Composite shielding

Patent metadata

Field	Value
Publication number	US-9957608-B2
Application number	US-201213371642-A
Country	US
Kind code	B2
Filing date	Feb 13, 2012
Priority date	Feb 11, 2011
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

A composite shield assembly is for use in deposition apparatus defining a work piece location. The assembly includes a first shield element for position circumjacent the work piece location and a second shield element for extending around and carrying the first element. The thermal conductivity of the first element is greater than that of the second element, and the elements are arranged for intimate thermal contact.

First claim

What is claimed is:

1. A composite shield assembly for use in deposition apparatus defining a workpiece location, the assembly including:
a first shield element, constituting a shadow shield, for positioning circumjacent the workpiece location; and
a second shield element extending around and carrying the first element, and
wherein the first shield element consists of aluminium or an alloy thereof and the second shield element consists of stainless steel so that the thermal conductivity of the first element is greater than that of the second element, and
the first element is disposed within and press or friction fit to the second element to place the first and second elements in contact with one another such that thermal energy will thereby transfer directly from the first element to the second element by conduction.

2. A deposition chamber comprising:
support structure defining a workpiece location at which a workpiece is processed; and
a composite shield assembly including a first shield element circumjacent the workpiece location and configured as a shadow shield around the workpiece location, and a second shield element extending around and carrying the first element, and
wherein the first shield element consists of aluminium or an alloy thereof and the second shield element consists of stainless steel so that the thermal conductivity of the first element is greater than that of the second element, and
the first element is disposed within and press or friction fit to the second element such that the elements contact one another and thermal energy will transfer from the first element to the second element by conduction.

3. The chamber as claimed in claim 2 and having a chamber wall defining therein a processing space in which the workpiece location is defined and wherein the second element is disposed against the chamber wall so as to extend therealong and mounts the first element on the chamber wall.

4. The chamber as claimed in claim 3 wherein the second element forms a shield for part of the chamber wall.

5. A deposition apparatus comprising the deposition chamber as claimed in claim 2 ; and
a power supply that delivers power to the deposition chamber,
wherein the deposition chamber comprises:
support structure defining the workpiece location where a workpiece is processed.

6. The apparatus as claimed in claim 5 wherein the power supply is configured to deliver at least 30 kW to the deposition chamber.

7. The assembly as claimed in claim 1 wherein the first element is an annular element consisting of aluminum or an alloy thereof, and the second element is a cylindrical element consisting of stainless steel, and the first and second elements have an interface along an annular region of the assembly.

8. The assembly as claimed in claim 7 wherein the press or friction fit of the first element to the second element exists along the annular region such that thermal energy will transfer directly across the interface from an annular aluminium or aluminium alloy face of the first element to an annular stainless steel face of the second element.

9. The deposition chamber as claimed in claim 2 wherein the first element of the shield assembly is an annular element consisting of aluminum or an alloy thereof, and the second element of the shield assembly is a cylindrical element consisting of stainless steel, and the first and second elements have an interface along an annular region of the assembly.

10. The deposition chamber as claimed in claim 9 wherein the press or friction fit of the first element to the second element exists along the annular region such that thermal energy will transfer directly across the interface from an annular aluminium or aluminium alloy face of the first element to an annular stainless steel face of the second element.

11. The deposition apparatus as claimed in claim 5 wherein the first element of the shield assembly is an annular element consisting of aluminum or an alloy thereof, and the second element of the shield assembly is a cylindrical element consisting of stainless steel, and the first and second elements have an interface along an annular region of the assembly.

12. The deposition apparatus as claimed in claim 11 wherein the press or friction fit of the first element to the second element exists along the annular region such that thermal energy will transfer directly across the interface from an annular aluminium or aluminium alloy face of the first element to an annular stainless steel face of the second element.

13. The assembly as claimed in claim 1 , wherein the second shield element projects radially inwardly from a location at which the first shield element is carried by the second shield element to a location under the first shield element.

14. The assembly as claimed in claim 7 , wherein the radially innermost portion of the annular first shield element tapers in a radially inward direction.

15. The deposition chamber as claimed in claim 2 , wherein the second shield element projects radially inwardly from a location at which the first shield element is carried by the second shield element to a location under the first shield element.

16. The deposition chamber as claimed in claim 2 , wherein the bottom surface of the radially innermost portion of the annular first shield element is disposed above the level of the uppermost surface of the support structure, the uppermost surface of the support structure being a planar surface against which the workpiece rests as it is processed in the apparatus.

17. The deposition chamber as claimed in claim 16 , wherein the radially innermost portion of the annular first shield element tapers in a radially inward direction.

18. The apparatus as claimed in claim 6 , wherein the bottom surface of the radially innermost portion of the annular first shield element is disposed above the level of the uppermost surface of the support structure, the uppermost surface of the support structure being a planar surface against which the workpiece rests as it is processed in the apparatus.

19. The apparatus as claimed in claim 6 , wherein the deposition chamber has a chamber wall including an inner peripheral surface delimiting a processing space in which the support structure is located, and
the second element of the composite shield assembly has an outer peripheral surface disposed against the inner peripheral surface of the chamber wall so as to extend therealong, and the second element mounts the first element on the chamber wall.

20. A composite shield assembly made by a process of:
providing a first shield element consisting of aluminium or an alloy thereof, as a shadow shield, for positioning circumjacent the workpiece location;
providing a second shield element consisting of stainless steel so that the thermal conductivity of the first element is greater than that of the second element, and
wherein the first shield element has a circumferential portion, and the second shield element also has a circumferential portion,
the circumferential portions have inner and outer diameters, respectively, and
the outer diameter is greater than the inner diameter by an amount in a range of +0.1 to +0.3 mm; and
forcing the circumferential portions together with the circumferential portion having the outer diameter disposed within the circumferential portion having the inner diameter to press or friction fit the first shield element to the second shield element and thereby place the first and second elements in contact with one another such tha

Assignees

• Widdicks Clive Luca
• Moncrieff Ian
• Spts Technologies Ltd

Inventors

• Widdicks Clive Luca
• Moncrieff Ian

Classifications

• C23C14/564 Primary

  Means for minimising impurities in the coating chamber such as dust, moisture, residual gases · CPC title

• H01J37/3411

  Constructional aspects of the reactor · CPC title