Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
US-9742250-B2 · Aug 22, 2017 · US
US9966812B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9966812-B2 |
| Application number | US-201314775574-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 19, 2013 |
| Priority date | Mar 11, 2013 |
| Publication date | May 8, 2018 |
| Grant date | May 8, 2018 |
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A static vacuum shafting device for an integrated rotary transformer includes: a driving component, a vacuum sealing cover, a position detection component, a shafting base, a vacuum insulation sleeve, three O-shaped seal rings, a first rolling bearing, a second rolling bearing, a bearing gap ring, a transmission shaft, a shafting flange, a walking rolling bearing, and two bearing glands. The driving component includes a motor stator, a rotary transformer stator, a motor and rotary transformer integrated rotor, a rotor flange plate and a stator-fixing pressing block which are coaxially assembled. The vacuum sealing cover includes a sealing cover upper flange, a sealing cover, and a sealing cover lower flange. The shafting device couples a motor shaft to a load rigidly, thereby achieving a “zero-transmission” method and a “zero-leakage” sealed transmission of a shafting, and is particularly suitable for a power transmission of a vacuum robot in a high-vacuum environment.
Opening claim text (preview).
What is claimed is: 1. A static vacuum shafting device for an integrated rotary transformer, comprising: a driving component, a vacuum sealing cover, a position detection component, a shafting base ( 1 ), a vacuum insulation sleeve ( 4 ), a second O-shaped seal ring ( 5 ), a first O-shaped seal ring ( 6 ), a first rolling bearing ( 7 ), a second rolling bearing ( 10 ), a bearing gap ring ( 11 ), a transmission shaft ( 13 ), a shafting flange ( 14 ), a walking rolling bearing ( 15 ), a first bearing gland ( 16 ), a second bearing gland ( 17 ), and a third O-shaped seal ring ( 18 ); wherein: said driving component comprises a motor stator ( 2 ), a rotary transformer stator ( 3 ), a motor and rotary transformer integrated rotor ( 8 ), a rotor flange plate ( 9 ), and a stator-fixing pressing block ( 12 ) which are coaxially assembled, wherein: said motor and rotary transformer integrated rotor ( 8 ) and said rotor flange plate ( 9 ) are connected with screws; and said motor stator ( 2 ) and said rotary transformer stator ( 3 ) are fixed inside of said shafting base ( 1 ) by said stator-fixing pressing block ( 12 ), and work in close conjunction with said shafting base ( 1 ); said vacuum sealing cover comprises a sealing cover upper flange ( 22 ), a sealing cover ( 20 ), and a sealing cover lower flange ( 19 ), wherein: said sealing cover lower flange ( 19 ) is fixed on an upper end surface of said shafting base ( 1 ) with screws; said shafting base ( 1 ) has a second circular groove and said second O-shaped seal ring ( 5 ) is filled in said second circular groove; said sealing cover upper flange ( 22 ) is fixed to said shafting flange ( 14 ) of said transmission shaft ( 13 ) with screws; said sealing cover upper flange ( 22 ) has a third circular groove and said third O-shaped seal ring ( 18 ) is filled in said third circular groove; said sealing cover ( 20 ) is able to shrink up and down freely, cooperate with a driving mechanism which controls up and down movement, and drive said shafting base to move up and down; and a lower end surface of said transmission shaft ( 13 ) is fixed to said rotor flange plate ( 9 ) with screws, and an upper end surface of said transmission shaft ( 13 ) is extended to a vacuum environment; said upper end surface of said transmission shaft ( 13 ) has a groove for said walking rolling bearing ( 15 ), and said walking rolling bearing ( 15 ) is fixed to said upper end surface of said transmission shaft ( 13 ) by said first bearing gland ( 16 ); said upper end surface of said transmission shaft ( 13 ) is fixed to said shafting flange ( 14 ); said first rolling bearing ( 7 ) and said second rolling bearing ( 10 ) are provided between said rotor flange plate ( 9 ) and said shafting base ( 1 ); said bearing gap ring ( 11 ) is provided between said first rolling bearing ( 7 ) and said second rolling bearing ( 10 ); said second bearing gland ( 17 ) tightly presses said second rolling bearing ( 10 ) on said shafting base ( 1 ); an inner of said vacuum insulation sleeve ( 4 ) is a stepped hollow cover, and one end of said vacuum insulation sleeve ( 4 ) has a threaded hole and is fixed to said shafting base ( 1 ); said shafting base ( 1 ) has a first circular groove and said first O-shaped seal ring ( 6 ) is filled in said first circular groove; said motor stator ( 2 ) and said rotary transformer stator ( 3 ) both form gap with said motor and rotary transformer integrated rotor ( 8 ); said vacuum insulation sleeve ( 4 ) runs through said gap to isolate said motor and rotary transformer integrated rotor ( 8 ) from said motor stator ( 2 ) and said rotary transformer stator ( 3 ). 2. The static vacuum shafting device for the integrated rotary transformer, as recited in claim 1 , wherein middle parts of both sides of said motor stator ( 2 ) and said rotary transformer stator ( 3 ) are boss structure. 3. The static vacuum shafting device for the integrated rotary transformer, as recited in claim 1 , wherein: said gap between said motor stator ( 2 ) and said motor and rotary transformer integrated rotor ( 8 ) and said gap between said rotary transformer stator ( 3 ) and said motor and rotary transformer integrated rotor ( 8 ) are both 1.5 mm˜2.5 mm. 4. The static vacuum shafting device for the integrated rotary transformer, as recited in claim 3 , wherein: said gap between said motor stator ( 2 ) and said motor and rotary transformer integrated rotor ( 8 ) and said gap between said rotary transformer stator ( 3 ) and said motor and rotary transformer integrated rotor ( 8 ) are both 2 mm. 5. The static vacuum shafting device for the integrated rotary transformer, as recited in claim 1 , wherein: said motor and rotary transformer integrated rotor is hollow, for allowing wiring to run through a middle of a shafting. 6. The static vacuum shafting device for the integrated rotary transformer, as recited in claim 1 , wherein a magnet periphery of said motor and rotary transformer integrated rotor is covered with non-magnetic protective tube. 7. The static vacuum shafting device for the integrated rotary transformer, as recited in claim 1 , wherein said motor and rotary transformer integrated rotor has magnets fixed through gum and a positioning flange. 8. The static vacuum shafting device for the integrated rotary transformer, as recited in claim 1 , wherein all magnetic surfaces of said motor and rotary transformer integrated rotor, said motor stator, and said rotary transformer stator are covered with nickelage or galvanization. 9. The static vacuum shafting device for the integrated rotary transformer, as recited in claim 1 , wherein said vacuum insulation sleeve is made of non-magnetic materials. 10. The static vacuum shafting device for the integrated rotary transformer, as recited in claim 1 , wherein original and copy windings of said rotary transformer are both distributed at a stator side of said rotary transformer.
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