Systems and methods for graphene mechanical oscillators with tunable frequencies

Patent metadata

Field	Value
Publication number	US-9960734-B2
Application number	US-201414522534-A
Country	US
Kind code	B2
Filing date	Oct 23, 2014
Priority date	Oct 23, 2013
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

A nano-electro-mechanical systems (NEMS) oscillator can include an insulating substrate, a source electrode and a drain electrode, a metal local gate electrode, and a micron-sized, atomically thin graphene resonator. The source electrode and drain electrode can be disposed on the insulating substrate. The metal local gate electrode can be disposed on the insulating substrate. The graphene resonator can be suspended over the metal local gate electrode and define a vacuum gap between the graphene resonator and the metal local gate electrode.

First claim

The invention claimed is:

1. A nano-electro-mechanical systems (NEMS) oscillator, comprising:
an insulating substrate;
a source electrode and a drain electrode disposed on the substrate;
a metal local gate electrode disposed on the substrate; and
a micron-size, atomically thin graphene resonator suspended over the metal local gate electrode and defining a vacuum gap between the graphene resonator and the metal local gate electrode;
wherein a degree of tunability depends on an initial built in tension of the graphene resonator.

2. The NEMS oscillator of claim 1 , wherein the graphene resonator comprises a suspended strip of chemical vapor deposited (CVD) graphene.

3. The NEMS oscillator of claim 1 , further comprising a clamping structure for suspending the graphene resonator.

4. The NEMS oscillator of claim 3 , wherein the clamping structure comprises SU-8 epoxy photoresist.

5. The NEMS oscillator of claim 3 , wherein the clamping structure defines a circular graphene drum having a diameter of about 2-4 μm.

6. The NEMS oscillator of claim 1 , further comprising a clamping structure comprising SU-8 epoxy photoresist for suspending the graphene resonator and wherein the graphene resonator comprises a suspended strip of CVD graphene.

7. The NEMS oscillator of claim 1 , further comprising a tuner for electrostatically tuning an operating frequency of the NEMS oscillator.

8. The NEMS oscillator of claim 7 , wherein the frequencies can be electrostatically tuned up to about 400%.

9. The NEMS oscillator of claim 1 , wherein the vacuum gap is between about 50 and 200 nm.

10. The NEMS oscillator of claim 1 , wherein the substrate comprises high-resistivity silicon.

11. The NEMS oscillator of claim 1 , further comprising a variable gain amplifier and a tunable phase shifter.

12. A frequency modulated (FM) signal generator comprising:
a nano-electro-mechanical systems (NEMS) oscillator including
a substrate;
a source electrode and a drain electrode disposed on the substrate;
a metal local gate electrode disposed on the substrate; and
a micron-size, atomically thin graphene resonator suspended over the metal local gate electrode and defining a vacuum gap between the graphene resonator and the metal local gate electrode;
wherein a degree of tunability depends on an initial built in tension of the graphene resonator.

13. A method for fabricating a NEMS oscillator, comprising:
growing a micron-sized, atomically thin CVD graphene on one or more copper foil substrates;
transferring the CVD graphene to a pre-patterned substrate;
patterning a source electrode, a drain electrode, and a clamping structure; and releasing the graphene;
wherein a degree of tunability depends on an initial built in tension of the graphene.

14. The method of claim 13 , wherein the pre-patterned substrate comprises high-resistivity silicon.

15. The method of claim 14 , wherein the pre-patterned substrate comprises electrodes disposed beneath plasma-enhanced chemical vapor deposition (PECVD) oxide and wherein the method further comprises planarizing the PECVD oxide with chemical mechanical polishing (CMP).

16. The method of claim 15 , wherein the CMP promotes adhesion between the CVD graphene and the substrate.

17. The method of claim 13 , wherein patterning further comprises utilizing electron beam lithography.

18. The method of claim 13 , wherein the clamping structure comprises SU-8epoxy photoresist.

19. The method of claim 13 , wherein releasing the graphene further comprises placing the NEMS oscillator into buffered oxide etchant (BOE).

20. The method of claim 13 , wherein releasing the graphene further comprises forming a vacuum gap defined between the graphene and a gate electrode.

21. The method of claim 13 , wherein the method comprises a fabrication yield of about 70% or greater for the graphene.

Assignees

• Univ Columbia

Inventors

• Chen Changyao
• Hone James
• Lee Sunwoo

Classifications

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• H03H9/17

  having a single resonator (crystal tuning forks H03H9/21) · CPC title

• H03H9/02244

  of microelectro-mechanical resonators · CPC title

• H03H9/02433

  Means for compensation or elimination of undesired effects · CPC title

• G01J5/44

  using change of resonant frequency, e.g. of piezoelectric crystals · CPC title