Lithographic apparatus stage coupling
US-12535746-B2 · Jan 27, 2026 · US
US9976621B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9976621-B2 |
| Application number | US-201013393969-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 15, 2010 |
| Priority date | Jun 17, 2004 |
| Publication date | May 22, 2018 |
| Grant date | May 22, 2018 |
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A thermoplastic spring and a method for manufacturing the thermoplastic spring are provided to reduce the effect of creep during use of the spring. The spring is molded and deformed to final dimensions by pre-inducing creep in the molded body.
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What is claimed is: 1. A thermoplastic spring, comprising: a thermoplastic body; at least one non-deformed region in said body having dimensions established by molding of the body; and at least one deformed region in said body, the deformed region extending fully across a cross-section of the body, the deformed region being deformed by stretching and having a first deformed dimension, in a stretched state, greater than the dimension thereof created by molding, the deformed region having a second deformed dimension in a non-stretched state greater than the dimension thereof created by molding and less than the dimension thereof in the stretched state; said deformed dimension resulting from elongation beyond a final in-use dimension of the thermoplastic spring. 2. The thermoplastic spring of claim 1 , including a plurality of non-deformed regions. 3. The thermoplastic spring of claim 1 , including a plurality of deformed regions. 4. The thermoplastic spring of claim 1 , including a plurality of non-deformed regions and a plurality of deformed regions. 5. The thermoplastic spring of claim 1 , having at least one non-deformed node among multiple deformed regions. 6. The thermoplastic spring of claim 5 , including a series of alternating non-deformed nodes and deformed regions. 7. The thermoplastic spring of claim 1 , said deformed region including at least two strands. 8. The thermoplastic spring of claim 7 , said strands each having non-deformed nodes within the deformed regions thereof. 9. The thermoplastic spring of claim 8 , including bridges connecting at least some nodes from one strand to at least some nodes of the other strand. 10. An air hose support strap, comprising: a monolithic, elastomeric, thermoplastic body; end regions of said body having dimensions established by molding; and an intermediate region between said end regions having a molded dimension and having final dimensions in a non-stretched state established by molding and subsequent stretching of the molded dimension to a larger dimension, at least a portion of said intermediate region extending fully across a cross-section of said body, the final dimensions being greater than the molded dimension and less than the stretched dimension. 11. The air hose support strap of claim 10 , said intermediate region having at least one non-deformed node therein thicker than deformed sections in said intermediate region. 12. The air hose support strap of claim 10 , said intermediate region including at least two strands. 13. The air hose support strap of claim 12 , said strands having alternating non-deformed nodes and deformed segments. 14. The air hose support strap of claim 13 , including bridges connecting at least some nodes from one strand to at least some nodes of the other strand. 15. A method for making a thermoplastic spring, comprising: forming a spring body of thermoplastic material to a dimension less than a final dimension of the spring; elongating at least a portion of the spring body to a dimension greater than the final dimension, wherein the elongation occurs, at least in part, fully across a cross-section of the spring body; and releasing the elongated portion to a non-stretched state. 16. The method of claim 15 , said elongating performed by stretching. 17. The method of claim 15 , said elongating performed by stretching a first distance and releasing, followed by stretching a second distance. 18. The method of claim 17 , said first and second distances being different. 19. The method of claim 15 , said elongating including stretching and holding the at least a portion of the spring body in the stretched condition. 20. The method of claim 15 , said elongating including stretching at least a first time and a second time at different conditions of at least one of acceleration, distance and dwell time.
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