Vacuum pump connecting apparatus and method for installing vacuum pump connecting apparatus

Patent metadata

Field	Value
Publication number	US-9970459-B2
Application number	US-201414228404-A
Country	US
Kind code	B2
Filing date	Mar 28, 2014
Priority date	Mar 29, 2013
Publication date	May 15, 2018
Grant date	May 15, 2018

Abstract

A vacuum pump connecting apparatus has a first vibration absorbing portion and a second vibration absorbing portion which are connected to an evacuation connection portion so as to dispose the first and second vibration absorbing portions opposite each other via the evacuation connection portion. A first end of the first vibration absorbing portion is connected to the evacuation connection portion and a second end of the first vibration absorbing assembly opposite to the second end is connected to an intake port of a vacuum pump. The first vibration absorbing portion and the second vibration absorbing portion are elastic bellows. A first end of the second vibration absorbing portion is connected to the evacuation connection portion. The vacuum pump connecting apparatus has a rigid coupling member which is connected to a second end of the second vibration absorbing portion opposite to the first end of the second vibration absorbing portion.

First claim

What is claimed is:

1. A vacuum pump apparatus comprising:
a vacuum pump;
an evacuation connection portion for connecting an intake port of the vacuum pump to a lens barrel portion of an electron beam application apparatus;
a first vibration absorbing portion and a second vibration absorbing portion which are connected to the evacuation connection portion so as to lie opposite each other via the evacuation connection portion, wherein:
the first vibration absorbing portion is connected to the evacuation connection portion at a first end of the first vibration absorbing portion,
the first vibration absorbing portion is connected to the intake port of the vacuum pump at a second end of the first vibration absorbing portion opposite to the first end,
the second vibration absorbing portion is connected to the evacuation connection portion at a first end of the second vibration absorbing portion, and
the first vibration absorbing portion and the second vibration absorbing portion are configured to absorb vibration of the vacuum pump; and

a rigid coupling member fixed to the second vibration absorbing portion at a second end of the second vibration absorbing portion opposite to the first end, the rigid coupling member being fixed to the first vibration absorbing portion or the intake port of the vacuum pump,
wherein the evacuation connection portion comprises a magnetic shielding member,
wherein the vacuum pump apparatus further comprises the electron beam application apparatus, and
wherein a plane containing a cylindrical axis of the lens barrel portion is parallel to a plane containing an axis of rotation of a rotor of the vacuum pump.

2. A method of installing the vacuum pump connecting apparatus according to claim 1 , the method comprising:
connecting the intake port of the vacuum pump to the lens barrel portion of the electron beam application apparatus via the evacuation connection portion;
connecting the first vibration absorbing portion and the second vibration absorbing portion to the evacuation connection portion so as to lie opposite each other via the evacuation connection portion;
connecting the first end of the first vibration absorbing portion to the evacuation connection portion at the first end of the first vibration absorbing portion;
connecting the second end of the first vibration absorbing portion to the intake port of the vacuum pump;
connecting the first end of the second vibration absorbing portion to the evacuation connection portion;
fixing the rigid coupling member to the second vibration absorbing portion at the second end of the second vibration absorbing portion opposite to the first end;
fixing the rigid coupling member to the first vibration absorbing portion or the intake port of the vacuum pump; and
disposing the plane containing the cylindrical axis of the lens barrel portion parallel to the plane containing the axis of rotation of the rotor of the vacuum pump.

3. The method according to claim 2 , further comprising disposing the intake port of the vacuum pump in such a manner that the intake port faces a first direction and disposing a side of the vacuum pump opposite to the intake port in such a manner that the side faces a second direction opposite to the first direction.

4. The method according to claim 2 , further comprising fixing the vacuum pump, on a side of the vacuum pump opposite to the intake port, to a structure joined to a base on which the electron beam application apparatus is installed, or fixing the rigid coupling member to the structure at the second end of the first vibration absorbing portion, or fixing the rigid coupling member to the structure at the second end of the second vibration absorbing portion.

5. A vacuum pump apparatus comprising:
a vacuum pump;
an evacuation connection portion for connecting an intake port of the vacuum pump to a lens barrel portion of an electron beam application apparatus;
a first vibration absorbing portion and a second vibration absorbing portion which are connected to the evacuation connection portion so as to lie opposite each other via the evacuation connection portion, wherein:
the first vibration absorbing portion is connected to the evacuation connection portion at a first end of the first vibration absorbing portion,
the first vibration absorbing portion is connected to the intake port of the vacuum pump at a second end of the first vibration absorbing portion opposite to the first end,
the second vibration absorbing portion is connected to the evacuation connection portion at a first end of the second vibration absorbing portion, and
the first vibration absorbing portion and the second vibration absorbing portion are configured to absorb vibration of the vacuum pump; and

a rigid coupling member fixed to the second vibration absorbing portion at a second end of the second vibration absorbing portion opposite to the first end, the rigid coupling member being fixed to the first vibration absorbing portion or the intake port of the vacuum pump,
wherein the evacuation connection portion comprises a magnetic shielding member,
wherein the vacuum pump apparatus further comprises the electron beam application apparatus, and
wherein a cylindrical axis of the lens barrel portion is parallel to an axis of rotation of a rotor of the vacuum pump.

6. A method of installing the vacuum pump connecting apparatus according to claim 5 , the method comprising:
connecting the intake port of the vacuum pump to the lens barrel portion of the electron beam application apparatus via the evacuation connection portion;
connecting the first vibration absorbing portion and the second vibration absorbing portion to the evacuation connection portion so as to lie opposite each other via the evacuation connection portion;
connecting the first end of the first vibration absorbing portion to the evacuation connection portion at the first end of the first vibration absorbing portion;
connecting the second end of the first vibration absorbing portion to the intake port of the vacuum pump;
connecting the first end of the second vibration absorbing portion to the evacuation connection portion;
fixing the rigid coupling member to the second vibration absorbing portion at the second end of the second vibration absorbing portion opposite to the first end;
fixing the rigid coupling member to the first vibration absorbing portion or the intake port of the vacuum pump; and
disposing the cylindrical axis of the lens barrel portion parallel to the axis of rotation of the rotor of the vacuum pump.

7. The method according to claim 6 , further comprising disposing the intake port of the vacuum pump in such a manner that the intake port faces a first direction and disposing a side of the vacuum pump opposite to the intake port in such a manner that the side faces a second direction opposite to the first direction.

8. The method according to claim 6 , further comprising fixing the vacuum pump, on a side of the vacuum pump opposite to the intake port, to a structure joined to a base on which the electron beam application apparatus is installed, or fixing the rigid coupling member to the structure at the second end of the first vibration absorbing portion, or fixing the rigid coupling member to the structure at the second end of the second vibration absorbing portion.

9. A vacuum pump apparatus comprising:
a vacuum pump;
an evacuation connection portion for connecting an intake port of the vacuum pump to a lens barrel portion of an electron beam application apparatus;
a first vibration absorbing portion and a second vibration absorbing portion which are connected to the evacuation connection portion so as to lie opposite each other via the evacuation

Assignees

• Ebara Corp

Inventors

• Miyamoto Matsutaro

Classifications

• F04D29/605 Primary

  specially adapted for liquid pumps · CPC title

• Y10T29/49826

  Assembling or joining · CPC title

• F04D19/042

  Turbomolecular vacuum pumps · CPC title