Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US9966534B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9966534-B2 |
| Application number | US-201314655237-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 23, 2013 |
| Priority date | Dec 24, 2012 |
| Publication date | May 8, 2018 |
| Grant date | May 8, 2018 |
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A copolymer comprising a repeat unit of Formula (I) and at least one further repeat unit: Formula (I) wherein: wherein: Ar 1 and Ar 2 are each independently selected from aryl and heteroaryl, each of which is independently unsubstituted or substituted with one or more substituents; each R is independently a substituent; each n is independently 0, 1 or 2; each m is independently 0, 1, 2 or 3, and at least one of the repeat units of the polymer is a partially conjugating repeat unit.
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The invention claimed is: 1. A copolymer comprising a repeat unit of Formula (I) and at least one further repeat unit: wherein: Ar 1 and Ar 2 are each independently aryl or heteroaryl, each of which is independently unsubstituted or substituted with one or more substituents; each R is independently a substituent; each n is independently 0, 1, or 2; each m is independently 0, 1, 2, or 3, and at least one of the repeat units of the polymer is a partially conjugating repeat unit; wherein at least one repeat unit of the polymer is substituted with a crosslinkable group. 2. The copolymer of claim 1 , wherein at least one of m and n is at least 1, and each R is independently selected from the group consisting of: C 1-20 alkyl wherein one or more non-adjacent C atoms may be replaced with O, S, NR 11 , C═O or COO; wherein R 11 is a substituent aryl or heteroaryl that may be unsubstituted or substituted with one or more substituents; a branched or linear chain of aryl or heteroaryl groups wherein each aryl or heteroaryl is independently unsubstituted or substituted with one or more substituents; and a crosslinkable-group. 3. The copolymer of claim 1 , wherein each R is independently a C 1-40 hydrocarbyl group. 4. The copolymer of claim 1 , wherein n=2. 5. The copolymer of claim 1 , wherein the repeat unit of formula (I) has Formula (II): wherein R 1 in each occurrence is a substituent; each y is independently 0, 1, 2, 3 or 4; and each z is independently 0, 1, 2, 3, 4 or 5. 6. The copolymer of claim 1 , wherein the repeat unit of formula (I) is a partially conjugating repeat unit. 7. The copolymer of claim 6 wherein the repeat unit of formula (I) has formula (XIV): wherein R, Ar 2 , n and m are as defined in claim 1 ; wherein R 1 in each occurrence is a substituent; y1 and y2 are each independently 0 or 1 with the proviso that at least one of y1 and y2 is 1; and each y3 is independently 0, 1 or 2. 8. The copolymer of claim 1 , wherein a further repeat unit is a partially conjugating repeat unit. 9. The copolymer of claim 8 , wherein the partially conjugating repeat unit is a repeat unit of formula (IIIa), (IIIb) or (IIIc): wherein p is 1, 2 or 3; q in each occurrence is independently 1, 2, 3 or 4; w is 0, 1, 2, 3 or 4; and R 3 independently in each occurrence is a substituent. 10. The copolymer of claim 8 wherein the partially conjugating further repeat unit is a repeat unit of formula (VIIb) or (VIIc): wherein R 3 and R 8 independently in each occurrence is a substituent. 11. The copolymer of claim 6 wherein the repeat unit of formula (I) is not a partially-conjugating repeat unit. 12. A formulation comprising the copolymer of claim 1 , and at least one solvent. 13. An organic light-emitting device comprising an anode, a cathode, a light-emitting layer between the anode and the cathode, and a hole transporting layer between the light emitting layer and the anode, wherein the hole transporting layer comprises a copolymer according to claim 1 . 14. The organic light-emitting device of claim 13 wherein the light-emitting layer comprises a fluorescent light-emitting material. 15. The organic light-emitting device of claim 13 wherein the light-emitting layer comprises a phosphorescent light-emitting material. 16. A method of forming an organic light-emitting device according to claim 13 comprising the steps of: forming the hole-transporting layer over the anode; forming the light-emitting layer over the hole-transporting layer; and forming the cathode over the light-emitting layer. 17. The method according to claim 16 wherein the hole-transporting layer is formed by depositing a formulation comprising a copolymer comprising a repeat unit of Formula (I) and at least one further repeat unit, and at least one solvent over the anode; and evaporating the at least one solvent: wherein: Ar 1 and Ar 2 are each independently selected from aryl and heteroaryl, each of which is independently unsubstituted or substituted with one or more substituents; each R is independently a substituent; each n is independently 0, 1 or 2; each m is independently 0, 1, 2 or 3; and a further repeat unit is a partially conjugating repeat unit. 18. The method according to claim 17 wherein the hole-transporting layer is crosslinked prior to formation of the light-emitting layer. 19. A copolymer comprising a repeat unit of Formula (XIV) and at least one further repeat unit: wherein: each Ar 2 is independently aryl or heteroaryl, each of which is independently unsubstituted or substituted with one or more substituents; each R is independently a substituent; each n is independently 0, 1 or 2; each m is independently 0, 1, 2 or 3; R 1 in each occurrence is a substituent; y1 and y2 are each independently 0 or 1 with the proviso that at least one of y1 and y2 is 1; and each y3 is independently 0, 1 or 2; wherein the repeat unit of formula (XIV) is a partially conjugating repeat unit. 20. A copolymer comprising a repeat unit of Formula (I) and at least one further repeat unit: wherein: Ar 1 and Ar 2 are each independently aryl or heteroaryl, each of which is independently unsubstituted or substituted with one or more substituents; each R is independently a substituent; each n is independently 0, 1 or 2; each m is independently 0, 1, 2 or 3, and at least one of the repeat units of the polymer is a partially conjugating repeat unit; wherein a further repeat unit is a partially conjugating repeat unit and is a repeat unit of formula (IIIa), (IIIb) or (IIIc): wherein p is 1, 2 or 3; q in each occurrence is independently 1, 2, 3 or 4; w is 0, 1, 2, 3 or 4; and R 3 independently in each occurrence is a substituent. 21. A method of forming an organic light-emitting device comprising an anode, a cathode, a light-emitting layer between the anode and the cathode, and a hole transporting layer between the light emitting layer and the anode, wherein the hole transporting layer comprises a copolymer comprising a repeat unit of Formula (I) and at least one further repeat unit: wherein: Ar 1 and Ar 2 are each independently aryl or heteroaryl, each of w
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