Multi-spot scanning collection optics

Patent metadata

Field	Value
Publication number	US-9970883-B2
Application number	US-201715399331-A
Country	US
Kind code	B2
Filing date	Jan 5, 2017
Priority date	Feb 12, 2014
Publication date	May 15, 2018
Grant date	May 15, 2018

Abstract

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.

First claim

What is claimed is:

1. A system for inspecting or measuring a specimen, comprising:
an illumination channel for generating and scanning a plurality of incident beams at an oblique angle to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen; and
one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion, wherein the one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion, wherein the at least one longitudinal side channel is arranged to have an optical axis along which the detected image is collected and which is also parallel and coincident with a plane of the specimen or an image plane of the specimen.

2. The system of claim 1 , wherein the one or more detection channels include a first longitudinal side channel for longitudinally collecting a first plurality of detected images for the scan portions, a second longitudinal side channel for longitudinally collecting a second plurality of detected images for the scan portions, wherein the first longitudinal side channel is positioned opposite of the second longitudinal side channel.

3. The system of claim 1 , wherein each of the at least one detection channels are configured to collect its detected images in parallel for the plurality of scan portions.

4. The system of claim 3 , wherein the illumination channel includes a normal illumination sub-channel for generating and scanning a first set of the plurality of incident beams to contribute to the plurality of spots that scan across the plurality of scan portions of the specimen and an oblique illumination sub-channel for generating and scanning a second set of the plurality of incident beams to contribute to the plurality of spots that scan across the plurality of scan portions of the specimen, and wherein the one or more detection channels include a first longitudinal side channel for longitudinally collecting a first plurality of detected images for the scan portions, a second longitudinal side channel for longitudinally collecting a second plurality of detected images for the scan portions, and a normal collection channel for collecting a third plurality of detected images for the scan portions, wherein the first longitudinal side channel is positioned opposite of the second longitudinal side channel.

5. The system of claim 4 , wherein the normal illumination sub-channel and the oblique illumination sub-channel each include a waveplate for providing a plurality of polarizations.

6. The system of claim 5 , wherein the first and second longitudinal side channels and the normal collection channel each include an analyzer for capturing selected polarizations.

7. The system of claim 4 , wherein the normal illumination sub-channel and the oblique illumination sub-channel each include an acousto-optical device (AOD) for scanning the incident beams, the system further comprising a controller for modulating an amplitude of a drive signal to each AOD for controlling its corresponding incident beams' power.

8. The system of claim 4 , wherein the normal illumination sub-channel and the oblique illumination sub-channel each include an apodization element to provide a variety of transmission profiles.

9. A system for inspecting or measuring a specimen, comprising:
an illumination channel for generating and scanning a plurality of incident beams obliquely to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen; and
one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion, wherein the one or more detection channels comprises a longitudinal side channel for longitudinally collecting a plurality of detected images for the scan portions,
wherein the longitudinal side channel comprises:
a front lens arranged for receiving output beams that are scattered from the scan portions and directing such output beams through a Fourier plane towards a back lens,
the back lens arranged for receiving and directing the output beams towards a sensor module,
the sensor module arranged for separately sensing the output beams from the back lens, and
an optics element arranged for receiving the output beams from the front lens, spatially filtering portions of the output beams at the Fourier plane, and directing the output beams to the back lens, wherein the optics element includes an aperture having serrated teeth pointed perpendicular to an optical axis for controlling diffraction.

10. The system of claim 9 , wherein the serrated teeth are formed from two overlaid masks with serrated teeth to cover rounded portions of the teeth in each mask and to form non-rounded serrated teeth.

11. The system of claim 9 , wherein the optics element includes a plurality of pins that are independently movable to drop down into each aperture and selectively block noise, isolate signals, or block one or more diffraction spots.

12. The system of claim 9 , wherein the illumination channel comprises a magnifier changer.

13. The system of claim 12 , wherein the illumination channel includes a scan mechanism that is configured to sweep the incident beams across equally sized scan portions on the sample.

14. The system of claim 12 , wherein the longitudinal side channel includes a magnifier changer to match a magnification of the magnifier changer of the illumination channel.

15. The system of claim 9 , wherein the sensor module comprises:
a first and second razor portion forming a gap there between arranged to receive a focus point for each of the output beams,
a plurality of prisms that are each positioned at each of the output beams' focus point to separately receive and direct the output beams to a plurality of fiber elements,
the fiber elements arranged to separately receive and direct the output beams from the plurality of prisms to a plurality of focusing elements,
the plurality of focusing elements being arranged for individually focusing the output beams onto a plurality of sensor elements, and
the plurality of sensor elements being positioned for individually sensing the output beams.

16. The system of claim 15 , wherein the prisms are movable to compensate for distortion.

17. The system of claim 9 , wherein the sensor module comprises:
a first and second razor portion forming a gap there between arranged to receive a focus point for each of the output beams,
a plurality of mirror and/or fiber elements sets that are each positioned at each of the output beams' focus point to separately receive and direct the output beams to a plurality of focusing elements,
the plurality of focusing elements being arranged for individually focusing the output beams onto a plurality of sensor elements, and
the plurality of sensor elements being positioned for individually sensing the output beams.

18. The system of claim 9 , wherein the sensor module comprises:
a mask having a plurality of apertures that each receive a focus point for each of the output beams,
a plurality of prisms or sets of mirrors that are each positioned at each of the ou

Assignees

• Kla Tencor Corp

Inventors

• Sullivan Jamie M
• Johnson Ralph
• Churin Evegeny
• Cai Wenjian
• Moon Yong Mo

Classifications

• G02B21/002

  Scanning microscopes (scanning near field optical microscopes G01Q60/18) · CPC title

• G01N21/9501

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G02B27/0068

  having means for controlling the degree of correction, e.g. using phase modulators, movable elements (controlling the phase of light using moving or deformable elements G02B26/06) · CPC title

• G02B21/0052

  Optical details of the image generation · CPC title