Well Modulation for Defect Inspection
US-2024079278-A1 · Mar 7, 2024 · US
US9966378B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9966378-B2 |
| Application number | US-201615262574-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 12, 2016 |
| Priority date | Mar 28, 2012 |
| Publication date | May 8, 2018 |
| Grant date | May 8, 2018 |
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A method for forming an integrated circuit includes forming a deep n-well (DNW) in a substrate, and forming a PMOS transistor in the DNW. The method also includes forming an NMOS transistor in the substrate and outside the DNW, and forming a reverse-biased diode. The method further includes forming an electrical path between a drain of the PMOS transistor and a gate structure of the NMOS transistor. The dissipation device is also connected to the electrical path.
Opening claim text (preview).
What is claimed is: 1. An integrated circuit (IC) structure comprising: a deep n-well in a substrate; a first transistor in a p-well, wherein the first transistor is separated from the deep n-well; a second transistor directly above the deep n-well; a dissipation device in the p-well; and an electrical path between a gate of the first transistor and a drain of the second transistor, wherein the dissipation device is connected to the electrical path. 2. The IC structure of claim 1 , wherein the dissipation device is in the substrate between the first transistor and the second transistor. 3. The IC structure of claim 1 , further comprising a third transistor directly above the deep n-well, wherein a drain of the third transistor is connected to the electrical path. 4. The IC structure of claim 3 , wherein a gate of the third transistor is connected to a gate of the second transistor. 5. The IC structure of claim 1 , wherein the electrical path comprises: a first signal line connecting the gate of the first transistor to the dissipation device; and a second signal line connecting the gate of the first transistor to the drain of the second transistor, wherein the first signal line is on a different metal level from the first signal line. 6. The IC structure of claim 1 , further comprising a substrate pickup in the substrate, wherein the substrate pickup is configured to provide a discharge path from the dissipation device. 7. The IC structure of claim 6 , wherein the first transistor is physically between the dissipation device and the substrate pickup. 8. An integrated circuit (IC) structure comprising: a deep well in a substrate; a first transistor in a first well, wherein the first well is separated from the deep well; a second transistor in a second well, wherein the second well is directly above the deep well, and the second well is separated from the first well; a dissipation device in the substrate, wherein the dissipation device is physically between the first transistor and the second transistor; and an electrical path between a gate of the second transistor and a drain of the first transistor, wherein the dissipation device is connected to the electrical path. 9. The IC structure of claim 8 , wherein the dissipation device is in the first well. 10. The IC structure of claim 8 , wherein the dissipation device is in the second well. 11. The IC structure of claim 8 , further comprising a third transistor in a third well, wherein the third well is separated from the deep well. 12. The IC structure of claim 11 , wherein the third well contacts the second well. 13. The IC structure of claim 8 , wherein the first well has a same conductivity type as the second well. 14. The IC structure of claim 8 , wherein the first well has a different conductivity type from a conductivity type of the second well. 15. An integrated circuit (IC) structure comprising: a deep well in a substrate; a first transistor in a first well, wherein the first transistor is separated from the deep well; a second transistor directly above the deep well; a dissipation device in the first well, wherein the dissipation device is spaced from the first transistor; and an electrical path between a gate of the first transistor and a drain of the second transistor, wherein the dissipation device is connected to the electrical path, and the electrical path comprises: a first signal line connecting the gate of the first transistor to the dissipation device; and a second signal line connecting the gate of the first transistor to the drain of the second transistor, wherein the first signal line is on a different metal level from the first signal line. 16. The IC structure of claim 15 , further comprising a third transistor directly above the deep well. 17. The IC structure of claim 16 , further comprising a third signal line connecting the drain of the second transistor to a drain of the third transistor. 18. The IC structure of claim 17 , wherein the third signal line is on a same metal level as the first signal line. 19. The IC structure of claim 15 , further comprising a substrate pickup in the substrate, wherein the substrate pickup is configured to provide a discharge path from the dissipation device. 20. The IC structure of claim 19 , wherein the first transistor is physically between the dissipation device and the substrate pickup.
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