Method of fabricating conductive thin film

Patent metadata

Field	Value
Publication number	US-9966168-B1
Application number	US-201615391839-A
Country	US
Kind code	B1
Filing date	Dec 28, 2016
Priority date	Dec 28, 2016
Publication date	May 8, 2018
Grant date	May 8, 2018

Abstract

A method of fabricating a conductive thin film includes the following steps: forming a polymer fiber made of a polymer and a metal precursor distributed in a surface layer near the surface of the polymer fiber; and applying a plasma treatment on the polymer fiber to concurrently etch the polymer and reduce the metal precursor in the surface layer of the polymer fiber. When the plasma treatment is completed, a metal membrane is formed on the surface of the polymer fiber.

First claim

What is claimed is:

1. A method of fabricating a conductive thin film, comprising:
forming a polymer fiber, wherein a composition of the polymer fiber comprises a polymer and at least a metal precursor, the metal precursor is distributed in a surface layer of the polymer fiber; and
applying a plasma treatment on the polymer fiber to concurrently etch the polymer and reduce the metal precursor in the surface layer of the polymer fiber, whereby a metal membrane is formed on the surface of the polymer fiber.

2. The method of fabricating the conductive thin film of claim 1 , wherein the to step of forming the polymer fiber comprises:
forming an electrospun fiber; and
diffusing the metal precursor into the electrospun fiber.

3. The method of fabricating the conductive thin film of claim 1 , the method further comprising preparing a solution before the step of forming the polymer fiber, wherein a composition of the solution comprises the polymer, an organic solvent, and the metal precursor, and the step of forming the polymer fiber comprises:
elecrospinning the solution so as to form the polymer fiber on a substrate, wherein the metal precursor is distributed in the polymer fiber.

4. The method of fabricating the conductive thin film of claim 1 , wherein the polymer is a homopolymer or a copolymer, and the polymer comprises a acrylic polymer, a vinyl polymer, a polyester or a polyamide.

5. The method of fabricating the conductive thin film of claim 3 , wherein the metal precursor is a metal salt, a metal halide, a organic metal compound, or an metallic nanoparticle encapsulated in protection agents, a weight percent of the metal precursor in the solution ranging from 5 wt % to 25 wt % based on the total weight of the solution.

6. The method of fabricating the conductive thin film of claim 3 , wherein an electric field applied to the solution ranges from 0.2 kV/cm to 6 kV/cm during the step of electrospinning the solution.

7. The method of fabricating the conductive thin film of claim 3 , wherein segments of the polymer fiber are stacked over one another to constitute a fibrous web structure, and the method of fabricating the conductive thin film further comprises:
applying a pressing process to the fibrous web structure before the step of applying the plasma treatment so as to enlarge a contact area between the segments of the polymer fiber.

8. The method of fabricating the conductive thin film of claim 3 , wherein the method further comprises removing the organic solvent remaining in the polymer fiber before the step of applying the plasma treatment.

9. The method of fabricating the conductive thin film of claim 1 , wherein a ratio of an etch rate of the metal membrane to an etch rate of the polymer is between 0˜0.01 during the step of applying the plasma treatment.

10. The method of fabricating the conductive thin film of claim 1 , wherein the plasma treatment comprises an inert gas plasma treatment, an air plasma treatment, an oxygen plasma, and/or a hydrogen plasma treatment.

11. The method of fabricating the conductive thin film of claim 1 , wherein the surface layer of the polymer fiber is surrounded by the metal membrane when the plasma treatment is completed, and the polymer fiber and the metal membrane constitute a core-sheath structure.

12. The method of fabricating the conductive thin film of claim 1 , wherein the method further comprises removing the metal precursor remaining in the polymer fiber after the step of applying the plasma treatment.

13. The method of fabricating the conductive thin film of claim 3 , wherein the polymer is poly(methyl methacrylate), the organic solvent is a mixture of butanone and methanol, the metal precursor is silver trifluoroacetate, a weight percent of poly(methyl methacrylate) in the solution ranges from 10˜20 wt % based on the total weight of the solution, and a weight ratio of silver trifluoroacetate to poly(methyl methacrylate) is 0.2˜1.5.

14. The method of fabricating the conductive thin film of claim 3 , wherein the polymer is polyethylene terephthalate, the organic solvent is a mixture of trifluoroacetic acid and dichloromethane, the metal precursor is silver trifluoroacetate, a weight percent of polyethylene terephthalate in the solution ranges from 5˜20 wt % based on the total weight of the solution, and a weight ratio of silver trifluoroacetate to polyethylene terephthalate is 0.2˜1.5.

15. The method of fabricating the conductive thin film of claim 1 , wherein segments of the polymer fiber are stacked over one another to constitute a fibrous web structure, and the method of fabricating the conductive thin film further comprises:
forming a patterned mask covering the surface of the fibrous web structure before applying the plasma treatment; and
removing the patterned mask after applying the plasma treatment.

16. The method of fabricating the conductive thin film of claim 15 , wherein the patterned mask comprises a feature pattern, and the fibrous web structure comprises a conductive pattern when the plasma treatment is completed, the arrangement of the feature pattern is identical to the arrangement of the conductive pattern.

17. The method of fabricating the conductive thin film of claim 1 , wherein segments of the polymer fiber are stacked over one another to constitute a fibrous web structure, and the method of fabricating the conductive thin film further comprises:
forming a patterned fibrous web structure by pattering the fibrous web structure during the step of applying plasma treatment, the patterned fibrous web structure comprises a treated region and an untreated region, wherein the treated region is a conductive region, and the untreated region is a non-conductive region.

18. The method of fabricating the conductive thin film of claim 1 , wherein the step of forming the polymer fiber comprises:
providing a patterned mask having at least a hole; and
forming the polymer fiber in the hole.

19. The method of fabricating the conductive thin film of claim 3 , wherein the step of electrospinning the solution is a coaxial electrospinning process, and the method of fabricating the conductive thin film further comprises:
preparing a polymer solution, wherein a composition of the polymer solution comprises a further polymer;
performing the coaxial electrospinning process by using the solution and the polymer solution so as to form the polymer fiber on the substrate, wherein the polymer fiber comprises a core and a sheath, a composition of the core comprises the further polymer, and a composition of the sheath comprises the polymer and the metal precursor; and
applying the plasma treatment process to form the metal membrane surrounding the core.

20. The method of fabricating the conductive thin film of claim 1 , wherein the step of forming the polymer fiber comprises an electrospinning process, an electrospray process, a melt blown process, a flash spinning process or an electrostatic melt blown process.

Assignees

• Univ Nat Cheng Kung

Inventors

• Kuo Chang-Shu
• Chen In-Gann
• Chen Hung-Tao
• Cheng Han-Hsuan

Classifications

• B22F1/0547

  Nanofibres or nanotubes · CPC title

• B22F1/18

  Non-metallic particles coated with metal · CPC title

• B22F1/062

  Fibrous particles · CPC title

• D04H1/728

  by electro-spinning {(electro-spinning methods and apparatus D01D5/0007)} · CPC title

• D06M11/01

  with hydrogen, water or heavy water; with hydrides of metals or complexes thereof; with boranes, diboranes, silanes, disilanes, phosphines, diphosphines, stibines, distibines, arsines, or diarsines or complexes thereof · CPC title