Pressure sensor

Patent metadata

Field	Value
Publication number	US-9958349-B2
Application number	US-201615085592-A
Country	US
Kind code	B2
Filing date	Mar 30, 2016
Priority date	Apr 2, 2015
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.

First claim

The invention claimed is:

1. A pressure sensor, comprising
a deformable membrane deflecting in response to pressure applied,
a first stationary electrode and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied,
wherein the first stationary electrode comprises a getter material for collecting gas molecules wherein the first stationary electrode comprising the getter material comprises a first layer and a second layer, wherein the first layer comprises conducting material that is different from the getter material, and wherein the second layer is deposited on the first layer, and wherein the second layer faces a volume to collect the gas molecules from.

2. The pressure sensor of claim 1 , wherein the getter material is a non-evaporable metal or a non-evaporable alloy.

3. The pressure sensor of claim 1 , wherein the getter material is selected from a group consisting of titanium, platinum and zirconium.

4. The pressure sensor of claim 1 , wherein the second layer has the shape of a cap encapsulating the first layer such that the first layer is disconnected from the volume to collect the gas molecules from.

5. The pressure sensor of claim 1 , wherein the first stationary electrode comprising the getter material has a plane extension and comprises slots in the getter material orthogonal to the plane extension.

6. The pressure sensor of claim 1 , wherein the first stationary electrode comprising the getter material has a plane extension and comprises slots reaching through the first layer.

7. The pressure sensor of claim 1 , wherein the first stationary electrode comprising the getter material comprises individual elements comprising the getter material.

8. The pressure sensor of claim 1 , wherein the first stationary electrode comprising the getter material comprises individual elements comprising the getter material, wherein each individual element comprises the first layer of conducting material different from the getter material, and wherein the second layer comprises the getter material, and wherein the second layer is deposited on the first layer.

9. The pressure sensor of claim 1 , wherein the first stationary electrode comprising the getter material comprises a center portion and a ring portion around the center portion, wherein the center portion comprises a first layer and a second layer, wherein the first layer comprises conducting material that is different from the getter material, and wherein the second layer comprising the getter material is deposited on the first layer, and wherein the ring portion exclusively comprises the getter material.

10. The pressure sensor of claim 1 , wherein the first stationary electrode comprising the getter material comprises a center portion and a ring portion around the center portion, wherein the center portion comprises a conducting material that is different from the getter material, and wherein the ring portion comprises the getter material.

11. The pressure sensor of claim 1 , comprising a cavity, wherein the deformable membrane separates the cavity and a port open to an outside of the pressure sensor, and wherein the first stationary electrode is arranged inside the cavity.

12. The pressure sensor of claim 1 , wherein only the first stationary electrode comprises the getter material, and wherein the deformable membrane is electrically conducting and wherein the deformable membrane is the second electrode.

13. The pressure sensor of claim 7 , wherein the first stationary electrode comprising the getter material has a plane extension, wherein the individual elements are arranged next to each other in the plane of the first stationary electrode, and wherein each individual element is electrically connected to at least one of the neighboring individual elements.

14. The pressure sensor of claim 11 , wherein the first stationary electrode is arranged at a bottom of the cavity facing the deformable membrane, and wherein the cavity is evacuated.

15. A pressure sensor, comprising
a deformable membrane deflecting in response to pressure applied,
a first stationary electrode and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied,
wherein at least one of the first and the second electrode comprises a getter material for collecting gas molecules,
wherein the at least one electrode that comprises the getter material comprises a first layer and a second layer, wherein the second layer comprises the getter material and wherein the second layer is deposited on the first layer, wherein the first layer comprises conducting material that is different from the getter material,
wherein the second layer faces a volume to collect the gas molecules from,
wherein the second layer has a plane extension and comprises slots orthogonal to the plane extension which slots reach into the first layer.

16. A pressure sensor, comprising
a deformable membrane deflecting in response to pressure applied,
a first stationary electrode and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied,
wherein at least one of the first and the second electrode comprises a getter material for collecting gas molecules,
wherein the at least one electrode that comprises the getter material comprises a center portion and a ring portion around the center portion,
wherein the center portion comprises a first layer and a second layer, wherein the first layer comprises of conducting material that is different from the getter material, and wherein the second layer comprise the getter material, and wherein the second layer is deposited on the first layer, and
wherein the ring portion exclusively comprises the getter material.

Assignees

• Invensense Inc

Inventors

• Schumm Johannes
• Reinhard Andreas
• Kraehenbuehl Thomas
• Thiele Stefan
• Hummel Rene
• Lin Chung-Hsien
• Su wang shen
• Tang Tsung Lin
• Lin Chia Min

Classifications

• H10W72/012

  of bump connectors, dummy bumps or thermal bumps · CPC title

• G01L9/0042 Primary

  Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms (details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively) · CPC title

• G01L9/0045 Primary

  Diaphragm associated with a buried cavity · CPC title

• B81C1/00285

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title

• B81B2203/0315

  Cavities · CPC title