Ultrasonic probe, piezoelectric transducer, method of manufacturing ultrasonic probe, and method of manufacturing piezoelectric transducer

Patent metadata

Field	Value
Publication number	US-9966524-B2
Application number	US-201313975508-A
Country	US
Kind code	B2
Filing date	Aug 26, 2013
Priority date	Aug 28, 2012
Publication date	May 8, 2018
Grant date	May 8, 2018

Abstract

According to one embodiment, an ultrasonic probe includes a single crystal piezoelectric body with first and second planes facing each other and having a crystal orientation of [100], first and second electrodes on the respective first and second plane of the piezoelectric body, an acoustic matching layer on the first electrode, and a backing member under the second electrode, wherein the piezoelectric body is polarized along a first direction passing through the piezoelectric body and first and second electrodes, a fracture surface of the piezoelectric body that includes the first direction has a multilayer shape along one of the first and second electrodes, and a thickness of each layer of the multilayer shape is not less than 0.5 μm and not more than 5 μm.

First claim

What is claimed is:

1. An ultrasonic probe comprising:
a single crystal piezoelectric body including a first plane whose crystal orientation is [100] and a second plane which faces the first plane and whose crystal orientation is [100];
a first electrode on the first plane of the single crystal piezoelectric body and a second electrode on the second plane of the single crystal piezoelectric body;
an acoustic matching layer on the first electrode; and
a backing member under the second electrode,
wherein the single crystal piezoelectric body is polarized by alternating current and direct current along a first direction passing through the first electrode, the single crystal piezoelectric body and the second electrode,
the alternating current is applied by an AC electric field,
the direct current is applied by a DC electric field after application of the AC electric field,
a fracture surface obtained by fracturing the single crystal piezoelectric body with a section parallel to the first direction includes concave/convex domains along one of the first electrode and the second electrode,
alternating current polarization directions of adjacent concave/convex domains are different, and
a thickness of each of the concave/convex domains is not less than 0.5 μm and not more than 5 μm.

2. The probe of claim 1 , wherein the single crystal piezoelectric body comprises a lead complex perovskite compound.

3. The probe of claim 2 , wherein the lead complex perovskite compound contains at least one of magnesium oxide and indium oxide and niobium oxide.

4. The probe of claim 1 , wherein the thickness of the each of the concave/convex domain is not less than 0.5 μm and not more than 2 μm.

5. The probe of claim 2 , wherein the lead complex perovskite compound contains v mol % of lead zirconate, x mol % of lead indium niobate, y mol % of lead magnesium niobate, and z mol % of lead titanate, where v=0 to 0.15, x=0.24 to 0.74, y=0 to 0.50, z=0.26 to 0.33, v+x+y=0.67 to 0.74, and v+x+y+z=1, and
a phase transition temperature of a crystal structure of the lead complex perovskite compound is not less than 95° C. and not more than 150° C.

6. A piezoelectric transducer comprising:
a single crystal piezoelectric body comprising a lead complex perovskite compound containing at least one of magnesium oxide and indium oxide and niobium oxide and including a first plane whose crystal orientation is [100] and a second plane which faces the first plane and whose crystal orientation is [100]; and
a first electrode on the first plane of the single crystal piezoelectric body and a second electrode on the second plane of the single crystal piezoelectric body,
wherein the single crystal piezoelectric body is polarized by alternating current and direct current along a first direction passing through the first electrode, the single crystal piezoelectric body and the second electrode,
the alternating current is applied by an AC electric field,
the direct current is applied by a DC electric field after application of the AC electric field,
a fracture surface obtained by fracturing the single crystal piezoelectric body with a section parallel to the first direction includes concave/convex domains along one of the first electrode and the second electrode,
alternating current polarization directions of adjacent concave/convex domains are different, and
a thickness of each of the concave/convex domains is not less than 0.5 μm and not more than 5 μm.

Assignees

• Toshiba Medical Sys Corp

Inventors

• Yamamoto Noriko
• Yamashita Yohachi
• Hosono Yasuharu
• Itsumi Kazuhiro
• Higuchi Kazuhiko

Classifications

• Y10T29/42

  Piezoelectric device making · CPC title

• H01L41/25

  Electricity · mapped topic

• H01L41/187

  Electricity · mapped topic

• H01L41/257

  Electricity · mapped topic

• H01L41/338

  Electricity · mapped topic