Sulfonium salt, chemically amplified resist composition, and pattern forming process
US-9221742-B2 · Dec 29, 2015 · US
US9975843B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9975843-B2 |
| Application number | US-201515127969-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 27, 2015 |
| Priority date | Mar 28, 2014 |
| Publication date | May 22, 2018 |
| Grant date | May 22, 2018 |
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A method for producing a bifunctional compound of formula (1): where R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 or CHO and R 2 represents H, CH 3 or C 2 H 5 , by subjecting a monoolefin of formula (2): where R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 or CHO and R 2 represents H, CH 3 or C 2 H 5 , carbon monoxide and hydrogen gases to a hydroformylation reaction in the presence of a rhodium compound and an organic phosphorous compound. Compounds produced.
Opening claim text (preview).
The invention claimed is: 1. A method for producing a bifunctional compound of formula (1): wherein R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 or CHO; and R 2 represents H, CH 3 or C 2 H 5 , provided that when R 1 represents CHO, R 2 represents C 2 H 5 , the method comprising subjecting a monoolefin of formula (2): wherein R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 or CHO; and R 2 represents H, CH 3 or C 2 H 5 , provided that when R 1 represents CHO, R 2 represents C 2 H 5 , carbon monoxide and hydrogen gases to a hydroformylation reaction in the presence of a rhodium compound and an organic phosphorous compound. 2. The method according to claim 1 , further comprising producing the monoolefin of formula (2) by a Diels-Alder reaction of dicyclopentadiene with CH 2 ═CR 1 R 2 , wherein R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 or CHO; and R 2 represents H, CH 3 or C 2 H 5 , provided that when R 1 represents CHO, R 2 represents C 2 H 5 . 3. The method according to claim 1 , comprising performing the hydroformylation reaction using: the rhodium compound in an amount of 0.1 to 60 μmol relative to 1 mol of the monoolefin of formula (2); and the organic phosphorous compound in an amount of 300 to 10,000 times the molar quantity of the rhodium compound. 4. The method according to claim 1 , wherein a pressure at the time of hydroformylation of the monoolefin of formula (2) is 1 to 12 MPa. 5. The method according to claim 1 , comprising supplying the monoolefin of formula (2) or a solution thereof to a solution comprising the rhodium compound, the organic phosphorous compound and a solvent under an atmosphere comprising carbon monoxide and hydrogen gases. 6. The method according to claim 1 , further comprising isolating the bifunctional compound of formula (1) from a reaction solution after the hydroformylation reaction by distillation. 7. The method according to claim 1 , wherein R 1 in formula (1) and formula (2) represents COOCH 3 . 8. The method according to claim 1 , wherein R 1 in formula (1) and formula (2) represents COOC 2 H 5 . 9. The method according to claim 1 , wherein R 1 in formula (1) and formula (2) represents COOC 3 H 7 . 10. The method according to claim 1 , wherein R 1 in formula (1) and formula (2) represents COOC 4 H 9 . 11. The method according to claim 1 , wherein R 1 in formula (1) and formula (2) represents CHO.
by oxo-reactions · CPC title
having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, [IMAGE cpc-sch-C07C-0958.gif] groups,[IMAGE cpc-sch-C07C-0959.gif] groups, or[IMAGE cpc-sch-C07C-0960.gif] in the acid moiety · CPC title
having a —CHO group on a condensed ring system · CPC title
of polycyclic acids · CPC title
by addition to unsaturated carbon-to-carbon bonds · CPC title
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