Guided transport path correction

Patent metadata

Field	Value
Publication number	US-9961783-B2
Application number	US-201715642188-A
Country	US
Kind code	B2
Filing date	Jul 5, 2017
Priority date	Jul 8, 2016
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

A printer deposits material onto a substrate as part of a manufacturing process for an electronic product; at least one transported component experiences error, which affects the deposition. This error is mitigated using transducers that equalize position of the component, e.g., to provide an “ideal” conveyance path, thereby permitting precise droplet placement notwithstanding the error. In one embodiment, an optical guide (e.g., using a laser) is used to define a desired path; sensors mounted to the component dynamically detect deviation from this path, with this deviation then being used to drive the transducers to immediately counteract the deviation. This error correction scheme can be applied to correct for more than type of transport error, for example, to correct for error in a substrate transport path, a printhead transport path and/or split-axis transport non-orthogonality.

First claim

We claim:

1. An apparatus for fabricating a layer of an electronic product, comprising:
a printhead to deposit a material onto a substrate, the material to form the layer;
a conveyance system to transport at least one of the substrate and the printhead during deposition of the material;
a component of the conveyance system to be advanced along a transport path;
an optical system comprising an optical beam directed parallel to the transport path and a detector to detect the optical beam, the optical system configured such that a deviation of the component in at least one dimension independent to the direction of the optical beam is detected by the detector; and
at least one transducer to be driven so as to displace the component in a direction orthogonal to the transport path as a function of said deviation.

2. The apparatus of claim 1 , wherein advancement of the component is characterized by mechanical imperfections that create at least one error of translational error and rotational error affecting the deposition of the material on the substrate, and wherein the at least one transducer is to be driven to equalize said at least one error.

3. The apparatus of claim 1 , wherein the component is to transport the printhead, the at least one transducer to be driven as a function of said deviation such that the printhead travels parallel to the optical beam.

4. The apparatus of claim 1 , wherein the component is part of a gripper system that is to transport the substrate along the transport path, the at least one transducer to be driven as a function of said deviation such that the substrate travels parallel to the optical beam.

5. The apparatus of claim 4 , wherein:
the conveyance system is a first conveyance system, the transport path is a first transport path, the optical system is a first optical system, the component is a first component and the at least one transducer is part of a first transducer set; and
said apparatus also comprises
a second conveyance system to transport a second component along a second transport path, the second component mounting the printhead, a second optical system comprising a second optical beam directed parallel to the second transport path and a second detector to detect the second optical beam, configured such that a deviation of the printhead in at least one dimension independent to the direction of the second optical beam is detected by the second detector, and
a second transducer set comprising at least one transducer which operatively couples the second transport path and the printhead, the second transducer set to be driven as a function of said deviation of the printhead in the at least one dimension independent to the direction of the second optical beam.

6. The apparatus of claim 1 , wherein:
the detector is configured to detect said deviation of the component in at least two degrees of freedom independent to the direction of the optical beam; and
wherein the at least one transducer comprises at least two transducer sets, each of the at least two transducer sets to be driven as a function of a deviation of the component in a corresponding one of the at least two degrees of freedom, so as to equalize said deviation in the corresponding one of the at least two degrees of freedom.

7. The apparatus of claim 2 , wherein the detector comprises a four-cell sensor, the at least two degrees of freedom comprising motion in two independent dimensions which are each orthogonal to the direction of the optical beam.

8. The apparatus of claim 1 , wherein the detector comprises at least two sensors, each sensor of the at least two sensors to detect the deviation of the component in a common dimension independent to the direction of the optical beam, wherein the at least two sensors are configured to detect rotation of the component relative to the direction of the optical beam as a function of a difference between a deviation detected by each sensor of the at least two sensors along the common dimension.

9. The apparatus of claim 1 , wherein the component comprises a vacuum gripper that is to selectively engage the substrate using a vacuum, the vacuum gripper to transport the substrate along the transport path.

10. The apparatus of claim 1 , wherein the optical system comprises a laser source, wherein the optical beam comprises a laser beam, and wherein the component mounts at least one of the laser source, the detector and beam redirection optics, in a manner such that motion of the component in a direction orthogonal to the direction of the optical beam is detected by the detector.

11. The apparatus of claim 1 , wherein:
the conveyance system is a first conveyance system and is to transport the substrate;
the transport path is a first transport path and the optical system is a first optical system; and
said apparatus also comprises
a second component associated with the second conveyance system, to transport the printhead along a second transport path during the deposition of the material, and a second optical system comprising a second optical beam directed parallel to the second transport path and a second detector to detect the second optical beam, the second optical system configured such that a deviation of the second component in at least one dimension independent to the direction of the second optical beam is detected by the second detector, and
means for identifying non-orthogonality between the first transport path and the second transport path.

12. The apparatus of claim 1 , wherein the at least one transducer comprises at least three transducers operatively coupling the transport path and the component, the at least three transducers to be driven as a function of said deviation so as to levelize the component as it is advanced along the transport path.

13. The apparatus of claim 1 , wherein the at least one transducer comprises at least two transducers, each of the at least two transducers to selectively displace the component in a common direction orthogonal to the direction of the optical beam, the at least two transducers to be driven in a common mode to displace the component in the common direction, the at least two transducers to be driven in a differential mode to rotate the component relative to the common direction.

14. The apparatus of claim 13 , wherein each transducer of the at least one transducer comprises at least one of a voice coil, a linear actuator and a piezoelectric transducer.

15. The apparatus of claim 13 , wherein:
the component is a second component;
the conveyance system comprises a gripper, the gripper comprising a first component that is constrained to travel the transport path and the second component; and
the gripper also comprises a mechanical structure operatively coupling the first component with the second component, the mechanical structure constraining the second component to travel with the first component along the transport path while permitting the at least one transducer to displace the second component from the first component in the at least one dimension, so as to equalize said deviation.

16. The apparatus of claim 15 , wherein the at least one transducer comprises at least two transducers, each of the at least two transducers to selectively displace the component in a common direction orthogonal to the direction of the optical beam, wherein the mechanical structure is configured to provide a mechanical pivot point that is also displaced in the common direction as a function of actuation of the at least two transducers, and wherein the at least two transducers are to be driven in the common mode to disp

Assignees

• Kateeva Inc

Inventors

• Vronsky Eliyahu
• Mathia Karl
• Ko Alexander Sou-Kang

Classifications

• H10P72/3314 Primary

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/70

  for supporting or gripping · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/36

  using air tracks · CPC title