Imprinting method and curable composition for imprinting

Patent metadata

Field	Value
Publication number	US-9957340-B2
Application number	US-201314647943-A
Country	US
Kind code	B2
Filing date	Nov 26, 2013
Priority date	Nov 30, 2012
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

An imprinting method for forming a pattern of a cured product by irradiating a curable composition for imprinting disposed on a substrate with light while the curable composition is in contact with a mold having surface asperities and removing the mold from a cured product of the curable composition. The method includes bringing the mold into contact with the curable composition in a condensable gas atmosphere, wherein the curable composition for imprinting has a viscosity in the range of 1 cP to 40 cP in air at 23° C., and the condensable gas is introduced between the mold and the curable composition such that the curable composition for imprinting has a condensable gas solubility (gas/(curable composition+gas)) (g/g) in the range of 0.1 to 0.4.

First claim

The invention claimed is:

1. An imprinting method for forming a pattern of a cured product by irradiating a curable composition for imprinting disposed on a substrate with light while the curable composition is in contact with a mold having surface asperities and removing the mold from a cured product of the curable composition, the imprinting method comprising:
bringing the mold into contact with the curable composition in a condensable gas atmosphere,
wherein the curable composition for imprinting has a viscosity in the range of 1 cP to 40 cP in air at 23° C., and
the condensable gas is introduced between the mold and the curable composition such that the curable composition for imprinting has a condensable gas solubility (gas/(curable composition+gas)) (g/g) in the range of 0.1 to 0.4.

2. The imprinting method according to claim 1 ,
wherein the curable composition for imprinting has a maximum condensable gas solubility (gas/(curable composition+gas)) (g/g) in the range of 0.1 to 0.4, and
wherein the maximum condensable gas solubility is determined by charging a 9-ml brown bottle with 3 g of the curable composition, measuring the weight of the curable composition at 23° C. at 1 atm before and after bubbling of the condensable gas at a flow rate of 0.1 L/min for 15 minutes, and dividing the increased weight due to the bubbling by the total weight of the curable composition and the condensable gas.

3. The imprinting method according to claim 2 ,
wherein the curable composition for imprinting contains
at least one (meth)acrylate monomer as an (A) component, and
a polymerization initiator as a (B) component, and
the (A) component has a carbon atom ring structure, and
the relationship between the amount of carbon M CR of the ring structure and the total amount of carbon M TOT of the (A) component satisfies the following formula
0.3< M CR /M TOT ≤0.8.

4. The imprinting method according to claim 2 ,
wherein the curable composition for imprinting contains
at least one (meth)acrylate monomer as an (A) component, and
a polymerization initiator as a (B) component, and
the Hansen distance (Ra′) between the condensable gas and the (A) component monomer and the molecular weight (MW) of the monomer satisfies the following formula
800< Ra ′*MW<3800[(MPa) 1/2 ].

5. The imprinting method according to claim 2 ,
wherein the curable composition for imprinting includes at least two (meth)acrylate monomers, and
the maximum condensable gas solubility (gas/(curable composition+gas)) (g/g) difference between the monomers is 0.23 or less.

6. The imprinting method according to claim 2 ,
wherein the curable composition for imprinting contains
at least one (meth)acrylate monomer as an (A) component, and
a polymerization initiator as a (B) component, and
at least one of the (A) component monomer has a viscosity in the range of 1 cP to 40 cP in air at 23° C. and includes a structure having the formula

wherein R═C n H 2n and n is 9 or more.

7. The imprinting method according to claim 2 ,
wherein the curable composition for imprinting contains
at least one (meth)acrylate monomer as an (A) component, and
a polymerization initiator as a (B) component, and
at least one of the (A) component monomer has a viscosity in the range of 1 cP to 40 cP in air at 23° C. and includes a structure having the formulae

wherein n is 4 or less.

8. The imprinting method according to claim 1 , wherein the condensable gas has a boiling point in the range of −10° C. to 23° C.

9. The imprinting method according to claim 1 , wherein the condensable gas has a saturated vapor pressure in the range of 0.1 to 0.4 MPa at 23° C.

10. The imprinting method according to claim 1 , further comprising placing the curable composition for imprinting on the substrate, wherein the placing of the curable composition for imprinting includes discretely arranging droplets of the curable composition on the substrate using an ink jet method.

11. A method for manufacturing an article, comprising:
forming a pattern of a cured product of a curable composition on a substrate using the imprinting method according to claim 1 ; and
processing the substrate on which the pattern has been formed.

Assignees

• Canon Kk

Inventors

• Chiba Keiko
• Ito Toshiki
• Iimura Akiko
• Kawasaki Youji
• Yamashita Keiji
• Kato Jun

Classifications

• C08F222/10

  Esters · CPC title

• B29L2011/00

  Optical elements, e.g. lenses, prisms · CPC title

• C09D133/08

  Homopolymers or copolymers of acrylic acid esters · CPC title

• B29C59/16

  by wave energy or particle radiation {, e.g. infrared heating (B29C59/007 takes precedence)} · CPC title

• C08L33/08

  Homopolymers or copolymers of acrylic acid esters · CPC title