MEMS Device and Method for Manufacturing the MEMS Device
US-2015381078-A1 · Dec 31, 2015 · US
US9961447B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9961447-B2 |
| Application number | US-201013380428-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 23, 2010 |
| Priority date | Jun 26, 2009 |
| Publication date | May 1, 2018 |
| Grant date | May 1, 2018 |
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A speaker comprises a permanent magnet ( 2 ) and a coil ( 8 ) positioned around the permanent magnet ( 2 ) and attached to a membrane ( 10 ), wherein the membrane comprises an elastomer of thickness less than 0.3 mm and with a Young's modulus below 100 MPa.
Opening claim text (preview).
The invention claimed is: 1. A speaker comprising a permanent magnet, and a coil positioned around the permanent magnet and attached to a membrane, wherein the membrane is a single layer monolithic structure formed from an elastomer of thickness less than 0.3 mm and with a Young's modulus below 100 MPa. 2. A speaker as claimed in claim 1 , wherein the elastomer comprises a silicone. 3. A speaker as claimed in claim 1 , wherein the membrane is injection moulded. 4. A speaker as claimed in claim 1 , wherein the membrane comprises a flat central region and a supporting edge region, and wherein the speaker further comprises a stiffening element on the flat central region on the opposite side of the membrane to the coil. 5. A speaker as claimed in claim 1 , further comprising a support structure which defines a back volume, wherein the back volume is less than 1 cm 3 . 6. A speaker as claimed in claim 5 , wherein the back volume is less than 0.5 cm 3 . 7. A speaker as claimed in claim 1 , wherein the resonant frequency is below 300 Hz. 8. A speaker as claimed in claim 7 , wherein the resonant frequency is below 250 Hz. 9. The speaker of claim 1 , wherein the membrane is formed from an elastomer having a Young's modulus below 50 MPa. 10. The speaker of claim 1 , wherein the membrane is formed from an elastomer having a Young's modulus below 12 MPa. 11. The speaker of claim 1 , wherein the membrane is formed from an elastomer having a Young's modulus below 10 MPa. 12. A method of manufacturing a speaker, comprising: forming a membrane from an elastomer, wherein the membrane is a single layer monolithic structure and has thickness less than 0.3 mm and a Young's modulus below 100 MPa; attaching a coil to the membrane; and assembling the speaker by suspending the membrane, such that the coil is positioned around a permanent magnet. 13. A method as claimed in claim 12 , wherein the elastomer comprises silicone. 14. A method as claimed in claim 12 , wherein the membrane is formed using injection moulding. 15. A method as claimed in claim 12 , wherein the membrane is formed with a flat central region and a supporting edge region, and wherein the method further comprises providing a stiffening element on the flat central region on the opposite side of the membrane to the coil. 16. A micro speaker comprising: a body portion comprising a frame and a lid, the lid having an opening; a magnetic circuit comprising a yoke, a permanent magnet contained within the yoke, and an upper plate attached to an upper surface of the permanent magnet; and a vibration system, comprising: a voice coil fitted into a gap between the permanent magnet and an inner surface of the yoke; and a speaker membrane attached to the voice coil and affixed to the frame, the speaker membrane formed from a single layer elastomer having a thickness less than 0.3 mm and a Young's modulus below 100 MPa.
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