Rocker device for a micromechanical Z-sensor

Patent metadata

Field	Value
Publication number	US-9970957-B2
Application number	US-201514925305-A
Country	US
Kind code	B2
Filing date	Oct 28, 2015
Priority date	Nov 14, 2014
Publication date	May 15, 2018
Grant date	May 15, 2018

Abstract

A rocker device for a micromechanical Z-sensor, including two rocker arms which are mounted around a torsion spring and which are asymmetric relative to the torsion spring; the rocker arms having first perforations; at least one of the rocker arms having at least one opening, a diameter of the first perforations being configured in a defined manner to be smaller than a diameter of the opening; and a cavity for connecting the first perforations to the at least one opening being formed in at least one of the rocker arms.

First claim

What is claimed is:

1. A rocker device for a micromechanical Z-sensor, comprising:
two rocker arms which are mounted around a torsion spring and which are asymmetric relative to the torsion spring, an underside of each of the rocker arms having first perforations disposed along an entirety of the underside;
wherein at least one of the rocker arms has at least one opening, a diameter of the first perforations being configured in a defined manner to be smaller than a diameter of the opening,
wherein a cavity for connecting the first perforations to the at least one opening is formed in at least one of the rocker arms, and
wherein a width of the cavity along a dimension that is parallel to the underside is wider than a width of the at least one opening.

2. The rocker device of claim 1 , wherein the first perforations have a surface area of 0.5 μm×2 μm formed in an xy plane of the rocker device, and the opening has a surface area of 2 μm×3 μm formed in the xy plane of the rocker device.

3. The rocker device of claim 1 , wherein the first perforations are formed in a third functional layer of the rocker device.

4. The rocker device of claim 1 , wherein the at least one opening is formed in a first functional layer of the rocker device.

5. The rocker device of claim 1 , wherein the cavity is situated in a rocker arm having a first functional layer.

6. A micromechanical Z-sensor, comprising:
a rocker device for a micromechanical Z-sensor, including two rocker arms which are mounted around a torsion spring and which are asymmetric relative to the torsion spring, an underside of each of the rocker arms having first perforations disposed along an entirety of the underside;
wherein at least one of the rocker arms has at least one opening, a diameter of the first perforations being configured in a defined manner to be smaller than a diameter of the opening,
wherein a cavity for connecting the first perforations to the at least one opening is formed in at least one of the rocker arms, and
wherein a width of the cavity along a dimension that is parallel to the underside is wider than a width of the at least one opening.

7. A method for producing a rocker device for a micromechanical Z-sensor, the method comprising:
forming two asymmetric rocker arms;
forming first perforations in a third functional layer of the rocker arms so that an underside of each of the rocker arms include the first perforations disposed along an entirety of the underside;
forming at least one opening in a first functional layer of at least one of the rocker arms; and
forming at least one cavity in at least one of the rocker arms, as a result of which the first perforations and the at least one opening are connected, wherein a width of the cavity along a dimension that is parallel to the underside is wider than a width of the at least one opening.

8. The method of claim 7 , wherein the cavity is formed in a rocker arm having a first functional layer.

Assignees

• Bosch Gmbh Robert

Inventors

• Scheurle Andreas
• Ulrich Guenther-Nino-Carlo

Classifications

• G01P2015/0831

  the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration · CPC title

• B81B2203/0181

  See-saws · CPC title

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• G01P1/003

  used for damping · CPC title

• B81C1/00198

  comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements · CPC title