Method for cutting a carrier for electrical components

Patent metadata

Field	Value
Publication number	US-9961777-B2
Application number	US-201214112233-A
Country	US
Kind code	B2
Filing date	Apr 17, 2012
Priority date	Apr 20, 2011
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

A trench ( 20 ) is introduced into a carrier ( 10 ) for electrical components ( 30 ) on a first surface (O 10 a ) of the carrier into the material of the carrier ( 10 ). The carrier ( 10 ) is cut through by a cut ( 60 ) being introduced into the material of the carrier from a second surface (O 10 b ) of the carrier ( 10 ), said second surface being situated opposite the first surface. The cut is implemented in such a way that the cut ( 60 ) runs through the trench ( 20 ) on the first surface (O 10 a ) of the carrier. By providing a trench ( 20 ) in the material layers of the carrier ( 10 ) which are near the surface, it is possible to prevent material from breaking out of the carrier during the singulation of devices ( 1, 2 ).

First claim

What is claimed is:

1. A method for cutting a carrier for electrical components, comprising the steps of:
providing a carrier for electrical components, wherein the electrical components are arranged on a first surface of the carrier and contact terminals are arranged on a second surface of the carrier, the second surface being situated opposite to the first surface;
applying a film onto the second surface of the carrier such that the contact terminals penetrate into a material of the film;
producing a trench in a material of the carrier on the first surface, wherein the carrier is fixed on the film while the trench is produced;
arranging the film on the first surface of the carrier such that the film is applied onto a surface of the electrical components; and
dicing the carrier for separating the electrical components by producing a cut in the material of the carrier from the second surface of the carrier while the film is arranged on the first surface of the carrier and onto the surface of the electrical components, wherein the cut is produced in such a way that it extends through the trench on the first surface of the carrier, and wherein the trench is produced in the material of the carrier with a width that is greater than the width of the cut.

2. The method according claim 1 , wherein the cut is produced in the material of the carrier with a cutting apparatus,
wherein the cutting apparatus is placed onto the second surface of the carrier with a positioning accuracy which lies between +/−5 μm, and
wherein the width of the trench corresponds to the width of the cutting apparatus plus the positioning accuracy with which the cutting apparatus is placed onto the second surface of the carrier.

3. The method according to claim 2 , wherein a saw blade is used as the cutting apparatus, and
wherein the width of the saw blade of the cutting apparatus is chosen in such a way that the cut has a width between 10 μm and 50 μm.

4. The method according claim 3 , wherein the trench is produced in the material of the carrier with an additional cutting apparatus that features a saw blade, and
wherein the width of the saw blade of the additional cutting apparatus is chosen in such a way that the trench is produced in the material of the carrier with a width between 15 μm and 80 μm.

5. The method according to claim 4 , wherein the width of the saw blade of the additional cutting apparatus is chosen in such a way that the trench is produced in the material of the carrier with a width of 40 μm.

6. The method according to claim 3 , wherein the cut has a width of 30 μm.

7. The method according to claim 1 , wherein the trench is produced in the material of the carrier with a depth in excess of 10 μm.

8. The method according to claim 7 , wherein the trench is produced in the material of the carrier with a depth in excess of 20 μm.

9. The method according to claim 1 , further comprising the step of:
mounting the electrical components on the first surface of the carrier.

10. The method according to claim 1 , further comprising the step of:
mounting contact terminals on the second surface of the carrier.

11. The method according to claim 1 , wherein the trench is produced in the material of the carrier by means of an etching method, or by means of a mechanical processing method.

12. The method according to claim 11 , wherein the trench is produced in the material of the carrier by means of dry etching, or by means of sawing.

13. The method according to claim 1 , wherein the carrier is realized in the form of a wafer.

14. The method according to claim 13 , wherein the carrier is realized in the form of a silicon material.

Assignees

• Stering Bernhard
• Ams Ag

Inventors

• Stering Bernhard

Classifications

• H10W72/0198

  batch processes · CPC title

• H10W72/072

  of bump connectors · CPC title

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W72/252

  comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu · CPC title

• H10W74/014

  using batch processing · CPC title