Optical system with aperture device having plurality of aperture elements

Patent metadata

Field	Value
Publication number	US-9964673-B2
Application number	US-201113021583-A
Country	US
Kind code	B2
Filing date	Feb 4, 2011
Priority date	Feb 9, 2010
Publication date	May 8, 2018
Grant date	May 8, 2018

Abstract

An optical system has an aperture device having a multiplicity of aperture elements for the delimitation of the cross section of a ray bundle running through the optical system. The aperture device has a first aperture element, which is pivotable about a first rotation axis between an engagement position in the beam path of the optical system and a neutral position outside the beam path of the optical system and has a first aperture opening delimited by a first aperture edge. The aperture device also has at least one second aperture element, which is pivotable about a second rotation axis between an engagement position in the beam path of the optical system and a neutral position outside the beam path of the optical system and has a second aperture opening delimited by a second aperture edge. The second aperture opening is smaller than the first aperture opening. The aperture elements pivoted into the engagement position form an effective aperture opening. The aperture edges of aperture elements pivoted into the engagement position do not lie in a common plane.

First claim

The invention claimed is:

1. An optical system, comprising:
an aperture device configured so that, when a ray bundle passes through the optical system along a beam path, the aperture device can variably delimit a cross section of the ray bundle, the aperture device comprising:
a first aperture element pivotable about a first rotation axis between an engagement position in the beam path and a neutral position outside the beam path, the first aperture element having a first aperture opening delimited by an end of a first aperture edge; and
a second aperture element pivotable about a second rotation axis between an engagement position in the beam path and a neutral position outside the beam path, the second aperture element having a second aperture opening delimited by an end of a second aperture edge,

wherein:
the second aperture opening is smaller than the first aperture opening, and
when the first aperture element is in its engagement position and the second aperture element is in its engagement position:
the first and second aperture elements form an effective aperture opening, and
the entire end of the first aperture edge is offset from the entire end of the second aperture edge in a direction parallel to an optical axis of the optical system by an amount greater than a thickness of the first aperture element.

2. An optical system, comprising:
an aperture device configured so that, when a ray bundle passes through the optical system along a beam path, the aperture device can variably delimit a cross section of the ray bundle, the aperture device comprising:
a first aperture element pivotable about a first rotation axis between an engagement position in the beam path and a neutral position outside the beam path, the first aperture element having a first aperture opening delimited by an end of a first aperture edge; and
a second aperture element pivotable about a second rotation axis between an engagement position in the beam path and a neutral position outside the beam path, the second aperture element having a second aperture opening delimited by an end of a second aperture edge,

wherein:
the second aperture opening is smaller than the first aperture opening,
when the first aperture element is in its engagement position and the second aperture element is in its engagement position:
the first and second aperture elements form an effective aperture opening,
the entire end of the first aperture edge defines a first aperture plane,
the entire end of the second aperture edge defines a second aperture plane,
the first aperture plane is parallel to the second aperture plane, and
the first aperture plane is offset from the second aperture plane.

3. The optical system of claim 2 , wherein the first aperture plane is perpendicular to an optical axis of the optical system.

Assignees

• Sigel Benjamin
• Bleidistel Sascha
• Zeiss Carl Smt Gmbh

Inventors

• Sigel Benjamin
• Bleidistel Sascha

Classifications

• G03F7/7025

  Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof · CPC title

• G02B5/005 Primary

  Diaphragms (for cameras G03B9/02) · CPC title

• G03F7/70091

  Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA] · CPC title