, 2015
Priority date	Mar 6, 2014
Publication date	May 22, 2018
Grant date	May 22, 2018

Abstract

An x-ray diffraction system includes an x-ray source having a first interchangeable x-ray generating component, a second interchangeable x-ray generating component, an actuator and a controller operatively connected to the actuator. The first and second interchangeable x-ray generating components are interchangeable with one another. The actuator is operatively connected to the first and second interchangeable x-ray generating components. A method for non-destructive x-ray diffraction includes emitting a first x-ray beam from an x-ray source with a first interchangeable x-ray generating component based on a first desired depth to measure a crystallographic signature of a sample at the first desired depth, interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component to form a modified x-ray source, and emitting a second x-ray beam from the modified x-ray source based on a second desired depth, to non-destructively measure a crystallographic signature of the sample at the second desired depth.

First claim

What is claimed is:

1. An x-ray diffraction system comprising:
an x-ray source including a first interchangeable x-ray generating component;
a second interchangeable x-ray generating component configured to be interchanged with the first interchangeable x-ray generating component;
an actuator operatively connected to both the first interchangeable x-ray generating component and the second interchangeable x-ray generating component for mechanically interchanging the first interchangeable x-ray generating component with the second interchangeable x-ray generating component; and
a controller operatively connected to the actuator,
wherein the first interchangeable x-ray generating component comprises a first interchangeable x-ray tube and the second interchangeable x-ray generating component comprises a second interchangeable x-ray tube.

2. An x-ray diffraction system as recited in claim 1 , wherein the first interchangeable x-ray tube is configured to emit a respective first x-ray beam at a first energy and a first wavelength and wherein the second interchangeable x-ray tube is configured to emit a respective second x-ray beam at a second energy and a second wavelength, wherein at least one of the first energy and the first wavelength is different from at least one of the second energy and the second wavelength.

3. An x-ray diffraction system as recited in claim 1 , wherein the first interchangeable x-ray tube includes a first interchangeable x-ray target and the second interchangeable x-ray tube includes a second interchangeable x-ray target, wherein the first interchangeable x-ray target of the first interchangeable x-ray tube is different from the second interchangeable x-ray target of the second interchangeable x-ray tube.

4. An x-ray diffraction system as recited in claim 3 , wherein at least one of the first interchangeable x-ray target of the first interchangeable x-ray tube and the second interchangeable x-ray target of the second interchangeable x-ray tube includes a material selected from the group consisting of copper, silver, chromium, vanadium, manganese, cobalt, molybdenum, and titanium.

5. A method for non-destructive x-ray diffraction, comprising:
emitting a first x-ray beam from an x-ray source with a first interchangeable x-ray generating component based on a first desired measurement depth, wherein the first x-ray beam has first energy and a first wavelength, wherein the first x-ray beam is emitted in response to a first focused stream of electrons directed at the first interchangeable x-ray generating component and wherein the first x-ray beam is not parallel to the first focused stream of electrons, wherein the first x-ray beam is not a transmitted x-ray beam;
measuring a crystallographic signature of a sample at the first desired measurement depth;
interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component to form a modified x-ray source;
emitting a second x-ray beam from the modified x-ray source based on a second desired measurement depth, wherein the second desired measurement depth is different from the first desired measurement depth, wherein the second x-ray beam has second energy and a second wavelength, wherein the second x-ray beam is emitted in response to a second focused stream of electrons directed at the second interchangeable x-ray generating component and wherein the second x-ray beam is not parallel to the second focused stream of electrons, wherein the second x-ray beam is not a transmitted x-ray beam; and
measuring a crystallographic signature of the sample at the second desired measurement depth.

6. A method as recited in claim 5 , wherein the step of interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component includes interchanging a first interchangeable x-ray target with a second interchangeable x-ray target.

7. A method as recited in claim 5 , wherein at least one of the first energy and the first wavelength is different from at least one of the second energy and the second wavelength.

8. A method as recited in claim 5 , further comprising adjusting an alignment of the sample relative to at least one of the x-ray source and the modified x-ray source to adjust an angle of incidence between at least one of the first x-ray beam, the second x-ray beam, and the sample.

9. A method as recited in claim 5 , further comprising adjusting an alignment of a multi-axis sample stage relative to at least one of the x-ray source and the modified x-ray source based on a desired crystallographic measurement depth in the sample.

10. A method for non-destructive x-ray diffraction, comprising:
emitting a first x-ray beam from an x-ray source with a first interchangeable x-ray generating component based on a first desired measurement depth;
measuring a crystallographic signature of a sample at the first desired measurement depth;
interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component to form a modified x-ray source;
emitting a second x-ray beam from the modified x-ray source based on a second desired measurement depth, wherein the second desired measurement depth is different from the first desired measurement depth; and
measuring a crystallographic signature of the sample at the second desired measurement depth,
wherein the step of interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component includes interchanging a first interchangeable x-ray tube with a second interchangeable x-ray tube.

11. A tangible, non-transitory, computer-readable media having software encoded thereon, the software, when executed by a processor, operable to:
receive a first desired crystallographic measurement depth of a sample;
select a first interchangeable x-ray target and at least one of an incident beam collimating optic and a diffracted beam collimating optic based on the first desired crystallographic measurement depth for use in non-destructive x-ray crystallography, wherein the first interchangeable x-ray target is configured to emit a first x-ray beam at a first energy and a first wave length towards the sample, wherein the first x-ray beam is emitted in response to a first focused stream of electrons directed at the first interchangeable x-ray generating component and wherein the first x-ray beam is not parallel to the first focused stream of electrons, wherein the first x-ray beam is not a transmitted x-ray beam;
execute a command to cause an actuator to mechanically alter the current interchangeable x-ray target and at least one of the incident beam collimating optic and the diffracted beam collimating optic to match the selected first interchangeable x-ray target and at least one of the incident beam collimating optic and the diffracted beam collimating optic for non-destructive below surface measurements of the sample;
receive a second desired crystallographic measurement depth of the sample;
select a second interchangeable x-ray target and at least one of the incident beam collimating optic and the diffracted beam collimating optic based on the second desired crystallographic measurement depth for use in non-destructive x-ray crystallography, wherein the second interchangeable x-ray target is configured to emit a second x-ray beam at a second energy and a second wave length towards the sample, wherein the second x-ray beam is emitted in response to a second focused stream of electrons directed at the second interchangeable x-ray generating component and wherein the second x-ray beam is not parallel to the second focused

Assignees

• United Technologies Corp

Inventors

• Cernatescu Iuliana
• Furrer David U

Classifications

• H01J2235/086

  Target geometry · CPC title

• H01J2235/081

  Target material · CPC title

• H01J35/26

  by rotation of the anode or anticathode · CPC title

• H01J35/101

  Arrangements for rotating anodes, e.g. supporting means, means for greasing, means for sealing the axle or means for shielding or protecting the driving · CPC title

• G01N23/20008 Primary

  Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor (monochromators for X- rays using crystals G21K1/06) · CPC title