Heat-resistant adhesive sheet for semiconductor testing

Patent metadata

Field	Value
Publication number	US-9963622-B2
Application number	US-201414895546-A
Country	US
Kind code	B2
Filing date	Jun 10, 2014
Priority date	Jun 14, 2013
Publication date	May 8, 2018
Grant date	May 8, 2018

Abstract

A heat-resistant adhesive sheet for semiconductor testing, used in a performance test while semiconductor chips are heated includes: a base material; and an adhesive layer provided on the base material, the base material having a thermal shrinkage of lower than 1% when being heated at 150 degrees Celsius for 30 minutes and a linear expansion coefficient of equal to or lower than 5.0×10 −5 at 60 to 150 degrees Celsius, and the adhesive layer containing a (meth)acrylic acid ester copolymer, a photopolymerizable compound, a polyfunctional isocyanate curing agent, and photoinitiator. The adhesive layer contains 5 to 200 parts by mass of the photopolymerizable compound, 0.5 to 20 parts by mass of the polyfunctional isocyanate curing agent, and 0.1 to 20 parts by mass of the photoinitiator, with respect to 100 parts by mass of the(meth)acrylic acid ester copolymer. The adhesive layer is free of tackifying resin.

First claim

The invention claimed is:

1. A heat-resistant adhesive sheet for semiconductor testing, used in a performance test white semiconductor chips are heated, the heat resistant adhesive sheet comprising:
a base material; and
an adhesive layer provided on the base material,
the base material having a thermal shrinkage of lower than 1% when being heated at 150 degrees Celsius for 30 minutes and a linear expansion coefficient of equal to or lower than 5.0×10 −5 at 60 to 150 degrees Celsius, and
the adhesive layer containing a (meth)acrylic acid ester copolymer, a photopolymerizable compound, a polyfunctional isocyanate curing agent, and photoinitiator, wherein:
the adhesive layer contains 5 to 200 parts by mass of the photopolymerizable compound, 0.5 to 20 parts by mass of the polyfunctional isocyanate curing agent, and 0.1 to 20 parts by mass of the photoinitiator, with respect to 100 parts by mass of the (meth)acrylic acid ester copolymer;
the adhesive layer is free of tackifying resin; and
the heat-resistant adhesive sheet is used in a method of manufacturing a semiconductor, the method comprising:
(a) a bonding step of bonding the adhesive sheet to the semiconductor chips;
(b) a placing step of placing the semiconductor chips to which the adhesive sheet is bonded on a stage while the adhesive sheet contacts the stage;
(c) a test step of testing performance of the semiconductor chips while the adhesive sheet on the stage is heated at 60 to 150 degrees Celsius; and
(d) a UV irradiation step of irradiating the adhesive sheet with ultraviolet light; and
(e) a pick-up step of picking up the semiconductor chips from the adhesive sheet.

2. The heat-resistant adhesive sheet according to claim 1 , wherein the adhesive layer contains a silicone-based graft copolymer.

3. The heat-resistant adhesive sheet according to claim 1 , wherein the polyfunctional isocyanate curing agent contains three or more isocyanate groups.

4. The heat-resistant adhesive sheet according to claim 1 , wherein when a temperature of the photoinitiator is increased from 23 degrees Celsius to 500 degrees Celsius at a rate of 10 degrees Celsius/min, the photoinitiator has a mass reduction rate of 10% at a temperature equal to or higher than 250 degrees Celsius.

5. A heat-resistant adhesive sheet for semiconductor testing, used in a performance test while semiconductor chips are heated, the heat resistant adhesive sheet comprising:
a base material; and
an adhesive layer provided on the base material,
the base material having a thermal shrinkage of lower than 1% when being heated at 150 degrees Celsius for 30 minutes and a linear expansion coefficient of equal to or lower than 5.0×10 −5 at 60 to 150 degrees Celsius and
the adhesive layer containing a (meth)acrylic acid ester copolymer, a photopolymerizable compound, a polyfunctional isocyanate curing agent, and photoinitiator, wherein:
the adhesive layer contains 5 to 200 parts by mass of the photopolymerizable compound, 0.5 to 20 its by mass of the polyfunctional isocyanate curing agent, and 0.1 to 20 parts by mass of the photoinitiator, with respect to 100 parts by mass of the (meth)acrylic acid ester copolymer;
the adhesive layer is free of tackifying resin; and
the heat-resistant adhesive sheet is used for a method of manufacturing a semiconductor, the method comprising:
(a) a bonding step of bonding the adhesive sheet to a semiconductor wafer or a semiconductor substrate;
(b) a dicing step of dicing the semiconductor wafer to which the adhesive sheet is bonded or the semiconductor substrate to which the adhesive sheet is bonded into semiconductor chips;
(c) a placing step of placing the semiconductor chips to which the adhesive sheet is bonded on a stage while the adhesive sheet contacts the stage;
(d) a test step of testing performance of the semiconductor chips while the adhesive sheet on the stage is heated at 60 to 150 degrees Celsius;
(e) a UV irradiation step of irradiating the adhesive sheet with ultraviolet light; and
(f) a pick-up step of picking up the semiconductor chips from the adhesive sheet.

6. The heat-resistant adhesive sheet according to claim 5 , wherein the adhesive layer contains a silicone-based graft copolymer.

7. The heat-resistant adhesive sheet according to claim 5 , wherein the polyfunctional isocyanate curing agent contains three or more isocyanate groups.

8. The heat-resistant adhesive sheet according to claim 5 , wherein when a temperature of the photoinitiator is increased from 23 degrees Celsius to 500 degrees Celsius at a rate of 10 degrees Celsius/min, the photoinitiator has a mass reduction rate of 10% at a temperature equal to or higher than 250 degrees Celsius.

Assignees

• Denka Company Ltd

Inventors

• Nakajima Gosuke
• TSUKUI Tomoya

Classifications

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/7402

  Wafer tapes, e.g. grinding or dicing support tapes · CPC title

• C08L75/14

  Polyurethanes having carbon-to-carbon unsaturated bonds · CPC title

• C09J183/10

  Block or graft copolymers containing polysiloxane sequences (obtained by polymerising a compound having a carbon-to-carbon double bond on to a polysiloxane C09J151/08, C09J153/00) · CPC title

• C09J175/16

  having terminal carbon-to-carbon unsaturated bonds · CPC title